Tunable ArF excimer-laser source.
A tunable ArF* (193-nm) excimer source is described that produces over 125 mJ/pulse (peak) at 10 pulses/sec. This device has a spectral width of less than 2 cm(-1) and a demonstrated tunability of nearly 320 cm(-1) from 192.8 to 193.9 nm. Tunability, bandwidth, and mode control are achieved by injecting the fourth anti-Stokes line (in H(2)) of a frequency-doubled dye laser into an ArF* excimer-amplifier system.
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Bokor
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Freeman
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Henderson
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