Electro-optic polymer cladding ring resonator modulators.
Compact, low capacitance optical modulators are vital for efficient, high-speed chip to chip optical interconnects. Electro-optic (EO) polymer cladding micro-ring resonator modulators have been fabricated and their performance is characterized. Optical modulators with ring diameters smaller than 50 microm have been demonstrated in a silicon nitride based waveguide system on silicon oxide with a top cladding of an electro-optic polymer. Optical modulation has been observed with clock signals up to 10 GHz.
Block
Bruce A
BA
Components Research, Intel Corporation, Hillsboro, OR 97124, USA. bruce.a.block@intel.com
Younkin
Todd R
TR
Davids
Paul S
PS
Reshotko
Miriam R
MR
Chang
Peter
P
Polishak
Brent M
BM
Huang
Su
S
Luo
Jingdong
J
Jen
Alex K Y
AK