High speed phase shifting interferometry using injection locking of the laser frequency to the resonant modes of a confocal Fabry-Perot cavity.
We present a high speed phase shifting interferometer which utilizes the self injection locking of a frequency tunable laser diode. By using a confocal Fabry-Perot cavity made of ultra low expansion glass, and linearly modulating the laser diode current, the laser frequency could be injection locked to the resonant modes of the Fabry-Perot cavity consecutively. It provided equal phase steps to the interferograms which are ideal to be analyzed by the Carré algorithm. The phase step error was evaluated to be about 3 MHz which corresponds to 0.2 nm in length measurement. With this technique, profile measurements are insensitive to external vibration since four 640x480 pixels images can be acquired within 4 ms. Difference of two profile measurements, each made with and without vibration isolation, respectively, was evaluated to be 0.5 nm (rms).
Kang
Chu-Shik
CS
Length & Time Metrology Center, Physical Metrology Division, Korea Research Institute of Standards and Science, Yuseong-Gu, Daejeon, Republic of Korea.
Kim
Jong-Ahn
JA
Eom
Tae Bong
TB
Jang
Roma
R
Park
Hae Yong
HY
Kim
Jae-Wan
JW