title: Towards advanced chemical microsensors-an overview.
abstract: The paper presents design and performance of miniaturized chemical sensors based on silicon transducers: ion-sensitive field effect transistor (ISFET) and solid-state electrode (SSE). The sensors were fabricated as back-side contact structures, which facilitate their mounting in a flow-cell. The role of an intermediate layer between the transducer and the ion-selective membrane is discussed. Various polymeric matrices were used to manufacture microsensors: polysiloxanes, polyacrylates (polymethacrylates), polyurethanes.
authors.affiliation: Warsaw University of Technology, Department of Analytical Chemistry, Noakowskiego 3, 00-664 Warsaw, Poland.
authors.forename: W
authors.initials: W
authors.lastname: Wróblewski
authors.forename: A
authors.initials: A
authors.lastname: Dybko
authors.forename: E
authors.initials: E
authors.lastname: Malinowska
authors.forename: Z
authors.initials: Z
authors.lastname: Brzózka