title: Diffractive elements with novel antireflection film stacks.
abstract: Antireflection coatings fabricated between the substrate and the diffractive microstructure are shown to reduce Fresnel losses effectively, especially for high-index substrates used in the infrared region, if the diffractive structure and the antireflection stack are designed simultaneously. A substantial reduction of the Fabry-Perot effect caused by the high-index substrate is observed by using antireflection layers with films thicker than the normal quarter-wave films.
authors.forename: Henna
authors.initials: H
authors.lastname: Elfström
authors.forename: Tuomas
authors.initials: T
authors.lastname: Vallius
authors.forename: Markku
authors.initials: M
authors.lastname: Kuittinen
authors.forename: Jari
authors.initials: J
authors.lastname: Turunen
authors.forename: Tina
authors.initials: T
authors.lastname: Clausnitzer
authors.forename: Ernst-Bernhard
authors.initials: EB
authors.lastname: Kley