Vertical multiple-slot waveguide ring resonators in silicon nitride.
This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 microm, 90 microm and 110 microm) have been carried out for TE and TM polarizations at the wavelength of 1.3 microm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
Vivien
Laurent
L
Institut d'Electronique Fondamentale, CNRS UMR 8622, Université Paris-Sud 11, Orsay cedex, France. Laurent.vivien@u-psud.fr
Marris-Morini
Delphine
D
Griol
Amadeu
A
Gylfason
Kristinn B
KB
Hill
Daniel
D
Lvarez
Jesús
J
Sohlström
Hans
H
Hurtado
Juan
J
Bouville
David
D
Cassan
Eric
E