title: [A microfabricated ICP source base on planar spiral-shaped coil].
abstract: Along with the development of micro-electromechanical system technology, the reports on the optical splitting systems and the photoelectric detection systems of spectrometer based on micro-electromechanical system have become increasingly popular, whereas the reports on micro excitation source in the development of micro spectrometer are few. In other words, the development of micro excitation source is the most important part in the development of the micro spectrometer. A novel low-pressure microfabricated inductively coupled plasma source is introduced, which is an emission spectrum excitation source based on surface-micromaching technology. Its radio frequency power consumption is much lower than the general inductively coupled plasma source. The source can work at an argon gas pressure of 100 Pa, and thus consumes less argon. The principle of operation for a microfabricated inductively coupled plasma source is illustrated. The layout of the planar spiral-shaped coil, the matched capacitor and the resonant capacitor is given. The fabrication process and properties of the plasma source are described. Meanwhile a novel inductively coupled plasma based on the technology of printed circuit board is introduced. In the experiment, the planar spiral-shaped coil and interdigatial capacitor were used. When the pressure of argon was 100 Pa and the radio frequency power was 3. 5 W at 13. 56 MHz the novel inductively coupled plasma was ignited. The photo of the argon ignition is given. Finally the potential application of the micro inductively coupled plasma in spectrometers is presented.
authors.affiliation: College of Electronic & Informational Engineering, Hebei University, Baoding 071002, China.
authors.forename: Yong-Qing
authors.initials: YQ
authors.lastname: Wang
authors.forename: Jian-Zhong
authors.initials: JZ
authors.lastname: Lou
authors.forename: Rong-Xia
authors.initials: RX
authors.lastname: Sun
authors.forename: Wen
authors.initials: W
authors.lastname: Ma
authors.forename: Yu-Jun
authors.initials: YJ
authors.lastname: Tang
authors.forename: Yong-Ni
authors.initials: YN
authors.lastname: Pu