The second order diffraction efficiency measurements in the vacuum ultraviolet.
A simple method for measuring the second order diffraction efficiency in the vacuum ultraviolet (VUV) is described. Spectral reflectance of a mirror will be influenced by the second diffraction order, measured in a spectrophotometer system without filters. The second order diffraction efficiency can be calculated from the different spectral reflectance values. A deuterium lamp and a scintillated photomultiplier are used in the measurement system. The second order diffraction efficiency can be determined from 120 nm to 165 nm. The result of 0.00579+/-11.9% is obtained at 161 nm.
Qu
Yi
Y
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. quyi972@sohu.com
Wang
Shurong
S
Zhang
Zhenduo
Z
Li
Futian
F