Surface acoustic wave properties of (100) AlN films on diamond with different IDT positions.
(100) AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100) AlN/diamond, (100) AlN/IDT/diamond, IDT/(100) AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.
Lin
Zhi-Xun
ZX
Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan, ROC.
Wu
Sean
S
Ro
Ruyen
R
Lee
Maw-Shung
MS
D000162:Acoustics / Q000295:instrumentation*; D017607:Aluminum Compounds / Q000737:chemistry*; D017076:Computer-Aided Design; D018130:Diamond / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D015203:Reproducibility of Results; D012542:Scattering, Radiation; D012680:Sensitivity and Specificity; D014159:Transducers
D017607:Aluminum Compounds; D018130:Diamond; C052045:aluminum nitride