Selective metallization on insulator surfaces with femtosecond laser pulses.
We report selective metallization on surfaces of insulators (glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. The process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. We discuss the mechanism of selective metallization on the insulators. Moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices.
Xu
Jian
J
Liao
Yang
Y
Zeng
Huidan
H
Zhou
Zenghui
Z
Sun
Haiyi
H
Song
Juan
J
Wang
Xinshun
X
Cheng
Ya
Y
Xu
Zhizhan
Z
Sugioka
Koji
K
Midorikawa
Katsumi
K