Exploring microdischarges for portable sensing applications.
This paper describes the use of microdischarges as transducing elements in sensors and detectors. Chemical and physical sensing of gases, chemical sensing of liquids, and radiation detection are described. These applications are explored from the perspective of their use in portable microsystems, with emphasis on compactness, power consumption, the ability to operate at or near atmospheric pressure (to reduce pumping challenges), and the ability to operate in an air ambient (to reduce the need for reservoirs of carrier gases). Manufacturing methods and performance results are described for selected examples.
Gianchandani
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Center for Wireless Integrated Microsystems, University of Michigan, EECS Building, 1301 Beal Ave, Ann Arbor, MI 48109-2122, USA. yogesh@umich.edu
Wright
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Eun
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Wilson
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Mitra
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