The novel synchronous ion shield mass analyzer.
The novel synchronous ion shield (SIS) mass analyzer enables the fabrication of a mass spectrometer on a chip. It is specially developed to account for fabrication restrictions in micro-electro-mechanical systems (MEMS) technology. This technology allows to fabricate 100 mass spectrometer chips (7.10 mm(2)) simultaneously on a substrate of 100 mm diameter. Descriptive insights of the SIS mass analyzer with its surrounding ion optics and energy filter are presented. Simulation results and experiments prove the concept and show the performance of the device.
Hauschild
J-P
JP
Hamburg University of Technology, Institute of Microsystems Technology, Eissendorfer Strasse 42, 21073 Hamburg, Germany. jp.hauschild@tu-harburg.de
Wapelhorst
E
E
Müller
J
J