title: Cold plasma functionalized TeraHertz BioMEMS for enzyme reaction analysis.
abstract: In this paper, we describe the development, functionalization and functionality testing of a TeraHertz (THz) Bio-MicroElectroMechanical System (BioMEMS) dedicated to enzyme reaction analysis. The microdevice was fabricated by mixing clean room microfabrication with cold plasma deposition. The first is used to build the microfluidic circuits and the THz sensor, while the later serves for the polymerization of allylamine using a homemade glow discharge plasma reactor for a subsequent immobilization of enzymatic biocatalysts. Thermal stability of the deposited plasma polymer has been investigated by infrared spectroscopy. Fluorescent detection confirmed the efficiency of the immobilization and the enzyme hydrolysis into the BioMEMS microchannels. For the first time, the progression of the hydrolysis reaction over time was monitored by the THz sensor connected to a vectorial network analyzer. Preliminary results showed that sub-THz transmission measurements are able to discriminate different solid films, various aqueous media and exhibit specific transmission behavior for the enzyme hydrolysis reaction in the spectral range 0.06-0.11 THz.
authors.affiliation: Institute of Electronics, Microelectronics and Nanotechnology (UMR-CNRS 8520), University of Lille1, F59655 Villeneuve d'Ascq, France.
authors.forename: Abdennour
authors.initials: A
authors.lastname: Abbas
authors.forename: Anthony
authors.initials: A
authors.lastname: Treizebre
authors.forename: Philippe
authors.initials: P
authors.lastname: Supiot
authors.forename: Nour-Eddine
authors.initials: NE
authors.lastname: Bourzgui
authors.forename: Didier
authors.initials: D
authors.lastname: Guillochon
authors.forename: Dominique
authors.initials: D
authors.lastname: Vercaigne-Marko
authors.forename: Bertrand
authors.initials: B
authors.lastname: Bocquet
mesh_terms: D000499:Allylamine / Q000737:chemistry; D000818:Animals; D002417:Cattle; D004800:Enzymes, Immobilized / Q000737:chemistry / Q000378:metabolism*; D004867:Equipment Design; D006868:Hydrolysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation* / Q000379:methods; D055616:Microtechnology / Q000379:methods*; D014357:Trypsin / Q000737:chemistry / Q000378:metabolism
chemical_list: D004800:Enzymes, Immobilized; D000499:Allylamine; D014357:Trypsin