Characterization of organic low-dielectric-constant materials using optical spectroscopy.
The dielectric function spectra of low dielectric constant (low-k) materials have been determined using high-precision four-zone null spectroscopic ellipsometry, near-normal incidence reflection spectrometry and Fourier transform infrared transmission spectroscopy. The optical functions over a wide spectral range from 0.03 to 5.4 eV (230 nm to 40.5 microm wavelength region) have been evaluated for representative low-k materials used in the semiconductor industry for interlayer dielectrics: (1) FLARE -- organic spin-on polymer, and (2) HOSP -- spin-on hybrid organic-siloxane polymer from the Honeywell Electronic Materials Company.
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Yamaguchi
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Nakano
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