title: Generation of oxide nanopatterns by combining self-assembly of S-layer proteins and area-selective atomic layer deposition.
abstract: We report an effective method to fabricate two-dimensional (2D) periodic oxide nanopatterns using S-layer proteins as a template. Specifically, S-layer proteins with a unit cell dimension of 20 nm were reassembled on silicon substrate to form 2D arrays with ordered pores of nearly identical sizes (9 nm). Octadecyltrichlorosilane (ODTS) was utilized to selectively react with the S-layer proteins, but not the Si surface exposed through the pores defined by the proteins. Because of the different surface functional groups on the ODTS-modified S-layer proteins and Si surface, area-selective atomic layer deposition of metal oxide-based high-k materials, such as hafnium oxide, in the pores was achieved. The periodic metal oxide nanopatterns were generated on Si substrate after selective removal of the ODTS-modified S-layer proteins. These nanopatterns of high-k materials are expected to facilitate further downscaling of logic and memory nanoelectronic devices.
authors.affiliation: Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, USA.
authors.forename: Jiurong
authors.initials: J
authors.lastname: Liu
authors.forename: Yuanbing
authors.initials: Y
authors.lastname: Mao
authors.forename: Esther
authors.initials: E
authors.lastname: Lan
authors.forename: Diosdado Rey
authors.initials: DR
authors.lastname: Banatao
authors.forename: G Jason
authors.initials: GJ
authors.lastname: Forse
authors.forename: Jun
authors.initials: J
authors.lastname: Lu
authors.forename: Hans-Olof
authors.initials: HO
authors.lastname: Blom
authors.forename: Todd O
authors.initials: TO
authors.lastname: Yeates
authors.forename: Bruce
authors.initials: B
authors.lastname: Dunn
authors.forename: Jane P
authors.initials: JP
authors.lastname: Chang
mesh_terms: D001426:Bacterial Proteins / Q000737:chemistry* / Q000235:genetics / Q000378:metabolism / Q000648:ultrastructure; D003851:Deoxyribonucleases / Q000737:chemistry* / Q000235:genetics / Q000378:metabolism / Q000648:ultrastructure; D018625:Microscopy, Atomic Force; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D010087:Oxides / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry; D013053:Spectrophotometry; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties
chemical_list: D001426:Bacterial Proteins; D010087:Oxides; C061563:SbcC protein, Bacteria; D003851:Deoxyribonucleases; D012825:Silicon