title: Suppression of aliasing in multi-sensor scanning absolute profile measurement.
abstract: The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 microm(-1)) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 microm.
authors: Physikalisch-Technische Bundesanstalt, Braunschweig, Germany. axel.wiegmann@ptb.de
authors: Axel
authors: A
authors: Wiegmann
authors: Michael
authors: M
authors: Schulz
authors: Clemens
authors: C
authors: Elster
mesh_terms: D000465:Algorithms; D003198:Computer Simulation; D007091:Image Processing, Computer-Assisted / Q000379:methods*; D007368:Interferometry / Q000379:methods*; D015233:Models, Statistical; D055095:Optics and Photonics; D012031:Refractometry / Q000295:instrumentation; D017356:Synchrotrons