title: Fabrication and characterization of microlens arrays using a cantilever-based spotter.
abstract: We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130mum] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181mum] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14.
authors: V
authors: V
authors: Bardinal
authors: E
authors: E
authors: Daran
authors: T
authors: T
authors: Leïchlé
authors: C
authors: C
authors: Vergnenègre
authors: C
authors: C
authors: Levallois
authors: T
authors: T
authors: Camps
authors: V
authors: V
authors: Conedera
authors: J B
authors: JB
authors: Doucet
authors: F
authors: F
authors: Carcenac
authors: H
authors: H
authors: Ottevaere
authors: H
authors: H
authors: Thienpont