title: Soft x-ray microscope constructed with a PMMA phase-reversal zone plate.
abstract: A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 13.3 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm.
authors.affiliation: Department of Physics, Coherent X-ray Research Center, KAIST, Daejeon, Korea.
authors.forename: Jong Ju
authors.initials: JJ
authors.lastname: Park
authors.forename: Deuk Su
authors.initials: DS
authors.lastname: Kim
authors.forename: Sang Chul
authors.initials: SC
authors.lastname: Jeon
authors.forename: Juyun
authors.initials: J
authors.lastname: Park
authors.forename: Kyoung Hwan
authors.initials: KH
authors.lastname: Lee
authors.forename: Jae-hwan
authors.initials: JH
authors.lastname: Lee
authors.forename: Ki Nam
authors.initials: KN
authors.lastname: Kim
authors.forename: Jung Jae
authors.initials: JJ
authors.lastname: Yoo
authors.forename: Chang Hee
authors.initials: CH
authors.lastname: Nam