title: Vertical multiple-slot waveguide ring resonators in silicon nitride.
abstract: This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 microm, 90 microm and 110 microm) have been carried out for TE and TM polarizations at the wavelength of 1.3 microm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
authors.affiliation: Institut d'Electronique Fondamentale, CNRS UMR 8622, Université Paris-Sud 11, Orsay cedex, France. Laurent.vivien@u-psud.fr
authors.forename: Laurent
authors.initials: L
authors.lastname: Vivien
authors.forename: Delphine
authors.initials: D
authors.lastname: Marris-Morini
authors.forename: Amadeu
authors.initials: A
authors.lastname: Griol
authors.forename: Kristinn B
authors.initials: KB
authors.lastname: Gylfason
authors.forename: Daniel
authors.initials: D
authors.lastname: Hill
authors.forename: Jesús
authors.initials: J
authors.lastname: Lvarez
authors.forename: Hans
authors.initials: H
authors.lastname: Sohlström
authors.forename: Juan
authors.initials: J
authors.lastname: Hurtado
authors.forename: David
authors.initials: D
authors.lastname: Bouville
authors.forename: Eric
authors.initials: E
authors.lastname: Cassan