Applied physics. Two beams squeeze feature sizes in optical lithography.
Perry
Joseph W
JW
School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, GA 30332, USA. joe.perry@gatech.edu.
D008027:Light; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics / Q000379:methods*; D055668:Photochemical Processes; D017785:Photons; D011108:Polymers
D011108:Polymers