High-speed atomic force microscope lithography using a piezo tube scanner driven by a sinusoidal waveform.
Improving the throughput of atomic force microscope (AFM) lithography is an important success factor for employing it in nanolithography applications. The conventional motion of the AFM tube scanner is usually driven by triangular-shaped signals, but it is limited in speed due to mechanical instability of the scanner at the turning points. Here, we show that high-speed lithography is achievable using not only a piezo tube driven by a sinusoidal waveform signal but also highly sensitive noble organic resists including a photo acid generator. Cross-linked polymer nanostructures applying sinusoidal waveform driving have also shown improvements in the linearity and uniformity of line patterns.
Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, Republic of Korea.
Gwangmin
G
Kwon
Sang-Hyun
SH
Kim
Meehye
M
Jeong
Seung-Heon
SH
Han
Chang-Son
CS
Choi
Seung-Jin
SJ
Han
Jaewan
J
Hong
Haiwon
H
Lee