title: A smart microfour-point probe with ultrasharp in-plane tips.
abstract: We propose a smart microfour-point probe (micro4PP) with ultrasharp in-plane tips that are arranged in a square with a spacing of 20 microm. The micro4PP consists of a supporting cantilever and four subcantilevers. The subcantilevers are symmetrically suspended from the square frame at the end of the supporting cantilever. A thermal actuator based on the bimorph effect is also integrated on each subcantilever for functionalization of interest. The unique configuration of the four-terminal tips is very useful for versatile applications of the micro4PP.
authors.affiliation: MEMS and Nanotechnology Laboratory, Graduate School of Mechanical Engineering, Chonnam National University, 300 Youngbong, Buk, Gwangju 500-757, Republic of Korea.
authors.forename: Ji-Kwan
authors.initials: JK
authors.lastname: Kim
authors.forename: Yan
authors.initials: Y
authors.lastname: Zhang
authors.forename: Dong-Weon
authors.initials: DW
authors.lastname: Lee