title: High-resolution microspectrometer with an aberration-correcting planar grating.
abstract: A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS batch process the essential elements of the spectrometer are automatically aligned, and a low fabrication cost per device can be achieved. The second component is a spherical mirror, which is the only external part. The optimized grating structure compensates for aberrations within the spectrometer operating range, resulting in a diffraction-limited performance of the spectrometer optics. The prototype of the device has been fabricated and characterized. It takes a volume of 0.5 cm(3) and provides a FWHM spectral resolution of 0.7 nm over a 350 nm bandwidth from 420 nm to 770 nm combined with an etendue of 7.4x10(-5) mm(2) sr.
authors.affiliation: Faculty Electrical Engineering, Mathematics and Computer Science, Department of MicroElectronics/Electronic Instrumentation, Delft University of Technology, Mekelweg 4, 2628 CD,Delft, The Netherlands. s.grabarnik@tudelft.nl
authors.forename: Semen
authors.initials: S
authors.lastname: Grabarnik
authors.forename: Arvin
authors.initials: A
authors.lastname: Emadi
authors.forename: Huaiwen
authors.initials: H
authors.lastname: Wu
authors.forename: Ger
authors.initials: G
authors.lastname: de Graaf
authors.forename: Reinoud F
authors.initials: RF
authors.lastname: Wolffenbuttel
mesh_terms: D004867:Equipment Design; D005898:Glass; D007091:Image Processing, Computer-Assisted; D008855:Microscopy, Electron, Scanning; D008904:Miniaturization; D008962:Models, Theoretical; D009356:Neon; D055095:Optics and Photonics; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon; D013057:Spectrum Analysis / Q000295:instrumentation*
chemical_list: D009356:Neon; D012825:Silicon