title: Surface acoustic wave properties of (100) AlN films on diamond with different IDT positions.
abstract: (100) AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100) AlN/diamond, (100) AlN/IDT/diamond, IDT/(100) AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.
authors: Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan, ROC.
authors: Zhi-Xun
authors: ZX
authors: Lin
authors: Sean
authors: S
authors: Wu
authors: Ruyen
authors: R
authors: Ro
authors: Maw-Shung
authors: MS
authors: Lee
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D017607:Aluminum Compounds / Q000737:chemistry*; D017076:Computer-Aided Design; D018130:Diamond / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D015203:Reproducibility of Results; D012542:Scattering, Radiation; D012680:Sensitivity and Specificity; D014159:Transducers
chemical_list: D017607:Aluminum Compounds; D018130:Diamond; C052045:aluminum nitride