Fabrication and characterization of microlens arrays using a cantilever-based spotter.
We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130mum] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181mum] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14.
Bardinal
V
V
Daran
E
E
Leïchlé
T
T
Vergnenègre
C
C
Levallois
C
C
Camps
T
T
Conedera
V
V
Doucet
J B
JB
Carcenac
F
F
Ottevaere
H
H
Thienpont
H
H