Planar GaAs nanowires on GaAs (100) substrates: self-aligned, nearly twin-defect free, and transfer-printable.
We report the controlled growth of planar GaAs semiconductor nanowires on (100) GaAs substrates using atmospheric pressure metalorganic chemical vapor deposition with Au as catalyst. These nanowires with uniform diameters are self-aligned in <110> direction in the plane of (100). The dependence of planar nanowire morphology and growth rate as a function of growth temperature provides insights into the growth mechanism and identified an ideal growth window of 470 +/- 10 degrees C for the formation of such planar geometry. Transmission electron microscopy images reveal clear epitaxial relationship with the substrate along the nanowire axial direction, and the reduction of twinning defect density by about 3 orders of magnitude compared to <111> III-V semiconductor nanowires. In addition, using the concept of sacrificial layers and elevation of Au catalyst modulated by growth condition, we demonstrate for the first time a large area direct transfer process for nanowires formed by a bottom-up approach that can maintain both the position and alignment. The planar geometry and extremely low level of crystal imperfection along with the transferability could potentially lead to highly integrated III-V nanoelectronic and nanophotonic devices on silicon and flexible substrates.
Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, Frederick-Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.
Seth A
SA
Fortuna
Jianguo
J
Wen
Ik Su
IS
Chun
Xiuling
X
Li