High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range.
High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
Hosseini
Ehsan Shah
ES
School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
Yegnanarayanan
Siva
S
Atabaki
Amir Hossein
AH
Soltani
Mohammad
M
Adibi
Ali
A