Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors.
We propose a method for manufacturing linear variable interference filters for two-dimensional (2D) array detectors, based on the use of correcting masks combining both rotation and translation movements of the masks and substrates. The major advantage of this method is its capability to produce several identical filters in a single run. 20 mm x 20 mm samples were manufactured with a wavelength ratio almost equal to 2 along the thickness gradient direction. In agreement with calculations, the measured uniformity perpendicular to the gradient is about 99.8% along 20 mm.
Abel-Tibérini
Laëtitia
L
Institut FRESNEL, UMR CNRS 6133, Université Paul Cézanne-Ecole Centrale Marseille, Domaine Universitaire de Saint-Jérôme, 13397 Marseille Cedex 20, France. laetitia.abel@fresnel.fr
Lemarquis
Frédéric
F
Lequime
Michel
M