Fabrication of monolithic bridge structures by vacuum-assisted capillary-force lithography.
Kwak
Rhokyun
R
School of Mechanical and Aerospace Engineering and the Institute of Advanced Machinery and Design Seoul National University Seoul 151-742, Korea.
Jeong
Hoon Eui
HE
Suh
Kahp Y
KY
D008904:Miniaturization; D014618:Vacuum