Deep-ultraviolet spatial-period division using an excimer laser.
We have used the deep-UV output from an ArF laser and a grating mask with 199-nm spatial period to fabricate a 99.5-nm-period grating pattern in polymethyl methacrylate resist by spatial-period division. For sub 100 nm, lithography of periodic and quasi-periodic patterns (including Fresnel zone plates) by spatial-period division, deep-UV radiation offers a number of advantages over soft x rays.
Hawryluk
A M
AM
Smith
H I
HI
Osgood
R M
RM
Ehrlich
D J
DJ