STEM imaging of 47-pm-separated atomic columns by a spherical aberration-corrected electron microscope with a 300-kV cold field emission gun.
A spherical aberration-corrected electron microscope has been developed recently, which is equipped with a 300-kV cold field emission gun and an objective lens of a small chromatic aberration coefficient. A dumbbell image of 47 pm spacing, corresponding to a pair of atomic columns of germanium aligned along the [114] direction, is resolved in high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) with a 0.4-eV energy spread of the electron beam. The observed image was compared with a simulated image obtained by dynamical calculation.
Sawada
Hidetaka
H
Japan Science and Technology Agency, CREST, 5 Sanbancho, Chiyoda-ku, Tokyo, Japan. hsawada@jeol.co.jp
Tanishiro
Yasumasa
Y
Ohashi
Nobuhiro
N
Tomita
Takeshi
T
Hosokawa
Fumio
F
Kaneyama
Toshikatsu
T
Kondo
Yukihito
Y
Takayanagi
Kunio
K
D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods*