Epitaxial ternary nitride thin films prepared by a chemical solution method.
It is indispensable to use thin films for many technological applications. This is the first report of epitaxial growth of ternary nitride AMN2 films. Epitaxial tetragonal SrTiN2 films have been successfully prepared by a chemical solution approach, polymer-assisted deposition. The structural, electrical, and optical properties of the films are also investigated.
Luo
Hongmei
H
Materials Physics and Applications Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA.
Wang
Haiyan
H
Bi
Zhenxing
Z
Feldmann
David M
DM
Wang
Yongqiang
Y
Burrell
Anthony K
AK
McCleskey
T Mark
TM
Bauer
Eve
E
Hawley
Marilyn E
ME
Jia
Quanxi
Q