title: Experimental setup and realization of thin film specimens for microtensile tests.
abstract: This paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young's modulus values and critical parameters (flow and rupture stresses).
authors.affiliation: Université de Lyon, INSA-Lyon, INL, CNRS UMR 5270, Villeurbanne F-69621, France. christophe.malhaire@insa-lyon.fr
authors.forename: Christophe
authors.initials: C
authors.lastname: Malhaire
authors.forename: Cédric
authors.initials: C
authors.lastname: Seguineau
authors.forename: Michel
authors.initials: M
authors.lastname: Ignat
authors.forename: Charles
authors.initials: C
authors.lastname: Josserond
authors.forename: Laurent
authors.initials: L
authors.lastname: Debove
authors.forename: Sebastiano
authors.initials: S
authors.lastname: Brida
authors.forename: Jean-Michel
authors.initials: JM
authors.lastname: Desmarres
authors.forename: Xavier
authors.initials: X
authors.lastname: Lafontan