title: Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication.
abstract: Investigations into the structuring by two-photon polymerization of a nonshrinking, photosensitive, zirconium sol-gel material are presented. This hybrid material can be photostructured even when it contains up to 30 mol % of zirconium propoxide (ZPO); by varying the material's inorganic content, it is possible to modify and tune its refractive index. The introduction of ZPO significantly increases the photosensitivity of the resulting photopolymer. The fabricated three-dimensional photonic crystal structures demonstrate high resolution and a clear band-stop in the near-IR region. In contrast to common practice, no additional effort is required to precompensate for shrinkage or to improve the structural stability of the fabricated photonic crystals; this, combined with the possibility of tuning this material's optical, mechanical, and chemical properties, makes it suitable for a variety of applications by two-photon polymerization manufacturing.
authors.affiliation: Nanotechnology Department, Laser Zentrum Hannover eV, Hannover, Germany.
authors.forename: Aleksandr
authors.initials: A
authors.lastname: Ovsianikov
authors.forename: Jacques
authors.initials: J
authors.lastname: Viertl
authors.forename: Boris
authors.initials: B
authors.lastname: Chichkov
authors.forename: Mohamed
authors.initials: M
authors.lastname: Oubaha
authors.forename: Brian
authors.initials: B
authors.lastname: MacCraith
authors.forename: Ioanna
authors.initials: I
authors.lastname: Sakellari
authors.forename: Anastasia
authors.initials: A
authors.lastname: Giakoumaki
authors.forename: David
authors.initials: D
authors.lastname: Gray
authors.forename: Maria
authors.initials: M
authors.lastname: Vamvakaki
authors.forename: Maria
authors.initials: M
authors.lastname: Farsari
authors.forename: Costas
authors.initials: C
authors.lastname: Fotakis
mesh_terms: D015392:Chemistry, Inorganic / Q000379:methods; D003460:Crystallization; D004867:Equipment Design; D007259:Infrared Rays; D008422:Materials Testing; D008956:Models, Chemical; D008968:Molecular Conformation; D010087:Oxides / Q000737:chemistry*; D044367:Phase Transition; D010777:Photochemistry / Q000379:methods*; D017785:Photons; D012031:Refractometry; D017550:Spectroscopy, Fourier Transform Infrared; D019265:Spectroscopy, Near-Infrared; D015040:Zirconium / Q000737:chemistry*
chemical_list: D010087:Oxides; D015040:Zirconium