title: Industrial applications of laser micromachining.
abstract: The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.
authors.forename: M C
authors.initials: MC
authors.lastname: Gower