13.5 nm EUV generation from tin-doped droplets using a fiber laser.
A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported.With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8 x 10(10) W/cm(2). This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured.
George
Simi A
SA
Hou
Kai-Chung
KC
Takenoshita
Kazutoshi
K
Galvanauskas
Almantas
A
Richardson
Martin C
MC