MEMS micromirror characterization in space environments.
This paper describes MEMS micromirror characterization in space environments associated with our space applications in earth observation from the International Space Station and earth's orbit satellite. The performance of the micromirror was tested for shock and vibration, stiction, outgassing from depressurization and heating, and electrostatic charging effects. We demonstrated that there is no degradation of the micromirror performance after the space environment tests. A test bed instrument equipped with the micromirrors was delivered and tested in the ISS. The results demonstrate that the proposed micromirrors are suitable for optical space systems.
Yoo
Byung-Wook
BW
School of Electrical Engineering and Computer Science, Seoul National University, 301-1116(#007), Kwanak P.O. box 34, Seoul, 151-600, Republic of Korea.
Park
Jae-Hyoung
JH
Park
I H
IH
Lee
Jik
J
Kim
Minsoo
M
Jin
Joo-Young
JY
Jeon
Jin-A
JA
Kim
Sug-Whan
SW
Kim
Yong-Kweon
YK