Towards advanced chemical microsensors-an overview.
The paper presents design and performance of miniaturized chemical sensors based on silicon transducers: ion-sensitive field effect transistor (ISFET) and solid-state electrode (SSE). The sensors were fabricated as back-side contact structures, which facilitate their mounting in a flow-cell. The role of an intermediate layer between the transducer and the ion-selective membrane is discussed. Various polymeric matrices were used to manufacture microsensors: polysiloxanes, polyacrylates (polymethacrylates), polyurethanes.
Wróblewski
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W
Warsaw University of Technology, Department of Analytical Chemistry, Noakowskiego 3, 00-664 Warsaw, Poland.
Dybko
A
A
Malinowska
E
E
Brzózka
Z
Z