title: Highly selective and compact tunable MOEMS photonic crystal Fabry-Perot filter.
abstract: The authors report a compact and highly selective tunable filter using a Fabry-Perot resonator combining a bottom micromachined 3-pair-InP/air-gap Bragg reflector with a top photonic crystal slab mirror. It is based on the coupling between radiated vertical cavity modes and waveguided modes of the photonic crystal. The full-width at half maximum (FWHM) of the resonance, as measured by microreflectivity experiments, is close to 1.5nm (around 1.55 microm). The presence of the photonic crystal slab mirror results in a very compact resonator, with a limited number of layers. The demonstrator was tuned over a 20nm range for a 4V tuning voltage, the FWHM being kept below 2.5nm. Bending of membranes is a critical issue, and better results (FWHM=0.5nm) should be obtained on the same structure if this technological point is fixed.
authors.forename: S
authors.initials: S
authors.lastname: Boutami
authors.forename: B
authors.initials: B
authors.lastname: Ben Bakir
authors.forename: J-L
authors.initials: JL
authors.lastname: Leclercq
authors.forename: X
authors.initials: X
authors.lastname: Letartre
authors.forename: P
authors.initials: P
authors.lastname: Rojo-Romeo
authors.forename: M
authors.initials: M
authors.lastname: Garrigues
authors.forename: P
authors.initials: P
authors.lastname: Viktorovitch
authors.forename: I
authors.initials: I
authors.lastname: Sagnes
authors.forename: L
authors.initials: L
authors.lastname: Legratiet
authors.forename: M
authors.initials: M
authors.lastname: Strassner