Size dependence of microscopic Hall sensor detection limits.
In this paper the magnetic field detection limits of microscopic Hall sensors are investigated as a function of their lateral size. Hall sensors fabricated from GaAs/AlGaAs heterostructures and silicon are experimentally investigated at different temperatures using Hall effect and noise spectrum measurements. At room temperature a clear size dependence of the detection limit is observed, whereas at low temperatures this dependence is found to disappear. The results are explained using the theory of noise in semiconductors.
Vervaeke
K
K
Interuniversity Microelectronics Center (IMEC vzw), Kapeldreef 75, Leuven B-3001, Belgium.
Simoen
E
E
Borghs
G
G
Moshchalkov
V V
VV