title: Optical sensitivity analysis of deformed mirrors for microcantilever array IR imaging.
abstract: Optical sensitivity is a major issue to improve the sensor responsivity and the spatial resolution of uncooled optomechanical focal plane arrays (FPA). The optical sensitivity is closely related to the mirror length and the undesired mirror deformation induced from the imbalanced residual stresses in different layers. In this paper, the influences of mirror length and deformation on the optical sensitivity are discussed by Fourier Optics. Theoretical analysis and experiments demonstrate that the optical sensitivity is seriously degraded by undesired mirror deformation, and that there exists an optimal mirror length which makes the optical sensitivity achieve its maximum under a certain mirror deformation. Based on the results, an optimized mirror configuration is presented to increase the optical sensitivity of substrate-free bi-material microcantilever array (SFBMA).
authors.affiliation: CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, Anhui, China.
authors.forename: Haitao
authors.initials: H
authors.lastname: Shi
authors.forename: Qingchuan
authors.initials: Q
authors.lastname: Zhang
authors.forename: Jian
authors.initials: J
authors.lastname: Qian
authors.forename: Liang
authors.initials: L
authors.lastname: Mao
authors.forename: Teng
authors.initials: T
authors.lastname: Cheng
authors.forename: Jie
authors.initials: J
authors.lastname: Gao
authors.forename: Xiaoping
authors.initials: X
authors.lastname: Wu
authors.forename: Dapeng
authors.initials: D
authors.lastname: Chen
authors.forename: Binbin
authors.initials: B
authors.lastname: Jiao