title: A hybrid chip based on aerodynamics and electrostatics for the size-dependent classification of ultrafine and nano particles.
abstract: Conventional virtual impactors experience a large pressure drop when they classify particles according to size, in particular ultrafine particles smaller than 100 nm in diameter. Therefore, most virtual impactors have been used to classify particles larger than 100 nm. Their cut-off diameters are also fixed by the geometry of their flow channels. In the proposed virtual impactor, particles smaller than 100 nm are accelerated by applying DC potentials to an integrated electrode pair. By the electrical acceleration, the large pressure drop could be significantly decreased and new cut-off diameters smaller than 100 nm could be successfully added. The geometric cut-off diameter (GCD) of the proposed virtual impactor was designed to be 1.0 microm. Performances including the GCD and wall loss were examined by classifying dioctyl sebacate of 100 to 600 nm in size and carbon particles of 0.6 to 10 microm in size. The GCD was measured to be 0.95 microm, and the wall loss was highest at 1.1 microm. To add new cut-off diameters, monodisperse NaCl particles ranging from 15 to 70 nm were classified using the proposed virtual impactor with applying a DC potential of 0.25 to 3.0 kV. In this range of the potential, the new cut-off diameters ranging from 15 to 35 nm was added.
authors.affiliation: Pattern Technology Group 1, System LSI Division, Samsung Electronics Co., Ltd., 24 Nongseo-dong, Giheung-gu, Yongsan-city, Gyeonggi-do 446-711, Republic of Korea.
authors.forename: Yong-Ho
authors.initials: YH
authors.lastname: Kim
authors.forename: Dongho
authors.initials: D
authors.lastname: Park
authors.forename: Jungho
authors.initials: J
authors.lastname: Hwang
authors.forename: Yong-Jun
authors.initials: YJ
authors.lastname: Kim
mesh_terms: D000465:Algorithms; D004784:Environmental Monitoring / Q000379:methods; D004867:Equipment Design; D008839:Microelectrodes; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D053758:Nanoparticles / Q000145:classification*; D010316:Particle Size; D052638:Particulate Matter
chemical_list: D052638:Particulate Matter