title: Parametric modeling of edge effects for polishing tool influence functions.
abstract: Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). While a linear Preston's model for material removal allows the TIF to be determined for most cases, nonlinear removal behavior as the tool runs over the edge of the part introduces a difficulty in modeling the edge TIF. We provide a new parametric model that fits 5 parameters to measured data to accurately predict the edge TIF for cases of a polishing tool that is either spinning or orbiting over the edge of the workpiece.
authors.affiliation: College of Optical Sciences, University of Arizona, Tucson, Arizona 85721, USA. letter2dwk@hotmail.com
authors.forename: Dae Wook
authors.initials: DW
authors.lastname: Kim
authors.forename: Won Hyun
authors.initials: WH
authors.lastname: Park
authors.forename: Sug-Whan
authors.initials: SW
authors.lastname: Kim
authors.forename: James H
authors.initials: JH
authors.lastname: Burge