Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma.
A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about 6 microm is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions.
Zhu
Li-Guo
LG
Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China. zhuliguo@tsinghua.org.cn
Chen
Wen-Cong
WC
Zhu
Xi-Ming
XM
Pu
Yi-Kang
YK
Li
Ze-Ren
ZR