Hyperspectral imaging using a microelectrical-mechanical-systems-based in-plane vibratory grating scanner with a single photodetector.
We present a single-photodetector-based hyperspectral imaging system that utilizes a microelectrical-mechanical-systems-driven diffraction grating for fast spatial scanning and two synchronized steering mirrors for slow spectral scanning. This configuration allows high-speed scanning without degradation in optical performance resulting from dynamic non-rigid-body deformation of the platform. The proposed operational principle is demonstrated with a prototype device developed using silicon microfabrication technology. The proposed spectral imaging system has the potential to achieve low cost, small form factor, and high-speed operation.
Zhou
Guangya
G
Department of Mechanical Engineering, National University of Singapore, Singapore. mpezgy@nus.edu.sg
Cheo
Kelvin K L
KK
Du
Yu
Y
Chau
Fook Siong
FS
Feng
Hanhua
H
Zhang
Qingxin
Q