title: Miniature planar solid immersion mirror with focused spot less than a quarter wavelength.
abstract: We describe a microoptical planar waveguide solid immersion mirror with high optical throughput, and show that it can focus light to spot sizes of ~90 nm at a wavelength of 413 nm. Scanning near field optical microscope images of the light within the device are in good agreement with a simple theoretical model. This device is accurately mass-produced with lithographic and thin film deposition techniques known from modern integrated circuit processing.
authors.forename: William
authors.initials: W
authors.lastname: Challener
authors.forename: Christophe
authors.initials: C
authors.lastname: Mihalcea
authors.forename: Chubing
authors.initials: C
authors.lastname: Peng
authors.forename: Kalman
authors.initials: K
authors.lastname: Pelhos