Method for absolute flatness measurement of optical surfaces.
To determine the absolute flatness deviations of optical surfaces, a novel method using two optical plates to achieve the absolute flatness test is presented. Absolute deviations of three surfaces, the rear surface of plate I and the front and rear surfaces of plate II, are obtained by four measurements. Wavefront error due to the inhomogeneity of plate II is measured beforehand and is then subtracted from the test results. Vertical profiles of the three surfaces are compared with the measurement results obtained by Zygo's three-flat application. Good agreement validates our method. The advantage of our method is that only one transmission flat is needed during the absolute test, which is especially useful for large-aperture interferometer calibration.
School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, #200 Xiao-ling-wei, Nanjing 210094, China.
Chen
C
Xu
Lei
L
Chen
Jiayi
J
Yin