title: Research on three dimensional machining effects using atomic force microscope.
abstract: This research studies the use of scanning probe microscope as the tool to manufacture three dimensional nanoscale objects. We modified a commercial atomic force microscope (AFM) and replaced the original probe control system with a personal computer (PC) based controller. The modified system used the scanning probe in the AFM for the cutting tool and used the PC controller to control work piece. With the new controller, one could implement multiaxes motion control to perform trajectory planning and to test various cutting strategies. The experiments discovered that the debris can coalesce with the sample material and cause tremendous problem in the nanomachining process. This research thus proposed to make use of this material and developed a piling algorithm to not only cut but also pile up the debris in a favorable way for steric shaping. The experimental results showed that the proposed cutting and shaping algorithm can produce nano-objects as high as a few hundred nanometers. The probe tip typically wears down to around 500 microm diameter after the machining process, putting a limit on the machining resolution. The vertical resolution can achieve less than 10 nm without controlled environment.
authors: Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.
authors: Yao-Ting
authors: YT
authors: Mao
authors: Kai-Chen
authors: KC
authors: Kuo
authors: Ching-En
authors: CE
authors: Tseng
authors: Jian-Yin
authors: JY
authors: Huang
authors: Yi-Chih
authors: YC
authors: Lai
authors: Jia-Yush
authors: JY
authors: Yen
authors: Chih-Kung
authors: CK
authors: Lee
authors: Wei-Li
authors: WL
authors: Chuang