title: Room temperature detachment nanolithography using a rigiflex polymeric mold.
abstract: We report on detachment nanolithography of an organic thin film at room temperature mediated by ultraviolet (UV) exposure. A nanopatterned, UV curable polyurethane acrylate (PUA) mold was placed on a spin-coated organic film made of 4,4'-bis[N-1-napthyl-N-phenyl-amino]biphenyl (NPB) under a low pressure (1-2 bar). A higher work of adhesion at the organic/mold interface induced detachment of the contacting layer on silicon or gold substrate, resulting in well-defined nanopatterns without a residual layer. The detachment was highly improved by a short-term UV exposure, rendering the film surface free from contaminant hydrocarbons with a lower cohesive force, as confirmed by Fourier transform infrared (FTIR) spectroscopy and measurements of contact angle of water.
authors.affiliation: School of Mechanical and Aerospace Engineering, Institute of Advanced Machinery and Design, Seoul National University, Seoul 151-742, Korea.
authors.forename: Jae Kwan
authors.initials: JK
authors.lastname: Kim
authors.forename: Kahp Y
authors.initials: KY
authors.lastname: Suh
mesh_terms: D000268:Adhesiveness; D001713:Biphenyl Compounds / Q000737:chemistry*; D004867:Equipment Design; D006046:Gold; D053758:Nanoparticles / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods*; D009281:Naphthalenes / Q000737:chemistry*; D009930:Organic Chemicals / Q000737:chemistry; D011108:Polymers / Q000737:chemistry*; D011140:Polyurethanes / Q000737:chemistry; D012825:Silicon; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties; D013696:Temperature; D014466:Ultraviolet Rays
chemical_list: C533874:4,4'-bis(N-1-napthyl-N-phenyl-amino)biphenyl; D001713:Biphenyl Compounds; D009281:Naphthalenes; D009930:Organic Chemicals; D011108:Polymers; D011140:Polyurethanes; D006046:Gold; D012825:Silicon