The role of carrier gases in the production of metastable argon atoms in a rf discharge.
We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar(*)/Ar) of 2x10(-4) at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.
Rudinger
Kenneth
K
Physics Division, Argonne National Laboratory, Argonne, Illinois 60439, USA. rudinger@anl.gov
Lu
Zheng-Tian
ZT
Mueller
Peter
P