title: High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range.
abstract: High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
authors.affiliation: School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
authors.forename: Ehsan Shah
authors.initials: ES
authors.lastname: Hosseini
authors.forename: Siva
authors.initials: S
authors.lastname: Yegnanarayanan
authors.forename: Amir Hossein
authors.initials: AH
authors.lastname: Atabaki
authors.forename: Mohammad
authors.initials: M
authors.lastname: Soltani
authors.forename: Ali
authors.initials: A
authors.lastname: Adibi