title: Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser.
abstract: We report the demonstration of reflection mode imaging of 100 nm-scale features using 46.9 nm light from a compact capillary-discharge laser. Our imaging system employs a Sc/Si multilayer coated Schwarzschild condenser and a freestanding zone plate objective. The reported results advance the development of practical and readily available surface and nanostructure imaging tools based on the use of compact sources of extreme ultraviolet light.
authors.forename: F
authors.initials: F
authors.lastname: Brizuela
authors.forename: G
authors.initials: G
authors.lastname: Vaschenko
authors.forename: C
authors.initials: C
authors.lastname: Brewer
authors.forename: M
authors.initials: M
authors.lastname: Grisham
authors.forename: C
authors.initials: C
authors.lastname: Menoni
authors.forename: M
authors.initials: M
authors.lastname: Marconi
authors.forename: J
authors.initials: J
authors.lastname: Rocca
authors.forename: W
authors.initials: W
authors.lastname: Chao
authors.forename: J
authors.initials: J
authors.lastname: Liddle
authors.forename: E
authors.initials: E
authors.lastname: Anderson
authors.forename: D
authors.initials: D
authors.lastname: Attwood
authors.forename: A
authors.initials: A
authors.lastname: Vinogradov
authors.forename: I
authors.initials: I
authors.lastname: Artioukov
authors.forename: Y
authors.initials: Y
authors.lastname: Pershyn
authors.forename: V
authors.initials: V
authors.lastname: Kondratenko