Pressure-dependent rate saturation in photodeposition from W(CO)(6).
We discuss the laser deposition rate of tungsten film, which saturates with increasing light intensity during photolysis of W(CO)(6) vapor. A new method for determining the absolute deposition rate is presented, and the results obtained are found to be quite close to those determined by the absorption method. We also present data showing how the deposition rate depends on other parameters.
Chiu
M S
MS
Tseng
Y G
YG
Ku
Y K
YK