title: Theory of nanocluster size distributions from ion beam synthesis.
abstract: Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict the existence of a steady-state shape for the cluster-size distribution that depends only on a characteristic length determined by the effective diffusion coefficient, the ion solubility, and the volumetric ion flux. The average cluster size in the steady-state regime is determined by the implanted species or matrix interface energy.
authors.affiliation: Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA.
authors.forename: C W
authors.initials: CW
authors.lastname: Yuan
authors.forename: D O
authors.initials: DO
authors.lastname: Yi
authors.forename: I D
authors.initials: ID
authors.lastname: Sharp
authors.forename: S J
authors.initials: SJ
authors.lastname: Shin
authors.forename: C Y
authors.initials: CY
authors.lastname: Liao
authors.forename: J
authors.initials: J
authors.lastname: Guzman
authors.forename: J W
authors.initials: JW
authors.lastname: Ager
authors.forename: E E
authors.initials: EE
authors.lastname: Haller
authors.forename: D C
authors.initials: DC
authors.lastname: Chrzan