Miniature holistic displacement sensor by immersion diffractive interferometry.
High interference contrast is obtained in a miniature dual-grating transmission displacement sensor submitted to an essentially uniform light flood of arbitrary polarization with multifunctional liquid film between gratings.
Jourlin
Yves
Y
Laboratoire Hubert Curien, UMR CNRS 5516, Université Jean Monnet, 18 rue Prof. Benoit Lauras, 42000 Saint-Etienne, France.
Parriaux
Olivier
O
Fuchs
Jörg
J
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008904:Miniaturization; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers