title: Simultaneous measurement of linear and transverse displacements by laser self-mixing.
abstract: We present a contactless optical sensor based on the laser-self-mixing effect for real-time measurement of linear and transverse displacements of a moving stage. The sensor is able to measure linear displacements of up to 400 mm along the main optical axis while simultaneously estimating straightness and flatness deviations up to 1 mm. The sensor exploits two identical coplanar nonparallel self-mixing interferometers and requires only one reference plane. The reduction in the number of optical elements allowed by the self-mixing configuration and the intrinsic stiffness of the adopted geometry result in a compact, low-cost, and easy-to-align setup.
authors.affiliation: CNR-INFM Laboratorio LIT3, Università degli Studi di Bari, 173 Via Amendola, Bari 70123, Italy. simona.ottonelli@fisica.uniba.it
authors.forename: Simona
authors.initials: S
authors.lastname: Ottonelli
authors.forename: Maurizio
authors.initials: M
authors.lastname: Dabbicco
authors.forename: Francesco
authors.initials: F
authors.lastname: De Lucia
authors.forename: Gaetano
authors.initials: G
authors.lastname: Scamarcio