Highly conducting patterned Pd nanowires by direct-write electron beam lithography.
Palladium hexadecylthiolate is shown to serve as a negative-tone direct-write electron resist to produce nanopatterns down to 30 nm. The written patterns do not deviate much from the precursor in composition, while a post-treatment at 230 degrees C in air produced metallic Pd nanowires with residual carbon less than 10% and resistivity close to the bulk value, a desirable property of interconnects in nanocircuitry. The as-written patterns contain small nanocrystals (<5 nm) in a hydrocarbon matrix, which upon annealing aggregate to form well-connected networks of larger nanocrystals (5-15 nm), thus giving rise to metallic conductivity.
Bhuvana
T
T
Chemistry and Physics of Materials Unit and DST Unit on Nanoscience, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur PO, Bangalore 560 064, India.
Kulkarni
G U
GU
D003460:Crystallization / Q000379:methods*; D004553:Electric Conductivity; D004583:Electrons; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010165:Palladium / Q000737:chemistry* / Q000528:radiation effects; D010316:Particle Size; D013499:Surface Properties
D046911:Macromolecular Substances; D010165:Palladium