title: Third-harmonic generation using an ultrahigh-spectral-brightness ArF source.
abstract: Tunable coherent radiation in the vicinity of 64 nm has been produced by third-harmonic generation of the output of an ultrahigh-spectral-brightness ArF*source in various simple gaseous media. The following performance parameters of the ArF* system are used: pulse energy, ~300 mJ; pulse duration, ~7 nsec; spectral width, <260 MHz; beam divergence, ~5microradx15microrad; and repetition rate up to 10 Hz. Third-harmonic generation with peak powers up to 30 W has been observed in an apparatus that eliminates photoabsorption of the third harmonic in the differential pumping stages.
authors.forename: H
authors.initials: H
authors.lastname: Pummer
authors.forename: T
authors.initials: T
authors.lastname: Srinivasan
authors.forename: H
authors.initials: H
authors.lastname: Egger
authors.forename: K
authors.initials: K
authors.lastname: Boyer
authors.forename: T S
authors.initials: TS
authors.lastname: Luk
authors.forename: C K
authors.initials: CK
authors.lastname: Rhodes