Microscopic TV shearography for characterization of microsystems.
We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.
Paul Kumar
U
U
Department of Physics, Applied Optics Laboratory, Indian Institute of Technology Madras, Chennai TN 600 036, India. nkmohan@iitm.ac.in
Kothiyal
M P
MP
Mohan
N Krishna
NK