Development of UHV dynamic nanostencil for surface patterning.
A dynamic nanostencil system based on a movable atomic force microscopy (AFM) cantilever-borne mask has been developed in ultrahigh vacuum environment. This system is conceived to offer an outstanding nanopatterning capability of nanometer precision as well as in situ AFM characterization with a large scanning range. Evaporation experiments in both static and dynamic mode have been performed successfully on this system, and some crucial technical problems of stencilling technique such as resolution and clogging are investigated. As an important application of molecular electronics, a method to fabricate and connect nanoscale structures with microelectrodes by accurately combining it with static stenciling is presented.
Guo
Haiming
H
Centre d'Elaboration de Matériaux et d'Etudes Structurale (CEMES-CNRS), 29 Rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France.
Martrou
David
D
Zambelli
Tomaso
T
Dujardin
Erik
E
Gauthier
Sébastien
S