Fabrication of silicon nanopillar teradot arrays by electron-beam patterning for nanoimprint molds.
Wi
Jung-Sub
JS
Department of Materials Science and Engineering, Seoul National University, San 56-1, Sillim-dong, Gwanak-gu, Seoul 151-742, Korea.
Lee
Hyo-Sung
HS
Lim
Kipil
K
Nam
Sung-Wook
SW
Kim
Hyun-Mi
HM
Park
Soo-Yeon
SY
Lee
Jae Jong
JJ
Hong
Chris Daehoon
CD
Jin
Sungho
S
Kim
Ki-Bum
KB
D006858:Hydrofluoric Acid / Q000737:chemistry; D046228:Microarray Analysis / Q000295:instrumentation*; D008855:Microscopy, Electron, Scanning / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D043942:Nanotubes / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D000644:Quaternary Ammonium Compounds / Q000737:chemistry; D012825:Silicon / Q000737:chemistry*
D000644:Quaternary Ammonium Compounds; C027917:tetramethylammonium; D006858:Hydrofluoric Acid; D012825:Silicon