Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography.
In this Letter, a near-field optical excitation of gap modes in a metal particle-surface system for patterning periodic nanostructure is proposed and numerically demonstrated using the finite-difference time-domain method. It is observed that high-density sub-30 nm periodic structures were achievable by employing an aluminium nanosphere-silver surface system. A 2D resist profile cross section using the modified cellular automata model, which was obtained through this proposed configuration, is also presented.
Murukeshan
Vadakke Matham
VM
Photonics and Microsciences Lab, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore. mmurukeshan@ntu.edu.sg
Sreekanth
Kandammathe Valiyaveedu
KV
D008027:Light; D008670:Metals / Q000737:chemistry* / Q000528:radiation effects*; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D010781:Photography / Q000379:methods*; D020349:Surface Plasmon Resonance / Q000379:methods*; D013499:Surface Properties
D008670:Metals