title: Nanofabrication in cellulose acetate.
abstract: We have demonstrated nanofabrication with commercialized cellulose acetate. Cellulose acetate is used for bulk nanofabrication and surface nanofabrication. In bulk nanofabrication, cellulose acetate reacts with an e-beam and permanent patterns are formed in it instead of being transferred to other substrates. We have studied the nano relief modulation performance of cellulose acetate before and after development. The depth of the nanopatterns is magnified after development, and is varied by exposing dosage and line width of the pattern. The thinnest 65 nm wide line is achieved in the bulk fabrication. We also demonstrate a binary phase Fresnel lens array which is directly patterned in a cellulose acetate sheet. Because of its unique mechanical and optical properties, cellulose is a good candidate for a template material for soft imprinting lithography. In the surface nanofabrication, cellulose acetate thin film spin-coated on silicon wafers is employed as a new resist for e-beam lithography. We achieved 50 nm lines with 100 nm pitches, dots 50 nm in diameter, and single lines with the smallest width of 20 nm. As a new resist of e-beam lithography, cellulose acetate has high resolution comparable with conventional resists, while having several advantages such as low cost, long stock time and less harmfulness to human health.
authors.affiliation: Department of Electrical and Computer Engineering, University of Illinois at Chicago, 851 South Morgan Street, 1020 SEO, Chicago, Illinois 60607, USA. hjzeng01@yahoo.com
authors.forename: Hongjun
authors.initials: H
authors.lastname: Zeng
authors.forename: Robert
authors.initials: R
authors.lastname: Lajos
authors.forename: Vitali
authors.initials: V
authors.lastname: Metlushko
authors.forename: Ed
authors.initials: E
authors.lastname: Elzy
authors.forename: Se Young
authors.initials: SY
authors.lastname: An
authors.forename: Joshua
authors.initials: J
authors.lastname: Sautner