title: Laser drilling of nano-pores in sandwiched thin glass membranes.
abstract: We report on a novel method of using an excimer laser to drill ultra-small pores in borosilicate glass membranes. By introducing a thin layer of liquid between sandwiches of two glass slides, we can shrink the pore size and smoothen the surface on the exit side. We are able to push the minimal exit pore diameter down to 90 nm, well below the laser wavelength of 193 nm. This is achieved with substrates over 150 microm thick. Compared to other methods, this technique is fast, inexpensive, and produces high quality smooth pores.
authors.affiliation: Department of Electrical & Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706-1691, USA. myu3@wisc.edu
authors.forename: Minrui
authors.initials: M
authors.lastname: Yu
authors.forename: Hyun-Seok
authors.initials: HS
authors.lastname: Kim
authors.forename: Robert H
authors.initials: RH
authors.lastname: Blick
mesh_terms: D005898:Glass / Q000737:chemistry* / Q000528:radiation effects*; D054018:Lasers, Excimer; D008420:Manufactured Materials; D008422:Materials Testing; D008567:Membranes, Artificial; D053758:Nanoparticles / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D016062:Porosity
chemical_list: D008567:Membranes, Artificial