Surface-roughness measurement by digital processing of Nomarski phase-contrast images.
Surface roughnesses down to 0.1 nm rms were measured on low-reflectance polished glass and silica substrates by quantitative analysis of Nomarski differential phase-contrast images with a fast digital image processor. A measure of roughness was obtained from the standard deviation of intensities in the Nomarski image observed by a vidicon tube with linear response and digitized in real time.
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