Direct spectral phase function calculation for dispersive interferometric thickness profilometry.
A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.
Kim
Daesuk
D
Kim
Soohyun
S