Design optimization of condenser microphone: a design of experiment perspective.
A well-designed condenser microphone backplate is very important in the attainment of good frequency response characteristics--high sensitivity and wide bandwidth with flat response--and low mechanical-thermal noise. To study the design optimization of the backplate, a 2(6) factorial design with a single replicate, which consists of six backplate parameters and four responses, has been undertaken on a comprehensive condenser microphone model developed by Zuckerwar. Through the elimination of insignificant parameters via normal probability plots of the effect estimates, the projection of an unreplicated factorial design into a replicated one can be performed to carry out an analysis of variance on the factorial design. The air gap and slot have significant effects on the sensitivity, mechanical-thermal noise, and bandwidth while the slot/hole location interaction has major influence over the latter two responses. An organized and systematic approach of designing the backplate is summarized.
Tan
Chee Wee
CW
Micromachines Centre, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore.
Miao
Jianmin
J