Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film.
A sinusoidal wavelength-scanning interferometer for measuring thickness and surfaces profiles of a thin film has been proposed in which a superluminescent laser diode and an acousto-optic tunable filter are used. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase alpha. Two values of an optical path difference (OPD) obtained from Zb and alpha, respectively, are combined to measure an OPD longer than a wavelength. The values of Zb and alpha are estimated by minimizing the difference between the detected signals and theoretical ones. From the estimated values, thickness and surface of a silicon dioxide film coated on an IC wafer with different thicknesses of 1 mum and 4 mum are measured with an error less than 5 nm.
Akiyama
Hisashi
H
Sasaki
Osami
O
Suzuki
Takamasa
T