Midinfrared absorption measured at a lambda/400 resolution with an atomic force microscope.
Midinfrared absorption can be locally measured using a detection combining an atomic force microscope and a pulsed excitation. This is illustrated for the midinfrared bulk GaAs phonon absorption and for the midinfrared absorption of thin SiO(2) microdisks. We show that the signal given by the cantilever oscillation amplitude of the atomic force microscope follows the spectral dependence of the bulk material absorption. The absorption spatial resolution achieved with microdisks is around 50 nanometer for an optical excitation around 22 micrometer wavelength.
Houel
Julien
J
Institut d'Electronique Fondamentale, CNRS-University Paris-Sud, Orsay, France.
Homeyer
Estelle
E
Sauvage
Sébastien
S
Boucaud
Philippe
P
Dazzi
Alexandre
A
Prazeres
Rui
R
Ortéga
Jean-Michel
JM
D000042:Absorption; D000162:Acoustics; D004867:Equipment Design; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods*; D009991:Oscillometry / Q000379:methods; D012666:Semiconductors; D012822:Silicon Dioxide / Q000737:chemistry; D013055:Spectrophotometry, Infrared / Q000379:methods*; D013499:Surface Properties
D012822:Silicon Dioxide