title: Single palladium nanowire growth in place assisted by dielectrophoresis and focused ion beam.
abstract: Here we report, for the first time, on the combined use of Focused Ion Beam and Dielectrophoresis techniques for the fabrication of a nanodevice whose operating mechanism relies on a single palladium nanowire. Focused Ion Beam is used to deposit, without photolithographic masks, platinum microelectrodes on a silicon/silicon nitride substrate. Dielectrophoresis is employed for assembling the palladium nanowire, starting from a saturated palladium particles solution, and precisely positioning it between the nanocontacts. The nanodevice works as a hydrogen sensor, confirming the reliability of technology. Its electrical response has been recorded, at room temperature, in a dynamic environment, where different hydrogen concentrations, from 0.1% to 4% in dry air, have been introduced. Its sensitivity, towards 0.1% to 1% gas concentrations in dry air, has been calculated, too.
authors.affiliation: Department of Physical Technologies and New Materials-Nanomaterials and Devices Technologies Section, ENEA Research Center P.le E. Fermi 1, 80055 Portici, Italy.
authors.forename: Vera
authors.initials: V
authors.lastname: La Ferrara
authors.forename: Brigida
authors.initials: B
authors.lastname: Alfano
authors.forename: Ettore
authors.initials: E
authors.lastname: Massera
authors.forename: Girolamo
authors.initials: G
authors.lastname: Di Francia