Effect of femtosecond laser irradiation on structure of UV grade fused silica.
A p-polarized femtosecond laser beam was used to irradiate a UV grade fused silica to create microchannels, which are useful for producing optical gratings or micro fluidics devices. The laser irradiated surface was characterized using optical microscope, stylus profiler, SEM, XRD and TEM. A special technique was used to protect the laser irradiated surfaces in preparing cross-sectional TEM samples. The XRD spectra and TEM observation reveal that structure of the fused silica remain amorphous after the femtosecond laser irradiation.
Zhou
W
W
Tan
T T
TT
Lim
L E N
LE
Zheng
H Y
HY
Zhu
S
S
Wang
L M
LM