Simultaneous interference exposure of different-period DBRs for intra-board WDM optical interconnection.
Integration of different-period distributed Bragg reflectors (DBRs) is required in constructing an intra-board optical interconnection device with wavelength division multiplexing (WDM). Interference exposure method with cylindrical Lloyd mirror optics and mask aligner was discussed for integrating those DBRs simultaneously. DBRs were designed to give coupling efficiency higher than 80% with coupling length of 0.6 mm and crosstalk noise less than -10 dB with 3 nm wavelength separation for optical interconnection using eight wavelengths around 850 nm. Interference exposure system was developed and integration of eight DBRs by two times exposure was demonstrated.
Ura
Shogo
S
Department of Electronics, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan. ura@kit.ac.jp
Asada
Takuo
T
Yamaguchi
Satoshi
S
Nishio
Kenzo
K
Horii
Atsushi
A
Kintaka
Kenji
K
D017076:Computer-Aided Design; D004867:Equipment Design; D005336:Fiber Optic Technology / Q000295:instrumentation*; D055096:Optical Devices; D015203:Reproducibility of Results; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*