title: Nondestructive characterization of nanoscale layered samples.
abstract: Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by means of SRXRF, mu-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e.g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, mu-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters.
authors.affiliation: Materials Science Institute, Technische Universität Darmstadt, Petersenstr. 23, 64287, Darmstadt, Germany.
authors.forename: Olaf
authors.initials: O
authors.lastname: Baake
authors.forename: Peter S
authors.initials: PS
authors.lastname: Hoffmann
authors.forename: Stefan
authors.initials: S
authors.lastname: Flege
authors.forename: Hugo M
authors.initials: HM
authors.lastname: Ortner
authors.forename: Sebastian
authors.initials: S
authors.lastname: Gottschalk
authors.forename: Wolfram
authors.initials: W
authors.lastname: Berky
authors.forename: Adam G
authors.initials: AG
authors.lastname: Balogh
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Ensinger
authors.forename: Burkhard
authors.initials: B
authors.lastname: Beckhoff
authors.forename: Michael
authors.initials: M
authors.lastname: Kolbe
authors.forename: Martin
authors.initials: M
authors.lastname: Gerlach
authors.forename: Beatrix
authors.initials: B
authors.lastname: Pollakowski
authors.forename: Jan
authors.initials: J
authors.lastname: Weser
authors.forename: Gerhard
authors.initials: G
authors.lastname: Ulm
authors.forename: Michael
authors.initials: M
authors.lastname: Haschke
authors.forename: Elena
authors.initials: E
authors.lastname: Blokhina
authors.forename: Markus
authors.initials: M
authors.lastname: Peter
authors.forename: Dominique
authors.initials: D
authors.lastname: Porta
authors.forename: Martin
authors.initials: M
authors.lastname: Heck
mesh_terms: D000535:Aluminum / Q000032:analysis*; D003035:Cobalt / Q000032:analysis*; D003300:Copper / Q000032:analysis*; D049329:Nanostructures / Q000032:analysis; D036103:Nanotechnology; D009532:Nickel / Q000032:analysis*; D010316:Particle Size; D012680:Sensitivity and Specificity; D013052:Spectrometry, X-Ray Emission; D013499:Surface Properties
chemical_list: D003035:Cobalt; D003300:Copper; D009532:Nickel; D000535:Aluminum