Propagation loss study of very compact GaAs/AlGaAs substrate removed waveguides.
Very compact GaAs/AlGaAs optical waveguides with propagation loss as low as 0.9 dB/cm at lambda=1.55 microm were demonstrated using substrate removal and evaporated Si for index loading. Loss components were identified and minimized through process and waveguide design. Process induced roughness contributed significantly to overall propagation loss. Therefore a low damage process in addition to proper waveguide design is needed for loss minimization.
Shin
Jaehyuk
J
Electrical and Computer Engineering Department, University of California at Santa Barbara, Santa Barbara,California 93106, USA.
Chang
Yu-Chia
YC
Dagli
Nadir
N