Integrated optical sensor using a liquid-core waveguide in a Mach-Zehnder interferometer.
We demonstrate experimentally an optical sensor based on a monolithically integrated Mach-Zehnder interferometer comprising a liquid-core waveguide in one of the optical paths. The device is fabricated with a technique for self-forming microchannels in silica-on-silicon using standard photolithography and deposition processes. Refractometry with a resolution of better than 4x10(-6) is demonstrated using the thermo-optic effect of the liquid medium to vary its refractive index. The polarization dependence of the device response is analyzed.
Dumais
Patrick
P
Communications Research Centre Canada, Station H, Ottawa, Ontario, Canada.
Callender
Claire L
CL
Noad
Julian P
JP
Ledderhof
Christopher J
CJ