title: Sub-100 nm nanostructuring of silicon by ultrashort laser pulses.
abstract: Techniques based on laser scanning microscopes for nanoprocessing of periodic structures on silicon with ultra-short laser pulses have been developed. Ripples of 800-900 nm spacing were obtained after laser irradiation at a wavelength of 1040 nm, a repetition rate of 10 kHz and a fluence of 2 J/cm2 in air. Smaller features of 70-100nm spacing were achieved in oil at a wavelength of 800 nm, a repetition rate of 90 MHz and a fluence of 200-300 mJ/cm2 by using a high numerical focusing objective.
authors.forename: Ronan
authors.initials: R
authors.lastname: Le Harzic
authors.forename: H
authors.initials: H
authors.lastname: Schuck
authors.forename: D
authors.initials: D
authors.lastname: Sauer
authors.forename: T
authors.initials: T
authors.lastname: Anhut
authors.forename: I
authors.initials: I
authors.lastname: Riemann
authors.forename: K
authors.initials: K
authors.lastname: König