Single-step photopatterning of diffraction.
Inorganic-organic hybrid materials prepared by a sol-gel process showed a large photoinduced negative refractive-index change (2x10-2) and a volume change. Diffraction gratings were made directly by irradiation with a KrF excimer laser (248 nm) through a phase mask without any etching process. The dependence of diffraction efficiency on irradiation conditions was investigated. The maximum diffraction efficiency, measured by the Littrow configuration with a He-Ne laser (633 nm), was 3.4% in reflection mode.
Kang
Dong Jun
DJ
Park
Jang-Ung
JU
Bae
Byeong-Soo
BS
Nishii
Junji
J
Kintaka
Kenji
K