title: Holographic lithography of periodic two- and three-dimensional microstructures in photoresist SU-8.
abstract: Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
authors.forename: Hiroaki
authors.initials: H
authors.lastname: Misawa
authors.forename: Toshiaki
authors.initials: T
authors.lastname: Kondo
authors.forename: Saulius
authors.initials: S
authors.lastname: Juodkazis
authors.forename: Vygantas
authors.initials: V
authors.lastname: Mizeikis
authors.forename: Shigeki
authors.initials: S
authors.lastname: Matsuo