title: Broad angular multilayer analyzer for soft X-rays.
abstract: Using numerical optimization algorithm, non-periodic Mo/Si, Mo/Be, and Ni/C broad angular multilayer analyzers have been designed. At the wavelength of 13 nm and the angular range of 45~49 degrees , the Mo/Si and Mo/Be multilayer can provide the plateau s-reflectivity of 65% and 45%, respectively. At 5.7 nm, the s-reflectivity of Ni/C multilayer is 16% in the 44~46 degrees range. The non-periodic Mo/Si broad angular multilayer was also fabricated using DC magnetron sputtering, and characterized using the soft X-ray polarimeter at BESSY. The s-reflectivity is higher than 45.6% over the angular range of 45~49 degrees at 13 nm, where, the degree of polarization is more than 99.98%.
authors.forename: Z S
authors.initials: ZS
authors.lastname: Wang
authors.forename: H C
authors.initials: HC
authors.lastname: Wang
authors.forename: J T
authors.initials: JT
authors.lastname: Zhu
authors.forename: F L
authors.initials: FL
authors.lastname: Wang
authors.forename: Z X
authors.initials: ZX
authors.lastname: Gu
authors.forename: L Y
authors.initials: LY
authors.lastname: Chen
authors.forename: A G
authors.initials: AG
authors.lastname: Michette
authors.forename: A K
authors.initials: AK
authors.lastname: Powell
authors.forename: S J
authors.initials: SJ
authors.lastname: Pfauntsch
authors.forename: F
authors.initials: F
authors.lastname: Schäfers