title: Blazed grating fabrication through gray-scale Xray lithography.
abstract: Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape.
authors.forename: Pantazis
authors.initials: P
authors.lastname: Mouroulis
authors.forename: Frank
authors.initials: F
authors.lastname: Hartley
authors.forename: Daniel
authors.initials: D
authors.lastname: Wilson
authors.forename: Victor
authors.initials: V
authors.lastname: White
authors.forename: Aidan
authors.initials: A
authors.lastname: Shori
authors.forename: Steven
authors.initials: S
authors.lastname: Nguyen
authors.forename: Min
authors.initials: M
authors.lastname: Zhang
authors.forename: Martin
authors.initials: M
authors.lastname: Feldman