title: Bandgap measurement of thin dielectric films using monochromated STEM-EELS.
abstract: High-resolution electron energy-loss spectroscopy (HR-EELS), achieved by attaching electron monochromators to transmission electron microscopes (TEM), has proved to be a powerful tool for measuring bandgaps. However, the method itself is still uncertain, due to Cerenkov loss and surface effects that can potentially influence the quality of EELS data. In the present study, we achieved an energy resolution of about 0.13 eV at 0.1s, with a spatial resolution of a few nanometers, using a monochromated STEM-EELS technique. We also assessed various methods of bandgap measurement for a-SiNx and SiO2 thin dielectric films. It was found that the linear fit method was more reliable than the onset reading method in avoiding the effects of Cerenkov loss and specimen thickness. The bandgap of the SiO2 was estimated to be 8.95 eV, and those of a-SiNx with N/Si ratios of 1.46, 1.20 and 0.92 were measured as 5.3, 4.1 and 2.9 eV, respectively. These bandgap-measurement results using monochromated STEM-EELS were compared with those using Auger electron spectroscopy (AES)-reflective EELS (REELS).
authors.affiliation: Samsung Advanced Institute of Technology, AE Center, Nongseo-Dong Mt. 14-1, Giheung-gu, Yongin-si, Gyeonggi-do 446-712, Republic of Korea. jucheol.park@samsung.com
authors.forename: Jucheol
authors.initials: J
authors.lastname: Park
authors.forename: Sung
authors.initials: S
authors.lastname: Heo
authors.forename: Jae-Gwan
authors.initials: JG
authors.lastname: Chung
authors.forename: Heekoo
authors.initials: H
authors.lastname: Kim
authors.forename: Hyungik
authors.initials: H
authors.lastname: Lee
authors.forename: Kihong
authors.initials: K
authors.lastname: Kim
authors.forename: Gyeong-Su
authors.initials: GS
authors.lastname: Park