Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser.
We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.
Wachulak
P W
PW
Bartels
R A
RA
Marconi
M C
MC
Menoni
C S
CS
Rocca
J J
JJ
Lu
Y
Y
Parkinson
B
B