Sub-diffraction limited structuring of solid targets with femtosecond laser pulses.
Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.
Korte
F
F
Adams
S
S
Egbert
A
A
Fallnich
C
C
Ostendorf
A
A
Nolte
S
S
Will
M
M
Ruske
J P
JP
Chichkov
B
B
Tuennermann
A
A