Deposition of tungsten nanogratings induced by a single femtosecond laser beam.
Tungsten nanogratings with sub-100nm linewidths and subwavelength periods are fabricated by laser-induced chemical vapor deposition using a single 400 nm femtosecond pulsed laser beam without any beam shaping. Combining advantages of parallel and direct-write processing, this method can produce various nanograting structures on a wide range of substrates in a single step.
Zhang
Haitao
H
Center for Optoelectronics and Optical Communications, The University of North Carolina at Charlotte, 9201 University City Boulevard, Charlotte NC 28223, USA.
Tang
Mingzhen
M
McCoy
Jerry
J
Her
Tsing-Hua
TH