Micro-multi-probe electrode array to measure neural signals.
A multi-electrode array (MEA) with 16 channels was designed to record simultaneously the velocity of conduction of neurons in a measurement system for bio-medical applications. MEA were fabricated with MEMS technology on a silicon-on-insulator (SOI) wafer, which controls the thickness of the probe effectively. All used probes have length 3mm and width 100mum. The thickness of the probe, 25mum, was defined by the thickness of the device layer on the SOI wafer. The multiple probes with a 16-site recording electrode array have been manufactured; their strength was tested with a force gauge and their electrical performance was tested with an impedance measurement system. The readout circuitry comprises an array of 16-site preamplifiers fully integrated on a chip that is capable of signal processing to improve the signal-noise-ratio (SNR). To demonstrate the capability, multiple neural signals were recorded simultaneously with all electrodes from each separate probe. To verify its capability of measuring neural signals, the MEA was used to measure these signals from the electrophysiology system of crayfish. The velocity of neural conduction recorded with a fabricated MEA is shown, and is comparable with a measurement with a traditional glass pipette. The MEA for recording neural signals would be improved in further development.
Chen
Chang-Hsiao
CH
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013,Taiwan.
Yao
Da-Jeng
DJ
Tseng
Sin-Hua
SH
Lu
Shao-Wei
SW
Chiao
Chuan-Chin
CC
Yeh
Shih-Rung
SR
D000200:Action Potentials / Q000502:physiology*; D000818:Animals; D003400:Astacoidea; D004567:Electrodes, Implanted; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008839:Microelectrodes; D009415:Nerve Net / Q000502:physiology*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity