Nanoindentation-induced phase transformations in silicon at elevated temperatures.
The nanoindentation-induced phase transformation behavior of silicon at elevated temperatures (25-150 degrees C) has been studied. Nucleation of Si-III/Si-XII on unloading is enhanced with increasing temperature and at the highest temperatures in an amorphous Si matrix, occurs in a continuous fashion without a pop-out event. Interestingly, for slow unloading at the highest temperatures, formation of Si-III/Si-XII in a crystalline Si matrix was not observed. Elevated temperatures enhance the nucleation of Si-III and Si-XII during unloading but the final composition of the phase transformed zone is also dependent on the thermal stability of the phases in their respective matrices.
Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University, Canberra, 0200, Australia. simon.ruffell@anu.edu.au
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S
Ruffell
J E
JE
Bradby
J S
JS
Williams
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D
Munoz-Paniagua
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S
Tadayyon
L L
LL
Coatsworth
P R
PR
Norton