title: 13.5 nm EUV generation from tin-doped droplets using a fiber laser.
abstract: A comprehensive study of the spectral and Mo-Si mirror inband EUV emission from tin-doped droplet laser plasma targets irradiated with a single 1064 nm beam from an Yb:doped fiber laser is reported.With pre-pulse enhancement, in-band conversion efficiency of approximately 2.1% is measured for laser irradiance intensities near 8 x 10(10) W/cm(2). This is the first study to be reported that uses a high-power, high repetition rate fiber laser with the high repetition rate droplet targets where EUV generation from plasmas is measured.
authors: Simi A
authors: SA
authors: George
authors: Kai-Chung
authors: KC
authors: Hou
authors: Kazutoshi
authors: K
authors: Takenoshita
authors: Almantas
authors: A
authors: Galvanauskas
authors: Martin C
authors: MC
authors: Richardson