title: High numerical aperture imaging with different polarization patterns.
abstract: The modulation transfer function (MTF) is calculated for imaging with linearly, circularly and radially polarized light as well as for different numerical apertures and aperture shapes. Special detectors are only sensitive to one component of the electric energy density, e.g. the longitudinal component. For certain parameters this has advantages concerning the resolution when comparing to polarization insensitive detectors. It is also shown that in the latter case zeros of the MTF may appear which are purely due to polarization effects and which depend on the aperture angle. Finally some ideas are presented how to use these results for improving the resolution in lithography.
authors.forename: N
authors.initials: N
authors.lastname: Lindlein
authors.forename: S
authors.initials: S
authors.lastname: Quabis
authors.forename: U
authors.initials: U
authors.lastname: Peschel
authors.forename: G
authors.initials: G
authors.lastname: Leuchs