Preparation of antimony films by cyclic pulsed chemical vapor deposition.
Cyclic-pulsed plasma-enhanced chemical vapor deposition (PECVD) for the formation of antimony (Sb) thin films was investigated using Sb(i-C3H7)3 and H2 plasma at temperatures of 200-275 degrees C. The effects of deposition temperature on the film properties, such as resistivity, surface roughness, and crystallinity were examined. The film growth rate (thickness/cycle) was found to be in the range of 0.10-0.5 nm/cycle. High substrate temperatures tended to promote low resistivity, high purity, and smooth surface morphology of the films, compared to low substrate temperatures. All of the deposited films were polycrystalline, with higher deposition temperatures yielding a higher crystallinity in the Sb films.
Kim
Yeon-Hong
YH
School of Applied Chemical Engineering and Research Institute for Catalysis, Chonnam National University, Gwangju 500-757, Korea.
Lim
Gyeong Taek
GT
Kim
Bo-Hye
BH
Ko
Hang Ju
HJ
Woo
Hee-Gweon
HG
Kim
Do-Heyoung
DH