title: Nanocapacitive circuit elements.
abstract: "Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of approximately 1 x 10(-16) F and were observed to hold charge for over an hour. Our results indicate that fabricating nanostructures using natural lithography may provide a viable alternative for future nanoelectronic devices.
authors.affiliation: Institute for Nanoscale Technology, University of Technology Sydney, Broadway NSW 2007, Australia. hadi.zareie@uts.edu.au
authors.forename: Hadi M
authors.initials: HM
authors.lastname: Zareie
authors.forename: Scott W
authors.initials: SW
authors.lastname: Morgan
authors.forename: Matthew
authors.initials: M
authors.lastname: Moghaddam
authors.forename: Abbas I
authors.initials: AI
authors.lastname: Maaroof
authors.forename: Michael B
authors.initials: MB
authors.lastname: Cortie
authors.forename: Matthew R
authors.initials: MR
authors.lastname: Phillips
mesh_terms: D003460:Crystallization / Q000379:methods*; D025802:Electric Capacitance; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D010316:Particle Size; D013499:Surface Properties
chemical_list: D046911:Macromolecular Substances