title: Focusing mirror for x-ray free-electron lasers.
abstract: We present the design, fabrication, and evaluation of a large total-reflection mirror for focusing x-ray free-electron laser beams to nanometer dimensions. We used an elliptical focusing mirror made of silicon that was 400 mm long and had a focal length of 550 mm. Electrolytic in-process dressing grinding was used for initial-step figuring and elastic emission machining was employed for final figuring and surface smoothing. A figure accuracy with a peak-to-valley height of 2 nm was achieved across the entire area. Characterization of the focused beam was performed at BL29XUL of SPring-8. The focused beam size was 75 nm at 15 keV, which is almost equal to the theoretical size.
authors.affiliation: Department of Precision Science and Technology, Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Mimura
authors.forename: Shinya
authors.initials: S
authors.lastname: Morita
authors.forename: Takashi
authors.initials: T
authors.lastname: Kimura
authors.forename: Daisuke
authors.initials: D
authors.lastname: Yamakawa
authors.forename: Weimin
authors.initials: W
authors.lastname: Lin
authors.forename: Yoshihiro
authors.initials: Y
authors.lastname: Uehara
authors.forename: Satoshi
authors.initials: S
authors.lastname: Matsuyama
authors.forename: Hirokatsu
authors.initials: H
authors.lastname: Yumoto
authors.forename: Haruhiko
authors.initials: H
authors.lastname: Ohashi
authors.forename: Kenji
authors.initials: K
authors.lastname: Tamasaku
authors.forename: Yoshinori
authors.initials: Y
authors.lastname: Nishino
authors.forename: Makina
authors.initials: M
authors.lastname: Yabashi
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Ishikawa
authors.forename: Hitoshi
authors.initials: H
authors.lastname: Ohmori
authors.forename: Kazuto
authors.initials: K
authors.lastname: Yamauchi