Nondispersive optical phase shifter array using microelectromechanical systems based gratings.
We present a broadband nondispersive optical phase shifter array based on microelectromechanical systems (MEMS) technology. The device consists of an array of micro-grating elements. Each grating element utilizes an in-plane translational motion to produce a phase shift to the diffracted light beam. The phase shift is dependent only on the ratio of the grating displacement to its period, and thus independent of incident wavelength. The proposed operation principle was demonstrated with a prototype device developed using a silicon-on-insulator (SOI) micromachining process. This MEMS nondispersive phase-shifter array may be useful in many multispectral applications including broadband optical phased arrays.
Zhou
Guangya
G
Chau
Fook Siong
FS