Photopatternable Polymeric Membranes for Optical Oxygen Sensors.
A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethyl-siloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.
Ambekar
Raghu
R
Missouri University of Science and Technology (formerly University of Missouri-Rolla), MO 65409 USA. He is now with the Department of Electrical and Computer Engineering, University of Illinois, Urbana-Champaign, Urbana, IL 61801 USA (e-mail: ambekar1@uiuc.edu ).
Park
Jongwon
J
Henthorn
David B
DB
Kim
Chang-Soo
CS