Complex periodic micro/nanostructures on 6H-SiC crystal induced by the interference of three femtosecond laser beams.
We reported three types of complex micro/nanostructures on 6H-SiC crystal induced by the interferences of three femtosecond laser beams by arranging three types of laser polarization combinations. The micro/nanostructures are composed of two parts: two-dimensional long-periodic micropatterns determined by the interferential intensity pattern and short-periodic nanopatterns determined by the interferential polarization pattern. Theoretical calculation indicates that the different polarization combinations will lead to a distinct complex interferential polarization pattern and intensity pattern, and they accord well with the experimental results.
Jia
X
X
Department of Physics, State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai, China.
Jia
T Q
TQ
Ding
L E
LE
Xiong
P X
PX
Deng
L
L
Sun
Z R
ZR
Wang
Z G
ZG
Qiu
J R
JR
Xu
Z Z
ZZ