Experimental setup for characterization of self-actuated microcantilevers with piezoresistive readout for chemical recognition of volatile substances.
This paper summarizes our achievements in the development of an advanced microcantilever-based platform for the detection and recognition of various volatile analytes. The implemented microcantilevers include integrated piezoresistive readout, integrated thermally driven bimorph actuator, and a gold pad at the cantilever apex for functionalization toward the detection of specific substances. Up to eight single microcantilevers can be installed and investigated quasisimultaneously in either gas flow or gas/vapor single injection mode. The experimental setup enables the detection of the microcantilever bending via surface stress changes, characterization of either amplitude or phase spectra of the microcantilever, and also calibration of its sensitivity.
Filenko
Denis
D
Department of Micro and Nano-Electronic Systems, Institute for Micro and Nanoelectronics, Technische Universitat Ilmenau, Postfach 100565, D-98 684 Ilmenau, Germany.
Ivanov
Tzvetan
T
Volland
Burkhard E
BE
Ivanova
Katerina
K
Rangelow
Ivo W
IW
Nikolov
Nikolay
N
Gotszalk
Teodor
T
Mielczarski
Jerzy
J