An improved dynamic model of tuning fork probe for scanning probe microscopy.
This paper presents a two coupled oscillators model to describe the dynamics of a tuning fork with a probe attached. The two coupled oscillators are unbalanced only in their effective masses and the damping ratios. By applying a frequency domain system identification approach in experimental investigation of various probe attachment cases, a good accuracy of the model is demonstrated. The effectiveness of the model is further demonstrated in quantitative analysis of the noise performance and the sensitivity of force sensing with a tuning fork probe. Compared with existing models, the proposed model can more accurately characterize the dynamics of a tuning fork probe.
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BP
Singapore Institute of Manufacturing Technology, 71 Nanyang Avenue, Singapore 638075, Singapore.
Zhang
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Y
Kok
S W
SW
Soh
Y C
YC