Interferometer for precise and flexible asphere testing.
A novel non-null interferometer for the precise measurement of aspheric surfaces is presented. In contrast to a classical interferometer, where only one test wavefront is used, the proposed system makes use of multiple test beams propagating under different angles through the interferometer. This allows the measurement of aspheric surfaces in a very short time, even for strong aspheres with deviations from the best-fit sphere of up to 900 microm. The non-null test configuration implies that any additional aberrations introduced by the interferometer have to be well characterized to precisely measure the asphere. Experimental measurements of a calibrated non-null interferometer on an aspheric element with 900 microm SAG deviation are presented.
Garbusi
Eugenio
E
Institut fur Technische Optik, Universitat Stuttgart, Stuttgart, Germany. garbusi@ito.uni-stuttgart.de
Pruss
Christof
C
Osten
Wolfgang
W