Four free parameter empirical parametrization of glow discharge Langmuir probe data.
For the purpose of developing a simple empirical model capable of producing the electron energy distribution function (EEDF) from Langmuir probe I-V characteristics, a four parameter empirical equation that fits most Langmuir probe experimental data is suggested. The four free fitting parameters are related to the main plasma properties. These properties include the ion and electron saturation currents and the plasma electron temperature. This equation can be readily differentiated twice to give the EEDF according to the Druyvesteyn formula. Furthermore, a MATLAB platform based computer code based on this model yielding results for the plasma potential and all plasma parameters mentioned above is presented. The information given below can be used to write other computer codes for the same purpose in any other programming language.
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Department of Physics, College of Science, Mosul University, Mosul-Iraq.