title: TEM sample preparation by FIB for carbon nanotube interconnects.
abstract: A powerful method to study carbon nanotubes (CNTs) grown in patterned substrates for potential interconnects applications is transmission electron microscopy (TEM). However, high-quality TEM samples are necessary for such a study. Here, TEM specimen preparation by focused ion beam (FIB) has been used to obtain lamellae of patterned samples containing CNTs grown inside contact holes. A dual-cap Pt protection layer and an extensive 5 kV cleaning procedure are applied in order to preserve the CNTs and avoid deterioration during milling. TEM results show that the inner shell structure of the carbon nanotubes has been preserved, which proves that focused ion beam is a useful technique to prepare TEM samples of CNT interconnects.
authors: EMAT, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium. xiaoxing.ke@ua.ac.be
authors: Xiaoxing
authors: X
authors: Ke
authors: Sara
authors: S
authors: Bals
authors: Ainhoa
authors: A
authors: Romo Negreira
authors: Thomas
authors: T
authors: Hantschel
authors: Hugo
authors: H
authors: Bender
authors: Gustaaf
authors: G
authors: Van Tendeloo