title: Buried selectively-oxidized AlGaAs structures grown on nonplanar substrates.
abstract: We demonstrate a novel buried oxide grating structure formed by selectively-oxidized AlxGa1-xAs grown on nonplanar substrates using lowpressure MOCVD for the first time. Localized aluminum content variation in AlGaAs is obtained with MOCVD growth on nonplanar substrate. Buried aluminum oxide/semiconductor distributed feedback structure is achieved with selective oxidation of these AlGaAs layers. We fabricated a resonant-cavity-enhanced photodetector with the imbedded buried-oxide structure and measured the photodetector responsivity spectrum.
authors.forename: Pei-Cheng
authors.initials: PC
authors.lastname: Ku
authors.forename: J
authors.initials: J
authors.lastname: Hernandez
authors.forename: C
authors.initials: C
authors.lastname: Chang-Hasnain