Low loss etchless silicon photonic waveguides.
We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.
Cardenas
Jaime
J
Department of Electrical and Computer Engineering, Cornell University, Ithaca, NY, USA.
Poitras
Carl B
CB
Robinson
Jacob T
JT
Preston
Kyle
K
Chen
Long
L
Lipson
Michal
M