title: Laser-machined piezoelectric cantilevers for mechanical energy harvesting.
abstract: In this study, we report results on a piezoelectric- material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8 m/s(2)). The device was found to generate continuous power of 1.13 microW at 870 Hz across a 288.5 kOmega load with a power density of 301.3 microW/cm(3).
authors.affiliation: Materials Science and Engineering, University of Texas, Arlington, TX, USA.
authors.forename: HyunUk
authors.initials: H
authors.lastname: Kim
authors.forename: Vishwas
authors.initials: V
authors.lastname: Bedekar
authors.forename: Rashed Adnan
authors.initials: RA
authors.lastname: Islam
authors.forename: Woo-Ho
authors.initials: WH
authors.lastname: Lee
authors.forename: Don
authors.initials: D
authors.lastname: Leo
authors.forename: Shashank
authors.initials: S
authors.lastname: Priya
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D011211:Electric Power Supplies; D004735:Energy Transfer; D004867:Equipment Design / Q000295:instrumentation / Q000379:methods*; D019544:Equipment Failure Analysis; D007834:Lasers; D009038:Motion; D014732:Vibration