On-wafer crystallization of ultralow-kappa pure silica zeolite films.
A higher goal: An on-wafer crystallization process to prepare pure silica zeolite (PSZ) MEL-type films that is superior to the previously used hydrothermal process is reported. These striation-free MEL-type films (right, see picture) outperform the traditional spin-on films (left) in terms of the kappa value, mechanical properties, surface roughness, mesopore size, and size distribution.
Liu
Yan
Y
Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA.
Lew
Christopher M
CM
Sun
Minwei
M
Cai
Rui
R
Wang
Junlan
J
Kloster
Grant
G
Boyanov
Boyan
B
Yan
Yushan
Y