Volume holographic imaging for surface metrology at long working distances.
We present an imaging scheme that takes advantage of the superior lateral resolution of volume holographic imaging (VHI)[1] and a-priori surface information about the object to build a profilometer that can resolve 50 microm longitudinal features at a working distance of inverted exclamation markO 50 cm with a single VHI camera. We discuss the scheme and present experimental results of surface profiles of MEMS devices.
Sinha
Arnab
A
Barbastathis
George
G