Highly sensitive carbon nanotube-embedding gas sensors operating at atmospheric pressure.
Highly sensitive palladium (Pd) decorated carbon nanotube (CNT) embedding gas sensors working at atmospheric pressure were fabricated. Two types of gas sensors of bare CNTs and Pd nanoparticle decorated CNTs were synthesized by dielectrophoresis. The CNT-containing solution was dropped onto the patterned-platinum electrodes with ac bias. The CNT-embedding sensors sensitively detected 100 ppb level of NO(2) in an atmospheric pressure condition. The Pd decoration on CNTs forming the depletion region was found to be an effective way to enhance the sensor response by the control of carrier mobility and density. Raman spectroscopy revealed a low defect ratio of D/G(-) by heat treatment at 450 degrees C. Moreover, it was investigated that there exists an optimum temperature to enhance the sensor response.
Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), 171 Jang Yuseong, Daejeon 305343, Korea.
Ju-Hyung
JH
Yun
Joondong
J
Kim
Yun Chang
YC
Park
Jin-Won
JW
Song
Dong-Hun
DH
Shin
Chang-Soo
CS
Han
D001274:Atmospheric Pressure; D004563:Electrochemistry / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis*; D008839:Microelectrodes; D036103:Nanotechnology / Q000295:instrumentation*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure; D010165:Palladium / Q000737:chemistry*; D012680:Sensitivity and Specificity; D014159:Transducers
D005740:Gases; D037742:Nanotubes, Carbon; D010165:Palladium