Determining thickness of films on a curved substrate by use of ellipsometric measurements.
A three-intensity measurement technique has been employed in polarizer-sample-analyzer imaging ellipsometry to measure the two-dimensional ellipsometric parameters of a coated cylindrical lens. Since azimuth deviation alpha of a polarizer can also be measured with this three-intensity measurement technique, we tilted a well-calibrated thin-film wafer to identify the orientation of the measured alphawith respect to the incident plane. Using the analytic property of this measurement technique, we can correct the deviation and determine the thickness profile of the thin film coated on a cylindrical lens.
Han
Chien-Yuan
CY
Department of Electro-Optical Engineering, National United University, Miaoli 360, Taiwan.
Lee
Zhen-You
ZY
Chao
Yu-Faye
YF