title: Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate.
abstract: Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high resolution while maintaining reasonable efficiency. We analyze the illumination conditions necessary for this type of optics in order to suppress stray light and demonstrate microscopic imaging resolving 25 nm features.
authors.affiliation: Biomedical and X-ray Physics, Department of Applied Physics, Royal Institute of Technology, Albanova, SE-10691 Stockholm, Sweden.
authors.forename: Olov
authors.initials: O
authors.lastname: von Hofsten
authors.forename: Michael
authors.initials: M
authors.lastname: Bertilson
authors.forename: Julia
authors.initials: J
authors.lastname: Reinspach
authors.forename: Anders
authors.initials: A
authors.lastname: Holmberg
authors.forename: Hans M
authors.initials: HM
authors.lastname: Hertz
authors.forename: Ulrich
authors.initials: U
authors.lastname: Vogt
mesh_terms: D000465:Algorithms; D004867:Equipment Design / Q000295:instrumentation* / Q000379:methods; D007091:Image Processing, Computer-Assisted; D008853:Microscopy / Q000295:instrumentation* / Q000379:methods; D055096:Optical Devices; D055095:Optics and Photonics; D017785:Photons; D014961:X-Ray Diffraction; D014965:X-Rays