title: Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography.
abstract: In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30 nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.
authors.affiliation: Photonics and Microsciences Lab, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore. mmurukeshan@ntu.edu.sg
authors.forename: Vadakke Matham
authors.initials: VM
authors.lastname: Murukeshan
authors.forename: Kandammathe Valiyaveedu
authors.initials: KV
authors.lastname: Sreekanth
mesh_terms: D008027:Light; D008670:Metals / Q000737:chemistry* / Q000528:radiation effects*; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D010781:Photography / Q000379:methods*; D020349:Surface Plasmon Resonance / Q000379:methods*; D013499:Surface Properties
chemical_list: D008670:Metals