title: Low-coherence interference microscopy using a ferro-electric liquid crystal phase-modulator.
abstract: We describe a computer-controlled low-coherence interference microscope, based on a Linnik interferometer configuration that can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The novel feature of the system is a fast, switchable achromatic phase-modulator operating on the geometric phase, using a pair of ferro-electric liquid crystal devices.
authors.forename: Maitreyee
authors.initials: M
authors.lastname: Roy
authors.forename: Colin
authors.initials: C
authors.lastname: Sheppard
authors.forename: Parameswaran
authors.initials: P
authors.lastname: Hariharan