A monolithic photonic microcantilever device for in situ monitoring of volatile compounds.
A monolithic photonic microcantilever device is presented comprising silicon light sources and detectors self-aligned to suspended silicon nitride waveguides all integrated into the same silicon chip. A silicon nitride waveguide optically links a silicon light emitting diode to a detector. Then, the optocoupler releases a localized formation of resist-silicon nitride cantilevers through e-beam lithography, dry etching and precisely controlled wet etching through a special microfluidic set-up. Fine micro-optical sensing functions are performed without the need for any off-chip optics. As the bimaterial microcantilevers are deflected by the stressed polymer film, the disrupted waveguide acts like a photonic switch. Cantilever deflections in the order of 1 A caused by thickness variations in the order of 0.005 A are detectable following changes in the physicochemical factors affecting the polymer film thickness. Such factors include the sorption of volatile compounds and through a proper set-up the response to certain vapor concentrations is monitored in real time.
Institute of Microelectronics, NCSR "Demokritos", 15310, Athens, Greece. misiakos@imel.demokritos.gr
Konstantinos
K
Misiakos
Ioannis
I
Raptis
Annamaria
A
Gerardino
Harry
H
Contopanagos
Maria
M
Kitsara
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008832:Microchemistry / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D010783:Photometry / Q000295:instrumentation*; D017785:Photons; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D055549:Volatile Organic Compounds / Q000032:analysis*
D055549:Volatile Organic Compounds