title: Novel laser datum system for nanometric profilometry for large optical surfaces.
abstract: We report a new laser datum system for precision point-by-point profilometry of large curved optical surfaces. The laser datum is sensed by a nulling quadrant photodiode mounted in a flexural system with hybrid actuators, which also carries interferometer reference optics for vertical and horizontal displacement measurement. The flexure characteristics such as cross-talk and hysteresis were investigated. The optimum environmental conditions for the active position-control were studied, and closed-loop control was modeled. The experimental results for compensation accuracy showed a repeatability of +/- 4 nm rms, the compensation accuracy of 10 nm (vertical channel) and 20 nm (horizontal channel).
authors.forename: Ho-Soon
authors.initials: HS
authors.lastname: Yang
authors.forename: Sug-Whan
authors.initials: SW
authors.lastname: Kim
authors.forename: David
authors.initials: D
authors.lastname: Walker