title: Scanning white-light interferometry with a supercontinuum source.
abstract: A supercontinuum light source was incorporated into a custom-built scanning white-light interferometer. This light source based on a Nd:YAG pumped microstructured optical fiber exhibits 1.21+/-0.10 microm temporal coherence length. The device operation was validated by characterizing the step height on a microelectromechanical system component. The measured step height- 7.027+/-0.020 microm-agreed with results obtained by employing traditional light sources: a halogen lamp and a white light-emitting diode. The new light source features high output intensity of 20-35 mW, which is beneficial when measuring low-reflectivity samples. As the supercontinuum light source may be modulated at frequencies exceeding 10 MHz, it holds potential for stroboscopic dynamic measurements.
authors.affiliation: Helsinki University of Technology, Micronova, P.O.B. 3500, FIN-02015 TKK, Finland. ivan.kassamakov@helsinki.fi
authors.forename: Ivan
authors.initials: I
authors.lastname: Kassamakov
authors.forename: Kalle
authors.initials: K
authors.lastname: Hanhijärvi
authors.forename: Imad
authors.initials: I
authors.lastname: Abbadi
authors.forename: Juha
authors.initials: J
authors.lastname: Aaltonen
authors.forename: Hanne
authors.initials: H
authors.lastname: Ludvigsen
authors.forename: Edward
authors.initials: E
authors.lastname: Haeggström