title: Computation lithography: virtual reality and virtual virtuality.
abstract: Computation lithography is enabled by a combination of physical understanding, mathematical abstraction, and implementation simplification. An application in the virtual world of computation lithography can be a virtual reality or a virtual virtuality depending on its engineering sensibleness and technical feasibility. Examples under consideration include design-for-manufacturability and inverse lithography.
authors: Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong. elam@eee.hku.hk
authors: Edmund Y
authors: EY
authors: Lam
authors: Alfred K
authors: AK
authors: Wong
mesh_terms: D000465:Algorithms; D003198:Computer Simulation; D004867:Equipment Design; D015233:Models, Statistical; D008962:Models, Theoretical; D055095:Optics and Photonics; D010825:Physics / Q000379:methods