Profilometry with line-field Fourier-domain interferometry.
Line-field Fourier-domain interferometry that is capable of a fast three-dimensional (3-D) shape measurement is proposed. This system is constructed from a combination of a conventional Fourier-domain interferometer and a one-dimensional imaging system. This system directs a line-shaped focus onto a specimen, and a two-dimensional shape can be calculated from a single-shot image of the CCD camera without any mechanical scan. An aspherical mirror and a Japanese coin are presented as a 3-D shape measurement example.
Endo
Takashi
T
Yasuno
Yoshiaki
Y
Makita
Shuichi
S
Itoh
Masahide
M
Yatagai
Toyohiko
T