Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics.
We present experimental and numerical studies of the properties of a capacitively coupled 13.56MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.
Institute of Theoretical and Applied Mechanics, Russian Academy of Sciences, Novosibirsk 630090, Russia.
I V
IV
Schweigert
A L
AL
Alexandrov
D A
DA
Ariskin
F M
FM
Peeters
I
I
Stefanović
E
E
Kovacević
J
J
Berndt
J
J
Winter