title: A New Approach to Fabricating High-density Nanoarrays by Nanocontact Printing.
abstract: We introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high-density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub-500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. We also demonstrate that we can image a nanoarray labeled by streptavidin by atomic force microscope (AFM).
authors.affiliation: Center for Applied NanoBioscience, Arizona State University, Tempe, AZ 85287.
authors.forename: Jian
authors.initials: J
authors.lastname: Gu
authors.forename: Xiaoyin
authors.initials: X
authors.lastname: Xiao
authors.forename: Bharath R
authors.initials: BR
authors.lastname: Takulapalli
authors.forename: Michael E
authors.initials: ME
authors.lastname: Morrison
authors.forename: Peiming
authors.initials: P
authors.lastname: Zhang
authors.forename: Frederic
authors.initials: F
authors.lastname: Zenhausern