title: Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness.
abstract: We show that the optical properties of thin metallic films depend on the thickness of the film as well as on the deposition technique. Several thicknesses of electron-beam-gun-evaporated aluminium films were measured and the refractive index and the extinction coefficient defined using ellipsometry. In addition, the refractive indexes and the extinction coefficients of atomic-layer-deposited iridium were compared with those of evaporated iridium samples.
authors: Anni
authors: A
authors: Lehmuskero
authors: Markku
authors: M
authors: Kuittinen
authors: Pasi
authors: P
authors: Vahimaa