Si lattice parameter measurement by centimeter X-ray interferometry.
A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.
Ferroglio
Luca
L
Politecnico di Torino, Torino, Italy.
Mana
Giovanni
G
Massa
Enrico
E
D018360:Crystallography, X-Ray / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008422:Materials Testing / Q000295:instrumentation*; D049329:Nanostructures / Q000648:ultrastructure*; D012825:Silicon / Q000737:chemistry*
D012825:Silicon