title: Measuring microvibrations by heterodyne speckle interferometry.
abstract: In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real time. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35microm.
authors.forename: R
authors.initials: R
authors.lastname: Dändliker
authors.forename: J F
authors.initials: JF
authors.lastname: Willemin