Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides.
Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220 nm-height SOI waveguides is found to be around 350 nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/degrees C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15 microm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50 dB/cm after overlaying a polymer cladding.
Teng
Jie
J
Photonics Research Group, INTEC-department, Ghent University-IMEC, Ghent, B-9000, Belgium. jteng@intec.ugent.be
Dumon
Pieter
P
Bogaerts
Wim
W
Zhang
Hongbo
H
Jian
Xigao
X
Han
Xiuyou
X
Zhao
Mingshan
M
Morthier
Geert
G
Baets
Roel
R
D004867:Equipment Design; D005336:Fiber Optic Technology; D055100:Optical Fibers; D055095:Optics and Photonics; D011108:Polymers / Q000737:chemistry*; D012031:Refractometry; D012542:Scattering, Radiation; D012825:Silicon / Q000737:chemistry*; D013053:Spectrophotometry / Q000379:methods; D013499:Surface Properties; D013696:Temperature; D014466:Ultraviolet Rays
D011108:Polymers; D012825:Silicon