Indirect broadband optical monitoring with multiple witness substrates.
We present an indirect broadband optical monitoring approach based on using several witness substrates that are brought to a measurement position in a special sequence. Different witness substrates are used to monitor not groups of successive design layers but specially chosen design layers. An attractive feature of the presented monitoring approach is the ability to reliably control thin dielectric and metal layers. Considered examples demonstrate a good accuracy of the proposed approach.
Zhupanov
Valery G
VG
Scientific Research Institution Lutch, Zeleznodorozhnay 24, Podolsk, Moscow, Russia.
Klyuev
Evgeny V
EV
Alekseev
Sergey V
SV
Kozlov
Ivan V
IV
Trubetskov
Michael K
MK
Kokarev
Michael A
MA
Tikhonravov
Alexander V
AV