title: Tunable ArF excimer-laser source.
abstract: A tunable ArF* (193-nm) excimer source is described that produces over 125 mJ/pulse (peak) at 10 pulses/sec. This device has a spectral width of less than 2 cm(-1) and a demonstrated tunability of nearly 320 cm(-1) from 192.8 to 193.9 nm. Tunability, bandwidth, and mode control are achieved by injecting the fourth anti-Stokes line (in H(2)) of a frequency-doubled dye laser into an ArF* excimer-amplifier system.
authors.forename: J C
authors.initials: JC
authors.lastname: White
authors.forename: J
authors.initials: J
authors.lastname: Bokor
authors.forename: R R
authors.initials: RR
authors.lastname: Freeman
authors.forename: D
authors.initials: D
authors.lastname: Henderson