title: Modified mason model for bulk acoustic wave resonators.
abstract: Accurate modeling of a bulk acoustic wave resonator frequency response is limited by the inability of the current 1-D models to simulate certain parasitic modes excited in realistic 3-D structures. A simple technique is proposed to simulate such parasitic modes by employing the 1-D Mason Model of a resonator and a coupling term between the fundamental mode and those parasitic modes. This Modified Mason Model allows accurate simulation of resonators with arbitrary impedance and arbitrary resonating frequency. Finally, the model's prediction is compared with the on-wafer measurement of a ladder-type filter composed of several resonators.
authors.affiliation: Avago Technologies, Wireless Semiconductor Division, San Jose, CA, USA. tiberiu.jamneala@avagotech.com
authors.forename: Tiberiu
authors.initials: T
authors.lastname: Jamneala
authors.forename: Paul
authors.initials: P
authors.lastname: Bradley
authors.forename: Uli B
authors.initials: UB
authors.lastname: Koelle
authors.forename: Allen
authors.initials: A
authors.lastname: Chien
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D000465:Algorithms; D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008962:Models, Theoretical; D014159:Transducers; D014732:Vibration