Microlens fabrication using an excimer laser and the diaphragm method.
A new microlens fabrication method using an excimer laser is described in this paper. This method is based on the light vignetting effect. An excimer laser beam was propagated through two groups of fly's-eye lens arrays and separated by the groups, after which divergent beams were formed. When the beams were sectioned by a mask and passed through a circular diaphragm, a vignetting effect was produced relative to an excimer laser mask projection image lens. Then the irradiating intensity at the processing plane varied from the beam center to its margin. This intensity difference in the transverse distribution would result in microlens curvature forming. This diaphragm method has the extinct advantage of short production time, few steps and easy setup construction.
Chen
Tao
T
Institute of Laser Engineering, Beijing University of Technology, Beijing, China. chentao@bjut.edu.cn
Wang
Tong
T
Wang
Zhen
Z
Zuo
Tiechuan
T
Wu
Jian
J
Liu
Shibing
S
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D054018:Lasers, Excimer; D007909:Lenses; D008567:Membranes, Artificial; D008904:Miniaturization
D008567:Membranes, Artificial