Single-mode, tunable operation of a XeF excimer laser employing an original interferometer.
We report single-mode operation, with transform-limited bandwidth, of a XeF excimer laser utilizing a novel grating-interferometer-based optical cavity. The laser beam has a bandwidth of ~40 MHz with a half-power tunability of ~0.7 nm. Laser peak power is ~10 W.
Armandillo
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E
Lopatriello
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PV
Giuliani
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G