The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings.
We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.
Xia
Qiangfei
Q
Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA.
Chou
Stephen Y
SY
D006046:Gold / Q000737:chemistry; D053768:Metal Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*
D006046:Gold