title: Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates.
abstract: We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware.
authors.forename: Sanjit K
authors.initials: SK
authors.lastname: Debnath
authors.forename: Mahendra P
authors.initials: MP
authors.lastname: Kothiyal
authors.forename: Joanna
authors.initials: J
authors.lastname: Schmit
authors.forename: Parameswaran
authors.initials: P
authors.lastname: Hariharan