Horizontal single and multiple slot waveguides: optical transmission at lambda = 1550 nm.
We experimentally demonstrate the optical transmission at 1550 nm of the fundamental slot modes (quasi-TM modes) in horizontal single and multiple slot waveguides and ring resonators consisting of deposited amorphous silicon and silicon dioxide. We demonstrate that the horizontal multiple slot configuration provides enhanced optical confinement in low index slot regions compared to a horizontal single slot structure with the same total SiO2 layer thickness by comparing their thermo-optic coefficients for the horizontal slot ring resonators. We show in these early structures that horizontal slot waveguides have low propagation loss of 6 approximately 7 dB/cm. The waveguide loss is mainly due to a-Si material absorption. The addition of a-Si/SiO(2) interfaces does not introduce significant scattering loss in a horizontal multiple slot waveguide compared to a horizontal single slot waveguide.
Sun
Rong
R
Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA. rsun@mit.edu
Dong
Po
P
Feng
Ning-ning
NN
Hong
Ching-yin
CY
Michel
Jurgen
J
Lipson
Michal
M
Kimerling
Lionel
L
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012822:Silicon Dioxide / Q000737:chemistry*; D013499:Surface Properties
D012822:Silicon Dioxide