title: Characterization of electrode surface roughness and its impact on ion trap mass analysis.
abstract: With the recent trend towards mass spectrometer miniaturization, the fabrication of mass analyzers and other ion optical components is being performed at scales where critical dimensions range from several millimeters to several micrometers. Depending on the sizes of the objects and the nature of the fabrication method used, electrode surface roughness can become non-negligible and affect the analytical performance of the mass analyzer. In this work, a method of characterizing surface roughness is introduced through the concept of spatial roughness frequency. The roughness of a given surface is quantitatively described using spatial roughness components at a series of frequencies and with characteristic intensities. Based on this concept, an analytical method has been developed to describe the electromagnetic field inside an electrode assembly including consideration for the electrode roughness. The methodology is applied in simplified form to cylindrical and rectilinear ion trap analyzers. Four types of surface finishes were applied to ion trap electrodes of various sizes to illustrate the surface roughness effects on the high-order fields and to compare the analytical performance of the ion traps. Application of this method to arrays of large numbers of micro-scale ion traps has enabled the impact of fabrication methodology to be evaluated in terms of mass resolution for the ion trap arrays.
authors.affiliation: Department of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA.
authors.forename: Wei
authors.initials: W
authors.lastname: Xu
authors.forename: William J
authors.initials: WJ
authors.lastname: Chappell
authors.forename: R Graham
authors.initials: RG
authors.lastname: Cooks
authors.forename: Zheng
authors.initials: Z
authors.lastname: Ouyang
mesh_terms: D000465:Algorithms; D003198:Computer Simulation; D004566:Electrodes; D004574:Electromagnetic Fields; D013058:Mass Spectrometry / Q000295:instrumentation*; D008904:Miniaturization / Q000295:instrumentation*; D008962:Models, Theoretical; D013499:Surface Properties