title: On-wafer crystallization of ultralow-kappa pure silica zeolite films.
abstract: A higher goal: An on-wafer crystallization process to prepare pure silica zeolite (PSZ) MEL-type films that is superior to the previously used hydrothermal process is reported. These striation-free MEL-type films (right, see picture) outperform the traditional spin-on films (left) in terms of the kappa value, mechanical properties, surface roughness, mesopore size, and size distribution.
authors.affiliation: Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA.
authors.forename: Yan
authors.initials: Y
authors.lastname: Liu
authors.forename: Christopher M
authors.initials: CM
authors.lastname: Lew
authors.forename: Minwei
authors.initials: M
authors.lastname: Sun
authors.forename: Rui
authors.initials: R
authors.lastname: Cai
authors.forename: Junlan
authors.initials: J
authors.lastname: Wang
authors.forename: Grant
authors.initials: G
authors.lastname: Kloster
authors.forename: Boyan
authors.initials: B
authors.lastname: Boyanov
authors.forename: Yushan
authors.initials: Y
authors.lastname: Yan