Measurement of surface adhesion force of adhesion promoter and release layer for UV-nanoimprint lithography.
In this work, we investigated the effect of surface treatment as release layer and adhesion promoter for UV-Nanoimprint lithography and measured the surface adhesion force by using tensile separation force of Instron equipment. Several Self-Assembled Monolayers (SAMs) of 3-Acryloxypropyl methyl dichlorosilane (APMDS) 3-Aminopropyl-triethoxysilane (APTS), and 3-Glycidoxypropyltrimethoxysilane (GPTS) as adhesion promoters and (1H,1H,2H,2H-perfluorooctyl)trichlorosilane (FOTS) as release layer were fabricated by vapor deposition method and were compared with oxygen plasma treatment. APMDS could strongly improve the adhesion force between UV-curable acrylate resin and silicon substrate because of strong covalent bonding. Finally, we could successfully fabricate various imprint patterns by using proper surface treatment of SAMs.
Department of Intelligent Precision Machine, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon, 305-343, Republic of Korea.
Dae-Geun
DG
Choi
Dong-Il
DI
Lee
Ki-Don
KD
Kim
Jun-Ho
JH
Jeong
Jun-Hyuk
JH
Choi
Eung-Sug
ES
Lee