title: Periodic large-area metallic split-ring resonator metamaterial fabrication based on shadow nanosphere lithography.
abstract: A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.
authors.affiliation: 4th Physics Institute, University of Stuttgart, Stuttgart, Germany.
authors.forename: Michael Christian
authors.initials: MC
authors.lastname: Gwinner
authors.forename: Elisabeth
authors.initials: E
authors.lastname: Koroknay
authors.forename: Liwei
authors.initials: L
authors.lastname: Fu
authors.forename: Piotr
authors.initials: P
authors.lastname: Patoka
authors.forename: Witold
authors.initials: W
authors.lastname: Kandulski
authors.forename: Michael
authors.initials: M
authors.lastname: Giersig
authors.forename: Harald
authors.initials: H
authors.lastname: Giessen
mesh_terms: D003198:Computer Simulation; D054118:Nanospheres / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods; D055095:Optics and Photonics; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties