An alternative scattering method to characterize surface roughness from transparent substrates.
An alternative scattering method is developed to characterize surface roughness from the two faces of transparent substrates. Specific weights are attributed to each surface in the scattering process, due to the large substrate thickness. The resulting roughness spectra are shown to quasi-overlap those of near field microscopy.
Zerrad
M
M
Deumié
C
C
Lequime
M
M
Amra
C
C