title: Electron channeling: a problem for x-ray microanalysis in materials science.
abstract: Electron channeling effects can create measurable signal intensity variations in all product signals that result from the scattering of the electron beam within a crystalline specimen. Of particular interest to the X-ray microanalyst are any variations that occur within the characteristic X-ray signal that are not directly related to a specimen composition variation. Many studies have documented the effect of crystallographic orientation on the local X-ray yield; however, the vast majority of these studies were carried out on thin foil specimens examined in transmission. Only a few studies have addressed these effects in bulk specimen materials, and these analyses were generally carried out at common scanning electron microscope microanalysis overvoltages (>1.5). At these overvoltage levels, the anomalous transmission effect is weak. As a result, the effect of electron channeling on the characteristic X-ray signal intensity has traditionally been overlooked in the field of quantitative electron probe microanalysis. The present work will demonstrate that electron channeling can produce X-ray variations of up to 26%, between intensity maxima and minima, in low overvoltage X-ray microanalyses of bulk specimens. Intensity variations of this magnitude will significantly impact the accuracy of qualitative and quantitative X-ray microanalyses at low overvoltage on engineering structural materials.
authors.affiliation: Air Force Research Laboratory, Materials Characterization Facility, Wright Patterson Air Force Base, OH 45433, USA. frederick.meisenkothen@wpafb.af.mil
authors.forename: Frederick
authors.initials: F
authors.lastname: Meisenkothen
authors.forename: Robert
authors.initials: R
authors.lastname: Wheeler
authors.forename: Michael D
authors.initials: MD
authors.lastname: Uchic
authors.forename: Robert D
authors.initials: RD
authors.lastname: Kerns
authors.forename: Frank J
authors.initials: FJ
authors.lastname: Scheltens
mesh_terms: D001152:Arsenicals / Q000737:chemistry*; D004577:Electron Probe Microanalysis / Q000379:methods*; D005708:Gallium / Q000737:chemistry*; D008422:Materials Testing; D049329:Nanostructures / Q000737:chemistry*; D009532:Nickel / Q000737:chemistry*; D014965:X-Rays
chemical_list: D001152:Arsenicals; C043055:gallium arsenide; D009532:Nickel; D005708:Gallium