title: Wrinkled-up nanochannel networks: long-range ordering, scalability, and X-ray investigation.
abstract: Highly ordered two-dimensional self-organized nanochannel networks as well as free-standing nanomembranes are produced on rigid substrates by means of III-V semiconductor compressively strained layers grown on top of an etchant-sensitive material. The releasing process is controlled by regularly spaced pits obtained from photolithography and a subsequent wet chemical etching. By tuning basic film parameters such as strain and thickness, one obtains periodic arrays of two-dimensional nanochannel networks with symmetries defined by the shape and periodicity of the photolithographic starting pits. Such nanochannel networks with a submicroscale lateral feature size exhibit a surprising flexibility with respect to the crystal lattice symmetry, retaining the original film crystalline quality as confirmed by X-ray grazing-incidence diffraction (GID) measurements. Finite element modeling helps in understanding the particular process of the cross-nanochannel formation.
authors.affiliation: Max-Planck-Institut fur Festkorperforschung, Stuttgart, Germany.
authors.forename: Angelo
authors.initials: A
authors.lastname: Malachias
authors.forename: Yongfeng
authors.initials: Y
authors.lastname: Mei
authors.forename: Ratna K
authors.initials: RK
authors.lastname: Annabattula
authors.forename: Christoph
authors.initials: C
authors.lastname: Deneke
authors.forename: Patrick R
authors.initials: PR
authors.lastname: Onck
authors.forename: Oliver G
authors.initials: OG
authors.lastname: Schmidt
mesh_terms: D003198:Computer Simulation; D003460:Crystallization / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008956:Models, Chemical; D008958:Models, Molecular; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D012666:Semiconductors; D013499:Surface Properties; D014961:X-Ray Diffraction / Q000379:methods*
chemical_list: D046911:Macromolecular Substances