title: A hard x-ray nanoprobe for scanning and projection nanotomography.
abstract: To fabricate and qualify nanodevices, characterization tools must be developed to provide a large panel of information over spatial scales spanning from the millimeter down to the nanometer. Synchrotron x-ray-based tomography techniques are getting increasing interest since they can provide fully three-dimensional (3D) images of morphology, elemental distribution, and crystallinity of a sample. Here we show that by combining suitable scanning schemes together with high brilliance x-ray nanobeams, such multispectral 3D volumes can be obtained during a single analysis in a very efficient and nondestructive way. We also show that, unlike other techniques, hard x-ray nanotomography allows reconstructing the elemental distribution over a wide range of atomic number and offers truly depth resolution capabilities. The sensitivity, 3D resolution, and complementarity of our approach make hard x-ray nanotomography an essential characterization tool for a large panel of scientific domains.
authors.affiliation: CEA, INAC, SP2M/NRS, 17 rue des Martyrs, 38054 [corrected] Grenoble Cedex 9, [corrected] France.
authors.forename: Pierre
authors.initials: P
authors.lastname: Bleuet
authors.forename: Peter
authors.initials: P
authors.lastname: Cloetens
authors.forename: Patrice
authors.initials: P
authors.lastname: Gergaud
authors.forename: Denis
authors.initials: D
authors.lastname: Mariolle
authors.forename: Nicolas
authors.initials: N
authors.lastname: Chevalier
authors.forename: Rémi
authors.initials: R
authors.lastname: Tucoulou
authors.forename: Jean
authors.initials: J
authors.lastname: Susini
authors.forename: Amal
authors.initials: A
authors.lastname: Chabli