A hard x-ray nanoprobe for scanning and projection nanotomography.
To fabricate and qualify nanodevices, characterization tools must be developed to provide a large panel of information over spatial scales spanning from the millimeter down to the nanometer. Synchrotron x-ray-based tomography techniques are getting increasing interest since they can provide fully three-dimensional (3D) images of morphology, elemental distribution, and crystallinity of a sample. Here we show that by combining suitable scanning schemes together with high brilliance x-ray nanobeams, such multispectral 3D volumes can be obtained during a single analysis in a very efficient and nondestructive way. We also show that, unlike other techniques, hard x-ray nanotomography allows reconstructing the elemental distribution over a wide range of atomic number and offers truly depth resolution capabilities. The sensitivity, 3D resolution, and complementarity of our approach make hard x-ray nanotomography an essential characterization tool for a large panel of scientific domains.
Bleuet
Pierre
P
CEA, INAC, SP2M/NRS, 17 rue des Martyrs, 38054 [corrected] Grenoble Cedex 9, [corrected] France.
Cloetens
Peter
P
Gergaud
Patrice
P
Mariolle
Denis
D
Chevalier
Nicolas
N
Tucoulou
Rémi
R
Susini
Jean
J
Chabli
Amal
A