Depth profiling of metallic coatings evaluated from spatially-resolved measurement in glow discharge optical emission spectrometry.
A two-dimensionally imaging spectrometer system was employed to measure spatial emission images of a glow discharge plasma in atomic emission spectrometry. The emission intensities were not uniform in the radial direction of the plasma region, but yielded a characteristic distribution from the central portion towards the surrounding zone in the plasma. Temporal variations in the emission images were observed when a zinc-coated steel plate and a thermally-deposited copper film were employed as the sample. Depth profiles of these surface layers, estimated from the emission images, were compared among different integration areas of the emission intensities.
Zenitani
Yoshitaka
Y
Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan.
Sakamoto
Fuyuki
F
Wagatsuma
Kazuaki
K