Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning.
Three dimensional images were obtained using a single high numerical aperture hologram recorded in a high resolution photoresist with a table top lambda = 46.9 nm laser. Gabor holograms were numerically reconstructed over a range of image planes by sweeping the propagation distance in the numerical reconstruction algorithm, allowing numerical optical sectioning. A robust three dimension image of a test object was obtained with numerical optical sectioning, providing a longitudinal resolution of approximately 2 mum and a lateral resolution of 164 nm.
Wachulak
P W
PW
Marconi
M C
MC
Bartels
R A
RA
Menoni
C S
CS
Rocca
J J
JJ