title: Analysis of residual phosphorus in poly(p-phenylene benzoxazole), PBO, film by x-ray fluorescence (XRF) spectrometry.
abstract: Poly(p-phenylene benzoxazole), PBO, is a rigid rod polymer which is polymerized in polyphosphoric acid. Oriented POB film shows good mechanical strength, excellent thermal stability and solvent resistance, and low dielectric constant. The measurement of residual phosphorus in the film is necessary since residual phosphorus may impact the physical and electrical properties of the film. A rapid and non-destructive XRF method has been developed for the analysis of residual phosphorus content in PBO thin films (0.1-2 mil). The XRF method demonstrated good linearity over the range of 150-4100 ppm, with a detection limit of ca 40 ppm. The residual phosphorus in several PBO thin film samples was also measured using NMR spectroscopy, and excellent agreement with the XRF analysis was obtained.
authors.affiliation: Analytical Research, Dow Chemical Western R&D Center, Walnut Creek, California, U.S.A.
authors.forename: M R
authors.initials: MR
authors.lastname: Fuh
authors.forename: W E
authors.initials: WE
authors.lastname: Rochefort