Ferroelectric thin-film capacitors and piezoelectric switches for mobile communication applications.
Thin-film ferroelectric capacitors have been integrated with resistors and active functions such as ESD protection into small, miniaturized modules, which enable a board space saving of up to 80%. With the optimum materials and processes, integrated capacitors with capacitance densities of up to 100 nF/mm2 for stacked capacitors combined with breakdown voltages of 90 V have been achieved. The integration of these high-density capacitors with extremely high breakdown voltage is a major accomplishment in the world of passive components and has not yet been reported for any other passive integration technology. Furthermore, thin-film tunable capacitors based on barium strontium titanate with high tuning range and high quality factor at 1 GHz have been demonstrated. Finally, piezoelectric thin films for piezoelectric switches with high switching speed have been realized.
Klee
Mareike
M
Philips Research, Eindhoven, The Netherlands. mareike.klee@philips.com
van Esch
Harry
H
Keur
Wilco
W
Kumar
Biju
B
van Leuken-Peters
Linda
L
Liu
Jin
J
Mauczok
Rüdiger
R
Neumann
Kai
K
Reimann
Klaus
K
Renders
Christel
C
Roest
Aarnoud L
AL
Tiggelman
Mark P J
MP
de Wild
Marco
M
Wunnicke
Olaf
O
Zhao
Jing
J