Soft x-ray microscope constructed with a PMMA phase-reversal zone plate.
A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 13.3 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm.
Park
Jong Ju
JJ
Department of Physics, Coherent X-ray Research Center, KAIST, Daejeon, Korea.
Kim
Deuk Su
DS
Jeon
Sang Chul
SC
Park
Juyun
J
Lee
Kyoung Hwan
KH
Lee
Jae-hwan
JH
Kim
Ki Nam
KN
Yoo
Jung Jae
JJ
Nam
Chang Hee
CH