Modeling fabrication to accurately place GMR resonances.
Numerical methods for simulating etching and deposition processes were combined with electromagnetic modeling to design guided-mode resonance (GMR) filters with accurately positioned resonances and study how fabrication affects their optical behavior. GMR filters are highly sensitive to structural deformations that arise during fabrication, making accurate placement of their resonances very difficult without active tuning while in operation. Inspired by how thin film resistors are trimmed during fabrication, the numerical tools were used to design a method for adjusting position of GMR resonances at the time of fabrication.
Rumpf
Raymond C
RC
Johnson
Eric G
EG