The fabrication of a carbon nanotube array using a catalyst-poisoning layer in the inverse nano-sphere lithography method.
A new method for the fabrication of periodic CNT arrays was developed in this study, which involves the use of the inverse nano-sphere lithography (INSL) process. Mo of a honeycomb pattern, acting as a catalyst-poisoning layer, was produced by the nano-sphere lithography (NSL) process; the Mo poisoned the catalyst and prevented CNT growth where deposited, and as a result, a periodic CNT pattern was obtained. Using this method, the uniformity of the CNT array can be improved by preventing the negative effect of arrangement defects in self-assembled monolayers. The size and the period of the CNT array can be adjusted by careful selection of the polystyrene (PS) sphere diameter. X-ray photoelectron spectroscope (XPS) analysis revealed that the Co catalyst was ineffective on the areas of Mo deposition due to the diffusion of Co into the Mo layer.
Tsai
Tsung-Yen
TY
Department of Materials Science and Engineering, National Tsing Hua University, 101, Section 2, Kuang-Fu Road, Hsinchu, 30013, Taiwan, Republic of China.
Chen
Tsung-Han
TH
Tai
Nyan-Hwa
NH
Chang
Shih-Chin
SC
Hsu
Hui-Chen
HC
Palathinkal
Thomas Joseph
TJ
D002384:Catalysis; D003035:Cobalt / Q000737:chemistry; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D008982:Molybdenum / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry*; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry
D037742:Nanotubes, Carbon; D003035:Cobalt; D008982:Molybdenum; D014025:Titanium