1.3 microm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction.
We report the fabrication and the performance of phase-locked VCSEL arrays emitting near 1310 nm wavelength. The arrays were fabricated using double wafer fusion by patterning a tunnel junction layer, which serves to define the individual single mode array elements. Phase-locking in both one-dimensional and two-dimensional array configurations was confirmed by means of far field and spectral measurements as well as theoretical modeling. CW output powers of more than 12 mW were achieved.
Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory of Physics of Nanostructures, Lausanne, Switzerland. Lukas.Mutter@epfl.ch
Lukas
L
Mutter
Vladimir
V
Iakovlev
Andrei
A
Caliman
Alexandru
A
Mereuta
Alexei
A
Sirbu
Eli
E
Kapon