title: Nanomachining with a mechanical manipulation system.
abstract: This study describes about the development of a mechanical manipulation system that can perform three-dimensional nano-machining inside a scanning electron microscope (SEM). Experiments are carried out by constructing a precise machining platform integrated with pico-motors, linear stages and monolithic-silicon-based tips which is generally used in atomic-force microscope (AFM). This integrated system can easily manipulate the atoms in a workpiece inside an SEM. The platform consists of three translational stages along XYZ axis direction and one rotational stage, with a resolution of 30 nm. The system can be utilized to produce nanopattern such as nanolines, nanoscale characters on silicon substrate coated with gold (Au) and aluminum (Al). Molecular dynamics simulation model is used to analyze the machining mechanism from various machining parameters. The same AFM tip can be utilized to scratch away the unwanted material from the workpiece surface.
authors.affiliation: Department of Mechanical Engineering, Chung Yuan Christian University, Chungli 320, Taiwan, ROC.
authors.forename: M
authors.initials: M
authors.lastname: Chang
authors.forename: J R
authors.initials: JR
authors.lastname: Deka
authors.forename: C H
authors.initials: CH
authors.lastname: Lin