In-line extreme ultraviolet polarizer with hybrid configuration.
A novel hybrid Au-multilayer-Au in-line extreme ultraviolet (EUV) optical polarizer is presented in this paper. Different from all-Mo/Si multilayer EUV polarizer, this polarizer is based on the concept that Au surfaces work as reflecting elements for in-line optics routine, while polarization effect is realized by polarizing multilayer. Simulation shows that the proposed polarizer with 80 degrees-70 degrees-80 degrees angle configuration has about 30% of transmission and 12 eV of bandwidth half maximum, which enables more throughput and broader bandwidth than the all-multilayer one.
Yang
Minghong
M
Institut für Festkörperphysik, Technischen Universität Berlin, Berlin 10623, Germany.
Tong
Xinling
X
Sun
Yan
Y
Jiang
Desheng
D
Zhou
Ciming
C
Zhang
Dongsheng
D