title: Miniature all-glass robust pressure sensor.
abstract: This paper describes a newly designed all-glass miniature (Ø 125 microm) fiber-optic pressure sensor design that is appropriate for high-volume manufacturing. The fabrication process is based on the chemical etching of specially-designed silica optical fiber, and involves a low number of critical production operations. The presented sensor design can be used with either single-mode or multi-mode lead-in fiber and is compatible with various types of available signal processing techniques. A practical sensor sensitivity exceeding 1000 nm/bar was achieved experimentally, which makes this sensor suitable for low-pressure measurements. The sensor showed high mechanical stability, good quality of optical surfaces, and very high tolerance to pressure overload.
authors.affiliation: Faculty of EE & Computer Science, University of Maribor, Maribor, Slovenia.
authors.forename: E
authors.initials: E
authors.lastname: Cibula
authors.forename: S
authors.initials: S
authors.lastname: Pevec
authors.forename: B
authors.initials: B
authors.lastname: Lenardic
authors.forename: E
authors.initials: E
authors.lastname: Pinet
authors.forename: D
authors.initials: D
authors.lastname: Donlagic