Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks.
George
Matthew C
MC
Frederick Seitz Materials Research Laboratory, Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Nelson
Erik C
EC
Rogers
John A
JA
Braun
Paul V
PV
D021621:Imaging, Three-Dimensional; D007287:Inorganic Chemicals / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D008968:Molecular Conformation; D014961:X-Ray Diffraction
D007287:Inorganic Chemicals