Integrated grating circuit for guided-beam multiple division fabricated by electron-beam direct writing.
An integrated grating circuit (IGC) for guided-beam multiple division was fabricated in an As2S3 film waveguide by the electron-beam direct-writing technique, and excellent optical performance was demonstrated. The circuit was composed of one chirped and three uniform-period gratings, each precisely arrayed to satisfy the Bragg condition. An incident IR guided beam (lambda = 1.153 microm) was successfully divided into multiple beams by an IGC of 1.0 X 3.0 mm. Design, fabrication technique, and optical performance of the IGC for guided-beam multiple division are discussed.
Handa
Y
Y
Department of Electronics, Faculty of Engineering, Osaka University, Yamada-kami, Suita, Osaka, 565 Japan.
Suhara
T
T
Nishihara
H
H
Koyama
J
J