title: Accurate microfour-point probe sheet resistance measurements on small samples.
abstract: We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the "sweet spot," where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 microm (50 microm) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 microm pitch microfour-point probe and assuming a probe alignment accuracy of +/-2.5 microm.
authors.affiliation: Capres A/S, Scion-DTU, Building 373, DK-2800, Kgs. Lyngby, Denmark.
authors.forename: Sune
authors.initials: S
authors.lastname: Thorsteinsson
authors.forename: Fei
authors.initials: F
authors.lastname: Wang
authors.forename: Dirch H
authors.initials: DH
authors.lastname: Petersen
authors.forename: Torben Mikael
authors.initials: TM
authors.lastname: Hansen
authors.forename: Daniel
authors.initials: D
authors.lastname: Kjaer
authors.forename: Rong
authors.initials: R
authors.lastname: Lin
authors.forename: Jang-Yong
authors.initials: JY
authors.lastname: Kim
authors.forename: Peter F
authors.initials: PF
authors.lastname: Nielsen
authors.forename: Ole
authors.initials: O
authors.lastname: Hansen