Piezoresistive characteristics of MWNT nanocomposites and fabrication as a polymer pressure sensor.
Polyimide (PI)-carbon nanotube composites were fabricated by in situ polymerization using multi-wall carbon nanotubes (MWNT) as fillers. The composite film was characterized by some analytical instruments to ensure its structure and good dispersion of the MWNTs in the composites. The electrical resistivity of this composite was found to vary significantly with both the temperature and the stress in the material. The PI-MWNT composites possess a very linear piezoresistive nature which can be used as a good pressure sensor material, provided with proper temperature compensation. Fabrication of a micropolymer pressure sensor using this nanocomposite sensing material is demonstrated and sensor performance is evaluated. The sensor has a higher sensitivity than a polysilicon sensor, rapid response, and is thermally stable. The sensor is suitable for mass production, and can be widely applied or integrated in a microfluidic system or biochip where pressure information is required.
Gau
C
C
Institute of Aeronautics and Astronautics, and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 70101, Taiwan. gauc@mail.ncku.edu.tw
Ko
H S
HS
Chen
H T
HT
D003460:Crystallization / Q000379:methods*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D046911:Macromolecular Substances / Q000737:chemistry; D008365:Manometry / Q000295:instrumentation*; D008422:Materials Testing; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008968:Molecular Conformation; D036103:Nanotechnology / Q000295:instrumentation*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D011312:Pressure; D012117:Resins, Synthetic / Q000737:chemistry; D013499:Surface Properties; D014159:Transducers
D046911:Macromolecular Substances; D037742:Nanotubes, Carbon; D012117:Resins, Synthetic; C029945:polyimide resin