Paired circularly polarized heterodyne ellipsometer.
We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 nm on thickness measurement of SiO(2) thin film deposited on silicon substrate, can be applied with the PCPHE.
Yu
Chih-Jen
CJ
Department of Optics and Photonics, National Central University, Jhongli, Taiwan 320.
Lin
Chu-En
CE
Yu
Li-Ping
LP
Chou
Chien
C
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D008422:Materials Testing / Q000295:instrumentation*; D008567:Membranes, Artificial; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012822:Silicon Dioxide / Q000737:chemistry*
D008567:Membranes, Artificial; D012822:Silicon Dioxide