Multiplexed broadband beam steering system utilizing high speed MEMS mirrors.
We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 micros settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.
Knoernschild
Caleb
C
Fitzpatrick Institute for Photonics, Electrical and Computer Engineering Department, Duke University, Durham, NC 27708, USA. caleb.k@duke.edu
Kim
Changsoon
C
Lu
Felix P
FP
Kim
Jungsang
J
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity