title: White-light interference microscopy: a way to obtain high lateral resolution over an extended range of heights.
abstract: A problem with conventional techniques of interference microscopy, when profiling surfaces with an extended range of heights, is that only points on a single plane are in sharp focus. Other points, which are higher or lower, may be out of focus, with a consequent loss of lateral resolution. We show that white-light interference microscopy, with an achromatic phase-shifter, makes it possible to produce a three-dimensional representation of such surfaces with high lateral resolution over the entire range of heights.
authors.forename: Maitreyee
authors.initials: M
authors.lastname: Roy
authors.forename: Colin J R
authors.initials: CJ
authors.lastname: Sheppard
authors.forename: Guy
authors.initials: G
authors.lastname: Cox
authors.forename: Parameswaran
authors.initials: P
authors.lastname: Hariharan