title: High-contrast waveguides in sputtered pure TeO2 glass thin films.
abstract: We present a technological approach to the realization of channeled optical waveguides, starting from reactively sputtered tellurite glass thin films, grown on silica-coated 4" Si wafers. In particular, optical lithographic process and etching recipes have been developed to overcome the solubility of TeO(2) films in aqueous solutions, and to process them into high-index contrast structures with minimized post-etch roughness. Optical tests on preliminary rib waveguide geometries feature 6.3 dB/cm propagation loss for fundamental TE mode at lambda = 1.5 microm.
authors.affiliation: Corecom, Via Giuseppe Colombo 81, 20133 Milano, Italy. pietralunga@corecom.it
authors.forename: Silvia Maria
authors.initials: SM
authors.lastname: Pietralunga
authors.forename: Marta
authors.initials: M
authors.lastname: Lanata
authors.forename: Massimo
authors.initials: M
authors.lastname: Ferè
authors.forename: Davide
authors.initials: D
authors.lastname: Piccinin
authors.forename: Giuseppe
authors.initials: G
authors.lastname: Cusmai
authors.forename: Matteo
authors.initials: M
authors.lastname: Torregiani
authors.forename: Mario
authors.initials: M
authors.lastname: Martinelli