title: Surface measurement based on chessboard-shaped 2-D Ronchi grating method.
abstract: A method for surface profile measurement using a chessboard-shaped 2-D Ronchi grating is proposed. The gradients in two orthogonal directions of the measured surface can be obtained simultaneously using a chessboard-shaped 2-D Ronchi grating, so that it is possible to reconstruct the surface profile by means of only one Ronchigram with high accuracy. The measuring principle and the design of the chessboard-shaped 2-D Ronchi grating are described. Measurements of both stationary and varying surfaces using an instrument constructed on the basis of the method were conducted with satisfactory results.
authors.forename: Boxiong
authors.initials: B
authors.lastname: Wang
authors.forename: Huacheng
authors.initials: H
authors.lastname: Chen
authors.forename: Xiuzhi
authors.initials: X
authors.lastname: Luo
authors.forename: Chao
authors.initials: C
authors.lastname: Yu
authors.forename: Zhenjiang
authors.initials: Z
authors.lastname: Liu