Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions.
Absolute testing of spherical surfaces is a technological necessity because of increased accuracy requirements. In a Fizeau setup, the main part of the interferometer deviations thereby comes from the reference surface. We demonstrate the validity of an absolute testing procedure for the reference surface that has been proposed earlier. The procedure relies on the decomposition of the surface deviations into odd and even parts and could be used in partially coherent illumination. The odd deviations are obtained from a basic and a 180 degree-rotated position of an auxiliary sphere, and the even deviations can be measured with the help of a cat's eye position in double pass using an opaque half screen in the interferometer aperture.
Schreiner
R
R
Jenoptik Laser, Optik, Systeme GmbH, Goeschwitzer Strasse 25, D-07745 Jena, Germany.
Schwider
J
J
Lindlein
N
N
Mantel
K
K
D000465:Algorithms; D002138:Calibration; D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation / Q000379:methods*; D008422:Materials Testing; D055095:Optics and Photonics; D012030:Refractive Errors; D012031:Refractometry / Q000295:instrumentation / Q000379:methods*; D013499:Surface Properties