Transmission-grating-based wavefront tilt sensor.
We propose a new type of tilt sensor. It consists of a grating and an image sensor. It detects the tilt of the collimated wavefront reflected from a plane mirror. Its principle is described and analyzed based on wave optics. Experimental results show its validity. Simulations of the ordinary autocollimator and the proposed tilt sensor show that the effect of noise on the measured angle is smaller for the latter. These results show a possibility of making a smaller and simpler tilt sensor.
Iwata
Koichi
K
Technology Research Institute of Osaka Prefecture, Izumi, Osaka 594-1157, Japan. k-iwata@tri.pref.osaka.jp
Fukuda
Hiroki
H
Moriwaki
Kousuke
K