Diamond waveguides fabricated by reactive ion etching.
We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers, Bragg reflectors/couplers and various interferometers.
Hiscocks
Mark P
MP
School of EE&T, UNSW, Sydney, NSW 2052, Australia. m.hiscocks@student.unsw.edu.au
Ganesan
Kumaravelu
K
Gibson
Brant C
BC
Huntington
Shane T
ST
Ladouceur
François
F
Prawer
Steven
S