title: Optical characterization of adaptive fluidic silicone-membrane lenses.
abstract: We present an extended optical characterization of an adaptive microfluidic silicone-membrane lens at a wavelength of 633 nm, respectively 660 nm. Two different membrane variations; one with a homogeneous membrane thickness, and one with a shaped cross section, have been realized. This paper includes the theoretical predictions of the optical performance via FEM simulation and ray tracing, and a subsequent orientation dependent experimental analysis of the lens quality which is measured with an MTF setup and a Mach-Zehnder interferometer. The influence of the fabrication process on the optical performance is also characterized by the membrane deformation in the non-deflected state. The lens with the homogeneous membrane of 5 mm in diameter and an aperture of 2.5 mm indicates an almost orientation independent image quality of 117 linepairs/mm at a contrast of 50%. The shaped membrane lenses show a minimum wave front error of WFE(RMS) = 24 nm, and the lenses with a planar membrane of WFE(RMS) = 31 nm at an aperture of 2.125 mm.
authors: Department of Microsystems Engineering - IMTEK, Laboratory for Microactuators, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany. florian.schneider@imtek.uni-freiburg.de
authors: Florian
authors: F
authors: Schneider
authors: Jan
authors: J
authors: Draheim
authors: Robert
authors: R
authors: Kamberger
authors: Philipp
authors: P
authors: Waibel
authors: Ulrike
authors: U
authors: Wallrabe
mesh_terms: D003198:Computer Simulation; D004129:Dimethylpolysiloxanes / Q000737:chemistry; D004867:Equipment Design; D004864:Equipment and Supplies; D005898:Glass; D007909:Lenses; D008962:Models, Theoretical; D055095:Optics and Photonics; D010100:Oxygen / Q000737:chemistry; D012828:Silicones / Q000737:chemistry*
chemical_list: D004129:Dimethylpolysiloxanes; D012828:Silicones; C013830:baysilon; D010100:Oxygen