Blazed grating fabrication through gray-scale Xray lithography.
Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape.
Mouroulis
Pantazis
P
Hartley
Frank
F
Wilson
Daniel
D
White
Victor
V
Shori
Aidan
A
Nguyen
Steven
S
Zhang
Min
M
Feldman
Martin
M