title: Electronic color charts for dielectric films on silicon.
abstract: This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into RGB parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.
authors.forename: Justin
authors.initials: J
authors.lastname: Henrie
authors.forename: Spencer
authors.initials: S
authors.lastname: Kellis
authors.forename: Stephen
authors.initials: S
authors.lastname: Schultz
authors.forename: Aaron
authors.initials: A
authors.lastname: Hawkins