Fabrication and characterization of optimized corner-cut square microresonators.
In this paper we report the fabrication and characterization of waveguide coupled square resonators with modified corners, in particular the corner-cut square resonator. We employ rigorous FDTD analysis to identify an optimal corner-cut length and compare this with our experimental findings. Two- and three dimensional FDTD analysis is also used to optimize the coupling gap and the width of the coupling waveguide. Fabrication of the square microresonators on silicon-on-insulators by conventional E-beam lithography and dry etching techniques will be discussed in detail. The characterization of these corner-cut square microresonators shows good performance and excellent agreement with the rigorous electromagnetic simulations.
Department of Electrical and Computer Engineering, University of Delaware, Newark, DE 19716 USA. marchena@ee.udel.edu
Elton
E
Marchena
Shouyuan
S
Shi
Dennis
D
Prather
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