Measurement of the electron attachment rates for SF6 and C7F14 at T(e) = 0.2 eV in a magnetized Q machine plasma.
Electron attachment rates for SF(6) and C(7)F(14) were measured in a magnetized Q machine plasma at an electron temperature of 0.2+/-0.02 eV and with neutral gas pressures of P approximately 10(-4) Torr. The rate constants for attachment to SF(6) and C(7)F(14) were (7.6+/-2.0)x10(-8) and (2.2+/-0.9)x10(-7) cm(3) s(-1), respectively.
Merlino
Robert L
RL
Department of Physics and Astronomy, The University of Iowa, Iowa City, Iowa 52242, USA. robert-merlino@uiowa.edu
Kim
Su-Hyun
SH