title: Influence of atmospheric fluorine plasma treatment on thermal and dielectric properties of polyimide film.
abstract: Plasma treatment of polyimide surfaces not only causes structural modification during the plasma exposure, but also leaves active sites on the surfaces that are subject to post-reaction. In this work, the effects of atmospheric fluorine plasma treatment on the surface properties and dielectric properties of polyimide thin film were investigated by using X-ray photoelectron spectroscopy (XPS), Fourier transform-IR (FT-IR) spectroscopy, and contact angle measurement. The results indicated that plasma treatment successfully introduced fluorine functional groups on the polyimide surfaces. The polyimides also exhibited good thermal stability and a lower dielectric constant. It appears that the replacement of fluorine led to the decrease of the local electronic polarizability of polyimide. Consequently, it was found that the atmospheric fluorine plasma-treated polyimides possessed lower dielectric characteristics than the untreated polyimides.
authors.affiliation: Department of Chemistry, Inha University, 253, Nam-gu, Incheon 402-751, South Korea. psjin@inha.ac.kr
authors.forename: Soo-Jin
authors.initials: SJ
authors.lastname: Park
authors.forename: Hee-Jin
authors.initials: HJ
authors.lastname: Sohn
authors.forename: Sung-Kwon
authors.initials: SK
authors.lastname: Hong
authors.forename: Gwi-Su
authors.initials: GS
authors.lastname: Shin