Love waves in SiO(2) layers on STW-resonators based on LiTaO(3).
We present first studies of sensitivity increase of commercially available Murata SAF 380-type surface acoustic wave (SAW) devices by the excitation of Love waves. Sputtered SiO(2) is studied as wave-guiding layer. Excitation of Love waves on such devices is investigated both theoretically and experimentally. It is demonstrated that the application of an optimized wave-guiding layer increases the sensitivity. Both theoretical predictions and experiments yield an optimum layer thickness for maximum mass sensitivity between 3 and 4mum for the given system.
Barié
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Forschungszentrum Karlsruhe GmbH, Institut für Instrumentelle Analytik, P.O. Box 3640, D-76021 Karlsruhe, Germany.
Wessa
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T
Bruns
M
M
Rapp
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M