title: Nano-fabrication with metallic glass-an exotic material for nano-electromechanical systems.
abstract: Completely glassy thin films of Zr-Al-Cu-Ni exhibiting a large supercooled liquid region (DeltaT(x) = 95 K), very smooth surface (R(a) = 0.2 nm) and high value of Vickers hardness (H(v) = 940) were deposited by sputtering. The micro/nano-patterning ability of these films is demonstrated by focused ion beam etching (smallest pattern approximately 12 nm), as well as by the imprint lithography technique (smallest feature approximately 34 nm). These glassy films having very good mechanical and chemical properties, combined with superb nano-patterning ability, integrateable with silicon integrated circuit technology, are promising for fabrication of a wide range of two- or three-dimensional components for future nano-electromechanical systems.
authors.affiliation: Core Research for Evolutional Science and Technology, Japan Science and Technology Agency, Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan.
authors.forename: Parmanand
authors.initials: P
authors.lastname: Sharma
authors.forename: Neelam
authors.initials: N
authors.lastname: Kaushik
authors.forename: Hisamichi
authors.initials: H
authors.lastname: Kimura
authors.forename: Yasunori
authors.initials: Y
authors.lastname: Saotome
authors.forename: Akihisa
authors.initials: A
authors.lastname: Inoue