Design and fabrication of a photonic crystal channel drop filter based on an asymmetric silicon-on-insulator slab.
We report on the design and fabrication of a photonic crystal (PC) channel drop filter based on an asymmetric silicon-on-insulator (SOI) slab. The filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (W1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. A sample is then fabricated by using electron beam lithography (EBL) and inductively coupled plasma (ICP) etching processes. The measured Q factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.
Key Laboratory of Optical Communication and Lightwave Technologies, Ministry of Education, Beijing University of Post and Telecommunications, Beijing 100876, China.
Hejun
H
Yu
Jinzhong
J
Yu
Yude
Y
Yu
Shaowu
S
Chen