title: Active, LCoS based laser interferometer for microelements studies.
abstract: The modification of classical Twyman-Green interferometer by implementation of Liquid Crystal on Silicon (LCoS) spatial light modulator as the reference mirror allows introducing arbitrary phase in the reference wavefront. This special capability is applied to facilitate the measurements of shape and deformation of active microelements and extend the range of such measurement. This can be realized by introducing linear or circular spatial carrier frequency into interferogram or by compensating object wavefront deformation. Moreover LCoS display can be used as an accurate phase shifter if the proper calibration is introduced. The analysis of sources of measurement errors introduced by LCoS display is presented and the ways of their elimination are discussed. The possible application of LCoS based laser interferometer for initial microelement shape determination and transient deformation monitoring as well as active reference phase modification are shown and experimentally confirmed during silicon micromembranes studies.
authors.forename: Jacek
authors.initials: J
authors.lastname: Kacperski
authors.forename: Malgorzata
authors.initials: M
authors.lastname: Kujawinska