Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition.
A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO(2) and Si substrates by using metal-organic precursors and an NH(3) plasma mixed with a suitable amount of SiH(4) as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.
Lee
Han-Bo-Ram
HB
Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea.
Gu
Gil Ho
GH
Son
Jong Yeog
JY
Park
Chan Gyung
CG
Kim
Hyungjun
H
D053768:Metal Nanoparticles / Q000737:chemistry; D046228:Microarray Analysis; D046529:Microscopy, Electron, Transmission; D036103:Nanotechnology / Q000295:instrumentation; D043942:Nanotubes / Q000737:chemistry*; D013499:Surface Properties