title: Single-step photopatterning of diffraction.
abstract: Inorganic-organic hybrid materials prepared by a sol-gel process showed a large photoinduced negative refractive-index change (2x10-2) and a volume change. Diffraction gratings were made directly by irradiation with a KrF excimer laser (248 nm) through a phase mask without any etching process. The dependence of diffraction efficiency on irradiation conditions was investigated. The maximum diffraction efficiency, measured by the Littrow configuration with a He-Ne laser (633 nm), was 3.4% in reflection mode.
authors.forename: Dong Jun
authors.initials: DJ
authors.lastname: Kang
authors.forename: Jang-Ung
authors.initials: JU
authors.lastname: Park
authors.forename: Byeong-Soo
authors.initials: BS
authors.lastname: Bae
authors.forename: Junji
authors.initials: J
authors.lastname: Nishii
authors.forename: Kenji
authors.initials: K
authors.lastname: Kintaka