A novel multi-detection technique for three-dimensional reciprocal-space mapping in grazing-incidence X-ray diffraction.
A new scattering technique in grazing-incidence X-ray diffraction geometry is described which enables three-dimensional mapping of reciprocal space by a single rocking scan of the sample. This is achieved by using a two-dimensional detector. The new set-up is discussed in terms of angular resolution and dynamic range of scattered intensity. As an example the diffuse scattering from a strained multilayer of self-assembled (In,Ga)As quantum dots grown on GaAs substrate is presented.
Schmidbauer
M
M
Leibniz Institut für Kristallzüchtung, Max-Born-Strasse 2, D-12489 Berlin, Germany. schmidbauer@ikz-berlin.de
Schäfer
P
P
Besedin
S
S
Grigoriev
D
D
Köhler
R
R
Hanke
M
M
D000465:Algorithms; D003198:Computer Simulation; D004867:Equipment Design; D019544:Equipment Failure Analysis; D021621:Imaging, Three-Dimensional / Q000379:methods*; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation / Q000379:methods*; D014159:Transducers; D014961:X-Ray Diffraction / Q000295:instrumentation* / Q000379:methods*