Traceable nano geometric structure measurement and international comparison.
The accuracy of geometric structure plays a key role to guarantee high quality of the nano function device and electronic device. In June 1998, the Consultative Committee for Length (CCL) of International Committee for Weights and Measures decided to carry out international comparisons of five different types of artifacts: Step height standards, 1D-gratings, line scales, 2D-gratings and line width standards. The paper described the activity of NIM in the international comparison measurement of first three items, include the characters of artifacts, the working principle of instruments, the measuring procedures, the calculation methods, the comparison results and the measurement uncertainty.
State Key Laboratory of Precision Measuring Technology and Instruments, Tianjing University, Tianjing 300072, China.
Sitian
S
Gao
Hua
H
Du
Minzhen
M
Lu
Jianjun
J
Cui
Yushu
Y
Shi