Optical transfer of periodic microstructures by interfering femtosecond laser beams.
We report on an optical interference method for transferring periodic microstructures of metal film from a supporting substrate to a receiving substrate by means of five-beam interference of femtosecond laser pulses. Scanning electron microscopy and optical microscopy revealed microstructures with micrometer-order were transferred to the receiving substrate. In the meanwhile, a negative copy of the transferred structures was induced in the metal film on the supporting substrate. The diffraction characteristics of the transferred structures were also evaluated. The present technique allows one-step realization of functional optoelectronic devices.
Zhao
Quan-Zhong
QZ
Qiu
Jian-Rong
JR
Zhao
Chong-Jun
CJ
Jiang
Xiong-Wei
XW
Zhu
Cong-Shan
CS