title: Microring-resonator-based add-drop filters in SiN: fabrication and analysis.
abstract: Third-order add-drop filters based on series-coupled microring resonators were fabricated in silicon-rich silicon nitride with accurate dimensional control and negligible sidewall roughness. For the first time, a low 3 dB drop loss is demonstrated with a wide 24 nm free-spectral-range in a high-order microring filter without using the Vernier effect. The spectral response is matched by rigorous numerical simulation, and non-idealities in the drop- and through-port responses are shown to be of design origin and to be correctable.
authors.forename: Tymon
authors.initials: T
authors.lastname: Barwicz
authors.forename: Milos
authors.initials: M
authors.lastname: Popović
authors.forename: Peter
authors.initials: P
authors.lastname: Rakich
authors.forename: Michael
authors.initials: M
authors.lastname: Watts
authors.forename: Hermann
authors.initials: H
authors.lastname: Haus
authors.forename: Erich
authors.initials: E
authors.lastname: Ippen
authors.forename: Henry
authors.initials: H
authors.lastname: Smith