1.3 microm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction.
We report the fabrication and the performance of phase-locked VCSEL arrays emitting near 1310 nm wavelength. The arrays were fabricated using double wafer fusion by patterning a tunnel junction layer, which serves to define the individual single mode array elements. Phase-locking in both one-dimensional and two-dimensional array configurations was confirmed by means of far field and spectral measurements as well as theoretical modeling. CW output powers of more than 12 mW were achieved.
Mutter
Lukas
L
Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory of Physics of Nanostructures, Lausanne, Switzerland. Lukas.Mutter@epfl.ch
Iakovlev
Vladimir
V
Caliman
Andrei
A
Mereuta
Alexandru
A
Sirbu
Alexei
A
Kapon
Eli
E