Sub-25-nm laboratory x-ray microscopy using a compound Fresnel zone plate.
Improving the resolution in x-ray microscopes is of high priority to enable future applications in nanoscience. However, high-resolution zone-plate optics often have low efficiency, which makes implementation in laboratory microscopes difficult. We present a laboratory x-ray microscope based on a compound zone plate. The compound zone plate utilizes multiple diffraction orders to achieve high resolution while maintaining reasonable efficiency. We analyze the illumination conditions necessary for this type of optics in order to suppress stray light and demonstrate microscopic imaging resolving 25 nm features.
von Hofsten
Olov
O
Biomedical and X-ray Physics, Department of Applied Physics, Royal Institute of Technology, Albanova, SE-10691 Stockholm, Sweden.
Bertilson
Michael
M
Reinspach
Julia
J
Holmberg
Anders
A
Hertz
Hans M
HM
Vogt
Ulrich
U
D000465:Algorithms; D004867:Equipment Design / Q000295:instrumentation* / Q000379:methods; D007091:Image Processing, Computer-Assisted; D008853:Microscopy / Q000295:instrumentation* / Q000379:methods; D055096:Optical Devices; D055095:Optics and Photonics; D017785:Photons; D014961:X-Ray Diffraction; D014965:X-Rays