title: Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching.
abstract: We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO(2)).
authors.forename: Yves
authors.initials: Y
authors.lastname: Bellouard
authors.forename: Ali
authors.initials: A
authors.lastname: Said
authors.forename: Mark
authors.initials: M
authors.lastname: Dugan
authors.forename: Philippe
authors.initials: P
authors.lastname: Bado