title: Determination of copper in ammonium fluoride solutions by extraction and atomic-absorption spectrophotometry.
abstract: Extraction with sodium diethyldithiocarbamate, followed by mineralization and atomic-absorption spectroscopy is used to determine down to 10(-7)% Cu in 40% ammonium fluoride solution used in the manufacture of semiconductors.
authors.affiliation: IBM Laboratories, Component Development, Dept. 3192 D-7030 Boeblingen, Schoenaicher Strasse 220 West Germany.
authors.forename: M
authors.initials: M
authors.lastname: Briska
authors.forename: W
authors.initials: W
authors.lastname: Hoffmeister