Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry.
We describe a method of absolute xyz-coordinates measurement based on the two-point diffraction interferometer. In this paper we use a new optimization algorithm to the interferometer. Experimental results show that the systematic error of the interferometer is less than 1 mum (peak-to- valley value) within a 60 mm by 60 mm by 20 mm working volume. To extract the systematic error and verify the absolute performance of the interferometer we applied the Fourier self-calibration concept.
Rhee
Hyug-Gyo
HG
Space Optics Research Center, Korea Research Institute of Standards and Science, 1 Doryong-dong, Yuseong-gu, Daejeon 305-340, Ref. of Korea. hrhee@kriss.re.kr
Chu
Jiyoung
J
Lee
Yun-Woo
YW