Periodic large-area metallic split-ring resonator metamaterial fabrication based on shadow nanosphere lithography.
A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.
Gwinner
Michael Christian
MC
4th Physics Institute, University of Stuttgart, Stuttgart, Germany.
Koroknay
Elisabeth
E
Fu
Liwei
L
Patoka
Piotr
P
Kandulski
Witold
W
Giersig
Michael
M
Giessen
Harald
H
D003198:Computer Simulation; D054118:Nanospheres / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods; D055095:Optics and Photonics; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties