High reflectivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in AlGaAs/GaAs.
We present a novel air-bridge subwavelength grating reflector with very high reflectivity to be used as a top mirror in a VCSEL structure. We explain the design method, model the structure using both RCWA and FDTD, and predict the characteristics of a Fabry-Perot structure built with this reflector. We describe the fabrication of the suspended grating.
Bisaillon
Eric
E
Tan
Dawn
D
Faraji
Behnam
B
Kirk
Andrew
A
Chrowstowski
Lukas
L
Plant
David V
DV