Room temperature detachment nanolithography using a rigiflex polymeric mold.
We report on detachment nanolithography of an organic thin film at room temperature mediated by ultraviolet (UV) exposure. A nanopatterned, UV curable polyurethane acrylate (PUA) mold was placed on a spin-coated organic film made of 4,4'-bis[N-1-napthyl-N-phenyl-amino]biphenyl (NPB) under a low pressure (1-2 bar). A higher work of adhesion at the organic/mold interface induced detachment of the contacting layer on silicon or gold substrate, resulting in well-defined nanopatterns without a residual layer. The detachment was highly improved by a short-term UV exposure, rendering the film surface free from contaminant hydrocarbons with a lower cohesive force, as confirmed by Fourier transform infrared (FTIR) spectroscopy and measurements of contact angle of water.
Kim
Jae Kwan
JK
School of Mechanical and Aerospace Engineering, Institute of Advanced Machinery and Design, Seoul National University, Seoul 151-742, Korea.
Suh
Kahp Y
KY
D000268:Adhesiveness; D001713:Biphenyl Compounds / Q000737:chemistry*; D004867:Equipment Design; D006046:Gold; D053758:Nanoparticles / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods*; D009281:Naphthalenes / Q000737:chemistry*; D009930:Organic Chemicals / Q000737:chemistry; D011108:Polymers / Q000737:chemistry*; D011140:Polyurethanes / Q000737:chemistry; D012825:Silicon; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties; D013696:Temperature; D014466:Ultraviolet Rays
C533874:4,4'-bis(N-1-napthyl-N-phenyl-amino)biphenyl; D001713:Biphenyl Compounds; D009281:Naphthalenes; D009930:Organic Chemicals; D011108:Polymers; D011140:Polyurethanes; D006046:Gold; D012825:Silicon