Thermoelastic dissipation in MEMS/NEMS flexural mode resonators.
Understanding the energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators are particularly important to maximizing an important figure of merit relevant for miniature sensor and signal processing applications: the Quality factor (Q) of resonance. This paper discusses thermoelastic dissipation (TED) as the dominant internal-friction mechanism in flexural mode MEMS/NEMS resonators. Criteria for optimizing the geometrical design of flexural mode MEMS/NEMS resonators are theoretically established with a view towards minimizing the TED for single-crystal silicon MEMS/NEMS flexural mode resonators.
Department of Engineering and Nanoscience Centre, University of Cambridge, CB2 1PZ, UK.
Jize
J
Yan
Ashwin A
AA
Seshia