A New Approach to Fabricating High-density Nanoarrays by Nanocontact Printing.
We introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high-density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub-500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. We also demonstrate that we can image a nanoarray labeled by streptavidin by atomic force microscope (AFM).
Gu
Jian
J
Center for Applied NanoBioscience, Arizona State University, Tempe, AZ 85287.
Xiao
Xiaoyin
X
Takulapalli
Bharath R
BR
Morrison
Michael E
ME
Zhang
Peiming
P
Zenhausern
Frederic
F