title: Basic structures for photonic integrated circuits in Silicon-on-insulator.
abstract: For the compact integration of photonic circuits, wavelength-scale structures with a high index contrast are a key requirement. We developed a fabrication process for these nanophotonic structures in Silicon-on-insulator using CMOS processing techniques based on deep UV lithography. We have fabricated both photonic wires and photonic crystal waveguides and show that, with the same fabrication technique, photonic wires have much less propagation loss than photonic crystal waveguides. Measurements show losses of 0.24dB/mm for photonic wires, and 7.5dB/mm for photonic crystal waveguides. To tackle the coupling to fiber, we studied and fabricated vertical fiber couplers with coupling efficiencies of over 21%. In addition, we demonstrate integrated compact spot-size converters with a mode-to-mode coupling efficiency of over 70%.
authors.forename: W
authors.initials: W
authors.lastname: Bogaerts
authors.forename: D
authors.initials: D
authors.lastname: Taillaert
authors.forename: B
authors.initials: B
authors.lastname: Luyssaert
authors.forename: P
authors.initials: P
authors.lastname: Dumon
authors.forename: J
authors.initials: J
authors.lastname: Van Campenhout
authors.forename: P
authors.initials: P
authors.lastname: Bienstman
authors.forename: D
authors.initials: D
authors.lastname: Van Thourhout
authors.forename: R
authors.initials: R
authors.lastname: Baets
authors.forename: V
authors.initials: V
authors.lastname: Wiaux
authors.forename: S
authors.initials: S
authors.lastname: Beckx