title: Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization.
abstract: An experimental protocol for the realization of three-dimensional periodic metallic micro/nanostructures over large areas is presented. Simultaneous fabrication of hundreds of three-dimensional complex polymer structures is achieved using a two-photon photopolymerization (TPP) technique combined with a microlens array. Metallization of the structures is performed through the deposition of thin and highly conductive films by electroless plating. A chemical modification of the photopolymerizable resin and the production of a hydrophobic coating on the glass surface supporting the structures are realized. This process prevents metal deposition on the substrate and restricts adhesion on polymer. Our technique can produce periodic and/or isolated metallic structures with arbitrary shape, created by more than 700 individual objects written in parallel.
authors.forename: Florian
authors.initials: F
authors.lastname: Formanek
authors.forename: Nobuyuki
authors.initials: N
authors.lastname: Takeyasu
authors.forename: Takuo
authors.initials: T
authors.lastname: Tanaka
authors.forename: Kenta
authors.initials: K
authors.lastname: Chiyoda
authors.forename: Atsushi
authors.initials: A
authors.lastname: Ishikawa
authors.forename: Satoshi
authors.initials: S
authors.lastname: Kawata