title: Highly reflective Ag-Cu alloy-based ohmic contact on p-type GaN using Ru overlayer.
abstract: We report on a metallization scheme of high reflectance, low resistance, and smooth surface morphology ohmic contact on p-type GaN. Ag-Cu alloy/Ru contact showed low contact resistivity as low as 6.2 x 10(-6) Ohms cm(2) and high reflectance of 91% at 460 nm after annealing at 400 degrees C in air ambient. The oxidation annealing promoted the out-diffusion of Ga atoms to dissolve in an Ag-Cu layer with the formation of an Ag-Ga solid solution, lowering the contact resistivity. The Ru overlayer acts as a diffusion barrier for excessive oxygen incorporation during oxidation annealing, resulting in high reflectance, good thermal stability, and smooth surface quality of the contact.
authors.affiliation: Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Kyungbuk, Korea.
authors.forename: Jun Ho
authors.initials: JH
authors.lastname: Son
authors.forename: Gwan Ho
authors.initials: GH
authors.lastname: Jung
authors.forename: Jong-Lam
authors.initials: JL
authors.lastname: Lee