Fast three-dimensional nanoscale metrology in dual-beam FIB-SEM instrumentation.
A quantitative surface reconstruction technique has been developed for the geometric characterization of three-dimensional structures by using a combined focused ion beam-scanning electron microscopy (FIB-SEM) instrument. A regular pattern of lines is milled at normal incidence on the sample to be characterized and an image is acquired at a large tilt angle. By analyzing the pattern under the tilted view, a quantitative estimation of surface heights is obtained. The technique has been applied to a test sample and nanoscale resolution has been achieved. The reported results are validated by a comparison with atomic force microscopy measurements.
Repetto
Luca
L
Nanomed Labs-Centro Biotecnologie Avanzate and Physics Department, Università di Genova, Via Dodecaneso 33, 16146 Genova, Italy. luca.repetto@unige.it
Buzio
Renato
R
Denurchis
Carlo
C
Firpo
Giuseppe
G
Piano
Emanuele
E
Valbusa
Ugo
U
D006225:Hand; D006801:Humans; D021621:Imaging, Three-Dimensional / Q000379:methods*; D007477:Ions; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods; D008953:Models, Anatomic; D049329:Nanostructures / Q000648:ultrastructure*; D036103:Nanotechnology; D012828:Silicones
D007477:Ions; D012828:Silicones