A computer simulation for the fabrication of hexagonal micro lens arrays by use of the dragging process with an excimer laser.
A computer simulation for the fabrication of aspheric hexagonal micro lens arrays by use of the laser dragging process was investigated. An excimer laser dragging process is capable of manufacturing a microstructure array with a curved surface. Generally, this process was used to produce aspheric micro lens arrays with an arrangement of rectangular coordinates. The first step in the proposed dragging process is to generate micro channels whose cross-section shape is similar to that of the mask. Then the dragging procedure is repeated twice, each time after rotating the work piece by 60 deg relative to the previous channels. This hexagonal micro lens array may be used in the application of image processing. Our results show that the hexagonal micro lens array has a better axial symmetry and higher fill factor than a rectangle one.
Wang
Shuh-Yi
SY