title: Scaling limitations of laser-fabricated nerve electrode arrays.
abstract: A laser technology for manufacturing implantable electrode arrays, using spin-on polydimethylsiloxane (PDMS) and platinum foil as materials, was investigated in respect to its scaling limitations. The following aspects were analyzed: Minimal width and centre-to-centre distance of platinum tracks, the ability of spin-on PDMS to flow between platinum tracks with very narrow gaps and the electrical insulation properties of thin spin-coated PDMS.
authors.affiliation: Laboratory for Biomedical Microtechnology, Department of Microsystems Engineering, University of Freiburg, Germany. christian.henle@imtek.de
authors.forename: Christian
authors.initials: C
authors.lastname: Henle
authors.forename: Martin
authors.initials: M
authors.lastname: Schuettler
authors.forename: Juan S
authors.initials: JS
authors.lastname: Ordonez
authors.forename: Thomas
authors.initials: T
authors.lastname: Stieglitz
mesh_terms: D001672:Biocompatible Materials / Q000737:chemistry*; D004129:Dimethylpolysiloxanes / Q000737:chemistry; D004558:Electric Stimulation / Q000295:instrumentation* / Q000379:methods; D004566:Electrodes; D004567:Electrodes, Implanted; D004867:Equipment Design; D007834:Lasers; D008420:Manufactured Materials; D008422:Materials Testing; D008839:Microelectrodes; D008855:Microscopy, Electron, Scanning; D010984:Platinum / Q000737:chemistry*; D012826:Silicone Elastomers / Q000737:chemistry*; D012828:Silicones; D013499:Surface Properties
chemical_list: D001672:Biocompatible Materials; D004129:Dimethylpolysiloxanes; D012826:Silicone Elastomers; D012828:Silicones; D010984:Platinum; C013830:baysilon