title: Improvement of the optical coating process by cutting layers with sensitive monitoring wavelengths.
abstract: For costly optical coatings, a precise monitoring method is necessary. A new monitoring method based on the selection of the most sensitive monitor wavelength is proposed. The most sensitive monitor wavelength is easy to find by a numerical analysis. The equation for the thickness compensation when a layer is over-shot or under-shot was derived. Several examples, including narrow-band pass filters, have been given to demonstrate that this new method is superior to the turning point method in the coating process.
authors.forename: Cheng-Chung
authors.initials: CC
authors.lastname: Lee
authors.forename: Kai
authors.initials: K
authors.lastname: Wu
authors.forename: Chien-Cheng
authors.initials: CC
authors.lastname: Kuo
authors.forename: Sheng-Hui
authors.initials: SH
authors.lastname: Chen