title: Polarimetric interferometer for nanoscale positioning applications.
abstract: We propose and demonstrate a displacement control method at the subnanometric scale based on a Michelson interferometer combined with a polarimeter and a phase-locked loop electronic board. Step by step displacements with a step value of 5 nm are presented. A repeatability of 0.47 nm is obtained from back and forth displacements over 1 mum range. We show that a residual ellipticity of less than 10 degrees on the polarization state leads to a positioning error of less than 1 nm. Such system could be used over millimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology.
authors.affiliation: LISV, University of Versailles Saint-Quentin, PRES UniverSud, Versailles, France.
authors.forename: S
authors.initials: S
authors.lastname: Xu
authors.forename: K
authors.initials: K
authors.lastname: Ouedraogo
authors.forename: L
authors.initials: L
authors.lastname: Chassagne
authors.forename: S
authors.initials: S
authors.lastname: Topçu
authors.forename: P
authors.initials: P
authors.lastname: Juncar
authors.forename: Y
authors.initials: Y
authors.lastname: Alayli