Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films.
Investigation of the phase-growth kinetics and identification of the phases formed as a result of reactive diffusion in the system of Si single crystals and Mo thin films, has been carried out by electrochemical anodic etching.
Fomin
B I
BI
Institute of Semiconductor Physics, Academy of Sciences of the USSR, Siberian Branch, Novosibirsk, U.S.S.R.
Gershinskii
A E
AE
Cherepov
E I
EI