High-resolution microspectrometer with an aberration-correcting planar grating.
A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS batch process the essential elements of the spectrometer are automatically aligned, and a low fabrication cost per device can be achieved. The second component is a spherical mirror, which is the only external part. The optimized grating structure compensates for aberrations within the spectrometer operating range, resulting in a diffraction-limited performance of the spectrometer optics. The prototype of the device has been fabricated and characterized. It takes a volume of 0.5 cm(3) and provides a FWHM spectral resolution of 0.7 nm over a 350 nm bandwidth from 420 nm to 770 nm combined with an etendue of 7.4x10(-5) mm(2) sr.
Grabarnik
Semen
S
Faculty Electrical Engineering, Mathematics and Computer Science, Department of MicroElectronics/Electronic Instrumentation, Delft University of Technology, Mekelweg 4, 2628 CD,Delft, The Netherlands. s.grabarnik@tudelft.nl
Emadi
Arvin
A
Wu
Huaiwen
H
de Graaf
Ger
G
Wolffenbuttel
Reinoud F
RF
D004867:Equipment Design; D005898:Glass; D007091:Image Processing, Computer-Assisted; D008855:Microscopy, Electron, Scanning; D008904:Miniaturization; D008962:Models, Theoretical; D009356:Neon; D055095:Optics and Photonics; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon; D013057:Spectrum Analysis / Q000295:instrumentation*
D009356:Neon; D012825:Silicon