title: Ferroelectric thin-film capacitors and piezoelectric switches for mobile communication applications.
abstract: Thin-film ferroelectric capacitors have been integrated with resistors and active functions such as ESD protection into small, miniaturized modules, which enable a board space saving of up to 80%. With the optimum materials and processes, integrated capacitors with capacitance densities of up to 100 nF/mm2 for stacked capacitors combined with breakdown voltages of 90 V have been achieved. The integration of these high-density capacitors with extremely high breakdown voltage is a major accomplishment in the world of passive components and has not yet been reported for any other passive integration technology. Furthermore, thin-film tunable capacitors based on barium strontium titanate with high tuning range and high quality factor at 1 GHz have been demonstrated. Finally, piezoelectric thin films for piezoelectric switches with high switching speed have been realized.
authors.affiliation: Philips Research, Eindhoven, The Netherlands. mareike.klee@philips.com
authors.forename: Mareike
authors.initials: M
authors.lastname: Klee
authors.forename: Harry
authors.initials: H
authors.lastname: van Esch
authors.forename: Wilco
authors.initials: W
authors.lastname: Keur
authors.forename: Biju
authors.initials: B
authors.lastname: Kumar
authors.forename: Linda
authors.initials: L
authors.lastname: van Leuken-Peters
authors.forename: Jin
authors.initials: J
authors.lastname: Liu
authors.forename: Rüdiger
authors.initials: R
authors.lastname: Mauczok
authors.forename: Kai
authors.initials: K
authors.lastname: Neumann
authors.forename: Klaus
authors.initials: K
authors.lastname: Reimann
authors.forename: Christel
authors.initials: C
authors.lastname: Renders
authors.forename: Aarnoud L
authors.initials: AL
authors.lastname: Roest
authors.forename: Mark P J
authors.initials: MP
authors.lastname: Tiggelman
authors.forename: Marco
authors.initials: M
authors.lastname: de Wild
authors.forename: Olaf
authors.initials: O
authors.lastname: Wunnicke
authors.forename: Jing
authors.initials: J
authors.lastname: Zhao