A new method for determining the strain energy release rate of an interface via force-depth data of nanoindentation tests.
Indentation forces, including constant rate and oscillating mode, were applied to SiO(2)/Si and diamond-like carbon (DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.
Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan.
Pal Jen
PJ
Wei
Wen Long
WL
Liang
Chi Fong
CF
Ai
Jen Fin
JF
Lin