title: In-line extreme ultraviolet polarizer with hybrid configuration.
abstract: A novel hybrid Au-multilayer-Au in-line extreme ultraviolet (EUV) optical polarizer is presented in this paper. Different from all-Mo/Si multilayer EUV polarizer, this polarizer is based on the concept that Au surfaces work as reflecting elements for in-line optics routine, while polarization effect is realized by polarizing multilayer. Simulation shows that the proposed polarizer with 80 degrees-70 degrees-80 degrees angle configuration has about 30% of transmission and 12 eV of bandwidth half maximum, which enables more throughput and broader bandwidth than the all-multilayer one.
authors.affiliation: Institut für Festkörperphysik, Technischen Universität Berlin, Berlin 10623, Germany.
authors.forename: Minghong
authors.initials: M
authors.lastname: Yang
authors.forename: Xinling
authors.initials: X
authors.lastname: Tong
authors.forename: Yan
authors.initials: Y
authors.lastname: Sun
authors.forename: Desheng
authors.initials: D
authors.lastname: Jiang
authors.forename: Ciming
authors.initials: C
authors.lastname: Zhou
authors.forename: Dongsheng
authors.initials: D
authors.lastname: Zhang