title: Multiplexed broadband beam steering system utilizing high speed MEMS mirrors.
abstract: We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 micros settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.
authors.affiliation: Fitzpatrick Institute for Photonics, Electrical and Computer Engineering Department, Duke University, Durham, NC 27708, USA. caleb.k@duke.edu
authors.forename: Caleb
authors.initials: C
authors.lastname: Knoernschild
authors.forename: Changsoon
authors.initials: C
authors.lastname: Kim
authors.forename: Felix P
authors.initials: FP
authors.lastname: Lu
authors.forename: Jungsang
authors.initials: J
authors.lastname: Kim
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity