Single palladium nanowire growth in place assisted by dielectrophoresis and focused ion beam.
Here we report, for the first time, on the combined use of Focused Ion Beam and Dielectrophoresis techniques for the fabrication of a nanodevice whose operating mechanism relies on a single palladium nanowire. Focused Ion Beam is used to deposit, without photolithographic masks, platinum microelectrodes on a silicon/silicon nitride substrate. Dielectrophoresis is employed for assembling the palladium nanowire, starting from a saturated palladium particles solution, and precisely positioning it between the nanocontacts. The nanodevice works as a hydrogen sensor, confirming the reliability of technology. Its electrical response has been recorded, at room temperature, in a dynamic environment, where different hydrogen concentrations, from 0.1% to 4% in dry air, have been introduced. Its sensitivity, towards 0.1% to 1% gas concentrations in dry air, has been calculated, too.
La Ferrara
Vera
V
Department of Physical Technologies and New Materials-Nanomaterials and Devices Technologies Section, ENEA Research Center P.le E. Fermi 1, 80055 Portici, Italy.
Alfano
Brigida
B
Massera
Ettore
E
Di Francia
Girolamo
G