Error analysis and regression mode of the V-grooved sample in the atomic force microscope simulation measurement mode by the molecular mechanics.
Based on the molecular mechanics, this study uses the two-body potential energy function to construct a trapezoidal cantilever nano-scale simulation measurement model of contact mode atomic force microscopy (AFM) under the constant force mode to simulate the measurement the nano-scale V-grooved standard sample. We investigate the error of offset distance of the cross-section profile when using the probes with different trapezoidal cantilever probe tip radii (9.5, 8.5, and 7.5 A) to scan the peak of the V-grooved standard sample being reduced to one-tenth (1/10) of its size, and use the offset error to inversely find out the regression equation. We analyze how the tip apex as well as the profile of the tip edge oblique angle and the oblique edge angle affects the offset distance. Furthermore, a probe with a larger radius of 9.5 nm is used to simulate and measure the offset error of scan curve, and acquire the regression equation. By the conversion proportion coefficient of size (omega), and revising the size-reduced regression equation during the small size scale, a revised regression equation of a larger size scale can be acquired. The error is then reduced, further enhancing the accuracy of the AFM scanning and measurement.
Lin
Zone-Ching
ZC
Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan. zclin@mail.ntust.edu.tw
Huang
Jen-Ching
JC
Yeh
Chun-Hui
CH