title: Low loss etchless silicon photonic waveguides.
abstract: We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.
authors.affiliation: Department of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA.
authors.forename: Jaime
authors.initials: J
authors.lastname: Cardenas
authors.forename: Carl B
authors.initials: CB
authors.lastname: Poitras
authors.forename: Jacob T
authors.initials: JT
authors.lastname: Robinson
authors.forename: Kyle
authors.initials: K
authors.lastname: Preston
authors.forename: Long
authors.initials: L
authors.lastname: Chen
authors.forename: Michal
authors.initials: M
authors.lastname: Lipson