High confinement micron-scale silicon nitride high Q ring resonator.
We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3*10(6) operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.
Gondarenko
Alexander
A
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA. aag42@cornell.edu
Levy
Jacob S
JS
Lipson
Michal
M