title: Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser.
abstract: We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.
authors.forename: P W
authors.initials: PW
authors.lastname: Wachulak
authors.forename: R A
authors.initials: RA
authors.lastname: Bartels
authors.forename: M C
authors.initials: MC
authors.lastname: Marconi
authors.forename: C S
authors.initials: CS
authors.lastname: Menoni
authors.forename: J J
authors.initials: JJ
authors.lastname: Rocca
authors.forename: Y
authors.initials: Y
authors.lastname: Lu
authors.forename: B
authors.initials: B
authors.lastname: Parkinson