Nanostructuring of organic-inorganic hybrid materials for distributed feedback laser resonators by two-photon polymerization.
With two-photon absorption induced polymerization arbitrary three dimensional nano- and microstructures can be patterned directly into photoresists. We report on the fabrication of a low threshold organic semiconductor distributed feedback laser using the technique of two-photon absorption induced polymerization. A surface grating with 400 nm periodicity and 40 nm height modulation was fabricated by two-photon absorption induced polymerization in the organic-inorganic hybrid material ORMOCER. With structuring several stacked layers acting as a planar basis for the nanostructure microscopic substrate tilt can be compensated simply. This enabled us to uniformly nano-structure the surface grating over an area of 200 x 200 microm(2).
Woggon
Thomas
T
Light Technology Institute and Center for Functional Nanostructures, Universität Karlsruhe (TH), Kaiserstrasse 12, 76131 Karlsruhe, Germany. Thomas.Woggon@lti.uni-karlsruhe.de
Kleiner
Thomas
T
Punke
Martin
M
Lemmer
Uli
U
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005246:Feedback; D007287:Inorganic Chemicals / Q000737:chemistry* / Q000528:radiation effects; D007834:Lasers; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects; D009930:Organic Chemicals / Q000737:chemistry* / Q000528:radiation effects; D017785:Photons; D011108:Polymers / Q000737:chemistry*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity
D007287:Inorganic Chemicals; D009930:Organic Chemicals; D011108:Polymers