Blind estimation of general tip shape in AFM imaging.
The use of flared tip and bi-directional servo control in some recent atomic force microscopes (AFM) has made it possible for these advanced AFMs to image structures of general shapes with undercut surfaces. AFM images are distorted representations of sample surfaces due to the dilation produced by the finite size of the tip. It is necessary to obtain the tip shape in order to correct such tip distortion. This paper presents a noise-tolerant approach that can for the first time estimate a general 3-dimensional (3D) tip shape from its scanned image in such AFMs. It extends an existing blind tip estimation method. With the samples, images, and tips described by dexels, a representation that can describe general 3D shapes, the new approach can estimate general tip shapes, including reentrant features such as undercut lines.
Mechanical, Materials and Aerospace Engineering, Illinois Institute of Technology, Chicago, IL 60616, USA. ftian1@iit.edu
Fenglei
F
Tian
Xiaoping
X
Qian
J S
JS
Villarrubia