Optical monitoring and real time admittance loci calculation through polarization interferometer.
A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.
Lee
Cheng-Chung
CC
Department of Optics and Photonics/Thin Film Technology Center, National Central University, 320, Taiwan. cclee@dop.ncu.edu.tw
Wu
Kai
K
Chen
Sheng-Hui
SH
Ma
Sheng-Ju
SJ
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008027:Light; D008422:Materials Testing / Q000379:methods*; D008567:Membranes, Artificial; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012542:Scattering, Radiation; D012680:Sensitivity and Specificity
D008567:Membranes, Artificial