Scanning white-light interferometry with a supercontinuum source.
A supercontinuum light source was incorporated into a custom-built scanning white-light interferometer. This light source based on a Nd:YAG pumped microstructured optical fiber exhibits 1.21+/-0.10 microm temporal coherence length. The device operation was validated by characterizing the step height on a microelectromechanical system component. The measured step height- 7.027+/-0.020 microm-agreed with results obtained by employing traditional light sources: a halogen lamp and a white light-emitting diode. The new light source features high output intensity of 20-35 mW, which is beneficial when measuring low-reflectivity samples. As the supercontinuum light source may be modulated at frequencies exceeding 10 MHz, it holds potential for stroboscopic dynamic measurements.
Kassamakov
Ivan
I
Helsinki University of Technology, Micronova, P.O.B. 3500, FIN-02015 TKK, Finland. ivan.kassamakov@helsinki.fi
Hanhijärvi
Kalle
K
Abbadi
Imad
I
Aaltonen
Juha
J
Ludvigsen
Hanne
H
Haeggström
Edward
E