title: Microscopic TV shearography for characterization of microsystems.
abstract: We demonstrate a microscopic TV shearographic configuration for characterization of microsystems by measuring the slope under relatively large out-of-plane deformation. In the optical arrangement, a long working distance zoom imaging system is combined with a conventional Michelson shear interferometer. The experimental results on a microelectromechanical system pressure sensor subjected to external pressure load are presented.
authors.affiliation: Department of Physics, Applied Optics Laboratory, Indian Institute of Technology Madras, Chennai TN 600 036, India. nkmohan@iitm.ac.in
authors.forename: U
authors.initials: U
authors.lastname: Paul Kumar
authors.forename: M P
authors.initials: MP
authors.lastname: Kothiyal
authors.forename: N Krishna
authors.initials: NK
authors.lastname: Mohan