title: Micro actuated grating for multi-beam optical pickups.
abstract: A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively.
authors.forename: Chi-Hung
authors.initials: CH
authors.lastname: Lee
authors.forename: Yi
authors.initials: Y
authors.lastname: Chiu
authors.forename: Han-Ping D
authors.initials: HP
authors.lastname: Shieh