title: Demonstrating sub-nm closed loop MEMS flattening.
abstract: Ground based high-contrast imaging (e.g. extrasolar giant planet detection) has demanding wavefront control requirements two orders of magnitude more precise than standard adaptive optics systems. We demonstrate that these requirements can be achieved with a 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror having an actuator spacing of 340 microm and a stroke of approximately 1 microm, over an active aperture 27 actuators across. We have flattened the mirror to a residual wavefront error of 0.54 nm rms within the range of controllable spatial frequencies. Individual contributors to final wavefront quality, such as voltage response and uniformity, have been identified and characterized.
authors.forename: Julia W
authors.initials: JW
authors.lastname: Evans
authors.forename: Bruce
authors.initials: B
authors.lastname: Macintosh
authors.forename: Lisa
authors.initials: L
authors.lastname: Poyneer
authors.forename: Katie
authors.initials: K
authors.lastname: Morzinski
authors.forename: Scott
authors.initials: S
authors.lastname: Severson
authors.forename: Daren
authors.initials: D
authors.lastname: Dillon
authors.forename: Donald
authors.initials: D
authors.lastname: Gavel
authors.forename: Layra
authors.initials: L
authors.lastname: Reza