title: Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography.
abstract: We have fabricated diamond-like silicon photonic crystals through a sequential silica/silicon chemical vapor deposition (CVD) process from the corresponding polymer templates photopatterned by holographic lithography. Core-shell morphology is revealed due to the partial backfilling of the interstitial pores. To model the shell formation and investigate its effect to the bandgap properties, we developed a two-parameter level-set approach that closely approximated the core-shell morphology, and compare the bandgap simulation with the measured optical properties of the 3D crystals at each processing step. Both experimental and calculation results suggest that a complete filling is necessary to maximize the photonic bandgap in the diamond-like structures.
authors.forename: Jun Hyuk
authors.initials: JH
authors.lastname: Moon
authors.forename: Shu
authors.initials: S
authors.lastname: Yang
authors.forename: Wenting
authors.initials: W
authors.lastname: Dong
authors.forename: Joseph W
authors.initials: JW
authors.lastname: Perry
authors.forename: Ali
authors.initials: A
authors.lastname: Adibi
authors.forename: Seung-Man
authors.initials: SM
authors.lastname: Yang