Broadband supercontinuum interferometer for high-resolution profilometry.
In this paper, it is shown that a white light supercontinuum source generated in an air-silica microstructured optical fiber pumped with picosecond pulses offers the possibility to improve fringes visibility in interferometric acquisitions. Consequently, this source combined with a spectral interferometer, reaches high-resolution profilometric measurements. Phase calculation based on seven point algorithm can perform theoretically a subnanometer resolution. This method provides a one line profile of large surfaces from the analysis of a single shot image, without any mechanical scanning.
Reolon
D
D
Jacquot
M
M
Verrier
I
I
Brun
G
G
Veillas
C
C