title: Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order.
abstract: Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self-assembly of block copolymer microdomains into oriented arrays with quasi-long-range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self-assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single-grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh-density systems.
authors.affiliation: Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA.
authors.forename: Soojin
authors.initials: S
authors.lastname: Park
authors.forename: Dong Hyun
authors.initials: DH
authors.lastname: Lee
authors.forename: Ji
authors.initials: J
authors.lastname: Xu
authors.forename: Bokyung
authors.initials: B
authors.lastname: Kim
authors.forename: Sung Woo
authors.initials: SW
authors.lastname: Hong
authors.forename: Unyong
authors.initials: U
authors.lastname: Jeong
authors.forename: Ting
authors.initials: T
authors.lastname: Xu
authors.forename: Thomas P
authors.initials: TP
authors.lastname: Russell