title: Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks.
authors.affiliation: Frederick Seitz Materials Research Laboratory, Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
authors.forename: Matthew C
authors.initials: MC
authors.lastname: George
authors.forename: Erik C
authors.initials: EC
authors.lastname: Nelson
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
authors.forename: Paul V
authors.initials: PV
authors.lastname: Braun
mesh_terms: D021621:Imaging, Three-Dimensional; D007287:Inorganic Chemicals / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D008968:Molecular Conformation; D014961:X-Ray Diffraction
chemical_list: D007287:Inorganic Chemicals