Fabrication of vertical carbon nanotube arrays from self-assembled block copolymer films.
Highly uniform vertical carbon nanotube arrays were prepared by a novel hybrid approach combining a plasma-enhanced chemical vapor deposition (PECVD) process with self-assembled block copolymer nanotemplate. Monodisperse catalyst nanoparticles were prepared on a substrate using self-assembled nanoporous block copolymer templates. The subsequent PECVD growth of vertical CNTs from the nanopatterned catalyst particles provided highly oriented vertical CNT arrays, which are potentially useful for device integration of CNTs.
Lee
Duck-Hyun
DH
Department of Materials Science and Engineering, KAIST 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea.
Shin
Dong-Ok
DO
Lee
Won-Jong
WJ
Kim
Sang Ouk
SO