title: Evaluation on pore structures of organosilicate thin films by grazing incidence small-angle X-ray scattering.
abstract: Nanoporous thin films fabricated by both a core-shell-shaped organic-inorganic hybrid sphere (octa(2,4-dinitrophenyl)silsesquioxane, ODNPSQ) and a four-leg-numbered surfactant (polyoxyethylene sorbitan monolaurate, Tween-20) for porogens in a higher molecular weight precursor (polyphenylsilsesquioxane, PPSQ) were characterized, respectively, by grazing incidence small-angle X-ray scattering (GISAXS), and the measured 2D GISAXS profiles were analyzed quantitatively by using a GISAXS formula based on the distorted wave Born approximation (DWBA). The fitted 2D GISAXS data show that the PPSQ porous thin films imprinted with ODNPSQ porogen exhibit sphere-shaped closed pores with the average pore size within a range of 1.18-3.12 nm and pore size distribution widths about 3.0 nm when the porogen loadings increase from 10 to 40 wt % and those imprinted with Tween-20 porogen give out an average pore size of 1.07-1.29 nm and pore size distribution widths about 2.0 nm with the porogen loading varying from 5 to 30 wt %. The nanoporous dielectric thin films imprinted with ODNPSQ porogen show a reducing to the molecular aggregation of porogens and significant antiphase separation behavior in the cross-linked matrix.
authors.affiliation: Department of Material Science & Engineering, Jinan University, Guangzhou 510632, PR China. thjchen@jnu.edu.cn
authors.forename: Hong-Ji
authors.initials: HJ
authors.lastname: Chen
authors.forename: Sheng-Ying
authors.initials: SY
authors.lastname: Li
authors.forename: Xiao-Jun
authors.initials: XJ
authors.lastname: Liu
authors.forename: Rui-Peng
authors.initials: RP
authors.lastname: Li
authors.forename: Detlef-M
authors.initials: DM
authors.lastname: Smilgies
authors.forename: Zhong-Hua
authors.initials: ZH
authors.lastname: Wu
authors.forename: Zhihong
authors.initials: Z
authors.lastname: Li
mesh_terms: D008567:Membranes, Artificial; D049329:Nanostructures; D016062:Porosity; D053838:Scattering, Small Angle; D017640:Silicates / Q000737:chemistry*; D013499:Surface Properties; D014965:X-Rays
chemical_list: D008567:Membranes, Artificial; D017640:Silicates