title: Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation.
abstract: Nano-sized textures resulted from localized electrochemical oxidation by using atomic force microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication and nanotribological properties of nanotexture by local anodic oxidation (LAO) on H-passivated Si surface are presented. A special attention is paid to find the relation between the size of oxide nanotexture and operational parameters such as tip-sample pulsed bias voltage, pulsewidth, and relative humidity to fabricate oxide nanotexture. The nanotribological properties were investigated by a colloidal probe. The results indicate that the nanotextures exhibited low adhesion and greatly reduced friction force at nanometer scale.
authors.affiliation: State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, PR China.
authors.forename: Yufei
authors.initials: Y
authors.lastname: Mo
authors.forename: Wenjie
authors.initials: W
authors.lastname: Zhao
authors.forename: Deming
authors.initials: D
authors.lastname: Huang
authors.forename: Fei
authors.initials: F
authors.lastname: Zhao
authors.forename: Mingwu
authors.initials: M
authors.lastname: Bai