title: High-Q cavities in multilayer photonic crystal slabs.
abstract: We propose a novel concept for creating high-Q cavities in photonic crystal slabs (PCS). These cavities are formed by depositing a polymer layer on top of a photonic crystal membrane fabricated in a high index semiconductor slab. We show that such multilayer structures exhibit a mode-gap and can yield high-Q microcavities with quality factors of Q approximately 106. This allows the cavity to be created by polymer processing, following the much more demanding semiconductor processing that is used to generate a uniform PCS. Depending on the polymer used, these structures can be additionally tuned using photosensitivity or the electro-optic effect.
authors: Snjezana
authors: S
authors: Tomljenovic-Hanic
authors: C M
authors: CM
authors: de Sterke
authors: M J
authors: MJ
authors: Steel
authors: Benjamin J
authors: BJ
authors: Eggleton
authors: Yoshinori
authors: Y
authors: Tanaka
authors: Susumu
authors: S
authors: Noda