Evaluation on pore structures of organosilicate thin films by grazing incidence small-angle X-ray scattering.
Nanoporous thin films fabricated by both a core-shell-shaped organic-inorganic hybrid sphere (octa(2,4-dinitrophenyl)silsesquioxane, ODNPSQ) and a four-leg-numbered surfactant (polyoxyethylene sorbitan monolaurate, Tween-20) for porogens in a higher molecular weight precursor (polyphenylsilsesquioxane, PPSQ) were characterized, respectively, by grazing incidence small-angle X-ray scattering (GISAXS), and the measured 2D GISAXS profiles were analyzed quantitatively by using a GISAXS formula based on the distorted wave Born approximation (DWBA). The fitted 2D GISAXS data show that the PPSQ porous thin films imprinted with ODNPSQ porogen exhibit sphere-shaped closed pores with the average pore size within a range of 1.18-3.12 nm and pore size distribution widths about 3.0 nm when the porogen loadings increase from 10 to 40 wt % and those imprinted with Tween-20 porogen give out an average pore size of 1.07-1.29 nm and pore size distribution widths about 2.0 nm with the porogen loading varying from 5 to 30 wt %. The nanoporous dielectric thin films imprinted with ODNPSQ porogen show a reducing to the molecular aggregation of porogens and significant antiphase separation behavior in the cross-linked matrix.
Chen
Hong-Ji
HJ
Department of Material Science & Engineering, Jinan University, Guangzhou 510632, PR China. thjchen@jnu.edu.cn
Li
Sheng-Ying
SY
Liu
Xiao-Jun
XJ
Li
Rui-Peng
RP
Smilgies
Detlef-M
DM
Wu
Zhong-Hua
ZH
Li
Zhihong
Z
D008567:Membranes, Artificial; D049329:Nanostructures; D016062:Porosity; D053838:Scattering, Small Angle; D017640:Silicates / Q000737:chemistry*; D013499:Surface Properties; D014965:X-Rays
D008567:Membranes, Artificial; D017640:Silicates