title: High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity.
abstract: We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carré algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640x480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms).
authors.affiliation: Length & Time Metrology Center, Physical Metrology Division, Korea Research Institute of Standards and Science, Yuseong-Gu, Daejeon, Republic of Korea.
authors.forename: Chu-Shik
authors.initials: CS
authors.lastname: Kang
authors.forename: Jong-Ahn
authors.initials: JA
authors.lastname: Kim
authors.forename: Tae Bong
authors.initials: TB
authors.lastname: Eom
authors.forename: Roma
authors.initials: R
authors.lastname: Jang
authors.forename: Hae Yong
authors.initials: HY
authors.lastname: Park
authors.forename: Jae-Wan
authors.initials: JW
authors.lastname: Kim