title: Development of a local vacuum system for focused ion beam machining.
abstract: A local vacuum system for focused ion beam (FIB) processing, with a workpiece set in the air, has been developed. The local vacuum apparatus had a double-wall cylinder structure, used a differential exhaust, and each cylinder was connected to a vacuum exhaust pump. When the gap between the workpiece and the apparatus was 10 microm, the pressure of beam line in the machining head achieved 2.1 x 10(-3) Pa. In addition, a visualization system was developed by visualizing the current flow out from a sample by FIB irradiation. With this system, it is possible to conduct focus adjustments of the FIB and shape recognition on a workpiece in the order of microns.
authors: Hiraide Precision Co., Ltd., 1680-1, Imai, Okaya, Nagano 394-0001, Japan. masuzawa@hiraide.co.jp
authors: Tsuneaki
authors: T
authors: Masuzawa
authors: Yoshikazu
authors: Y
authors: Yoshida
authors: Hiromichi
authors: H
authors: Ikeda
authors: Keigo
authors: K
authors: Oguchi
authors: Hikaru
authors: H
authors: Yamagishi
authors: Yuji
authors: Y
authors: Wakabayashi
mesh_terms: D018613:Microscopy, Confocal; D055616:Microtechnology / Q000295:instrumentation*; D011312:Pressure; D013997:Time Factors; D014618:Vacuum