title: Hyperspectral imaging using a microelectrical-mechanical-systems-based in-plane vibratory grating scanner with a single photodetector.
abstract: We present a single-photodetector-based hyperspectral imaging system that utilizes a microelectrical-mechanical-systems-driven diffraction grating for fast spatial scanning and two synchronized steering mirrors for slow spectral scanning. This configuration allows high-speed scanning without degradation in optical performance resulting from dynamic non-rigid-body deformation of the platform. The proposed operational principle is demonstrated with a prototype device developed using silicon microfabrication technology. The proposed spectral imaging system has the potential to achieve low cost, small form factor, and high-speed operation.
authors.affiliation: Department of Mechanical Engineering, National University of Singapore, Singapore. mpezgy@nus.edu.sg
authors.forename: Guangya
authors.initials: G
authors.lastname: Zhou
authors.forename: Kelvin K L
authors.initials: KK
authors.lastname: Cheo
authors.forename: Yu
authors.initials: Y
authors.lastname: Du
authors.forename: Fook Siong
authors.initials: FS
authors.lastname: Chau
authors.forename: Hanhua
authors.initials: H
authors.lastname: Feng
authors.forename: Qingxin
authors.initials: Q
authors.lastname: Zhang