High-contrast waveguides in sputtered pure TeO2 glass thin films.
We present a technological approach to the realization of channeled optical waveguides, starting from reactively sputtered tellurite glass thin films, grown on silica-coated 4" Si wafers. In particular, optical lithographic process and etching recipes have been developed to overcome the solubility of TeO(2) films in aqueous solutions, and to process them into high-index contrast structures with minimized post-etch roughness. Optical tests on preliminary rib waveguide geometries feature 6.3 dB/cm propagation loss for fundamental TE mode at lambda = 1.5 microm.
Pietralunga
Silvia Maria
SM
Corecom, Via Giuseppe Colombo 81, 20133 Milano, Italy. pietralunga@corecom.it
Lanata
Marta
M
Ferè
Massimo
M
Piccinin
Davide
D
Cusmai
Giuseppe
G
Torregiani
Matteo
M
Martinelli
Mario
M