Measuring microvibrations by heterodyne speckle interferometry.
In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real time. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35microm.
Dändliker
R
R
Willemin
J F
JF