title: Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films.
abstract: Investigation of the phase-growth kinetics and identification of the phases formed as a result of reactive diffusion in the system of Si single crystals and Mo thin films, has been carried out by electrochemical anodic etching.
authors.affiliation: Institute of Semiconductor Physics, Academy of Sciences of the USSR, Siberian Branch, Novosibirsk, U.S.S.R.
authors.forename: B I
authors.initials: BI
authors.lastname: Fomin
authors.forename: A E
authors.initials: AE
authors.lastname: Gershinskii
authors.forename: E I
authors.initials: EI
authors.lastname: Cherepov