Laser-machined piezoelectric cantilevers for mechanical energy harvesting.
In this study, we report results on a piezoelectric- material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8 m/s(2)). The device was found to generate continuous power of 1.13 microW at 870 Hz across a 288.5 kOmega load with a power density of 301.3 microW/cm(3).
Kim
HyunUk
H
Materials Science and Engineering, University of Texas, Arlington, TX, USA.
Bedekar
Vishwas
V
Islam
Rashed Adnan
RA
Lee
Woo-Ho
WH
Leo
Don
D
Priya
Shashank
S
D000162:Acoustics / Q000295:instrumentation*; D011211:Electric Power Supplies; D004735:Energy Transfer; D004867:Equipment Design / Q000295:instrumentation / Q000379:methods*; D019544:Equipment Failure Analysis; D007834:Lasers; D009038:Motion; D014732:Vibration