title: Diamond waveguides fabricated by reactive ion etching.
abstract: We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers, Bragg reflectors/couplers and various interferometers.
authors.affiliation: School of EE&T, UNSW, Sydney, NSW 2052, Australia. m.hiscocks@student.unsw.edu.au
authors.forename: Mark P
authors.initials: MP
authors.lastname: Hiscocks
authors.forename: Kumaravelu
authors.initials: K
authors.lastname: Ganesan
authors.forename: Brant C
authors.initials: BC
authors.lastname: Gibson
authors.forename: Shane T
authors.initials: ST
authors.lastname: Huntington
authors.forename: François
authors.initials: F
authors.lastname: Ladouceur
authors.forename: Steven
authors.initials: S
authors.lastname: Prawer