A room temperature surface acoustic wave hydrogen sensor with Pt coated ZnO nanorods.
A surface acoustic wave (SAW) sensor with Pt coated ZnO nanorods as the selective layer has been investigated for hydrogen detection. The SAW sensor was fabricated based on a 128 degrees YX-LiNbO(3) substrate with a operating frequency of 145 MHz. A dual delay line configuration was adopted to eliminate external environmental fluctuations. The Pt coated ZnO nanorods were chosen as a selective layer due to their high surface-to-volume ratio, large penetration depth, and fast charge diffusion rate. The ZnO nanorods were synthesized by an aqueous solution method and coated with the noble metal Pt as a catalyst. Finally, the SAW sensor responses to humidity and hydrogen were tested. Results show that the sensor is not sensitive to humidity; moreover, the frequency shift for a hydrogen concentration variation of 6000 ppm is 26 kHz while operating at room temperature. It can be concluded that the Pt coated ZnO nanorod based SAW hydrogen sensor exhibits fast response, good sensitivity and short-term repeatability. It is worth noting that not only is the sensor sensitive enough to operate at room temperature, but also it can avoid the influence of humidity.
Institute of Applied Mechanics, National Taiwan University, Taipei 106, Taiwan.
Fu-Chun
FC
Huang
Yung-Yu
YY
Chen
Tsung-Tsong
TT
Wu