title: Subpicosecond KrF* excimer-laser source.
abstract: A subpicosecond KrF* laser system capable of producing 20 +/- 2-mJ pulses has been developed. The means of producing ultrashort seed pulses for the KrF* amplifier system and characteristics of the full system are described. It is shown that efficient subpicosecond energy extraction is possible.
authors.forename: A P
authors.initials: AP
authors.lastname: Schwarzenbach
authors.forename: T S
authors.initials: TS
authors.lastname: Luk
authors.forename: I A
authors.initials: IA
authors.lastname: McIntyre
authors.forename: U
authors.initials: U
authors.lastname: Johann
authors.forename: A
authors.initials: A
authors.lastname: McPherson
authors.forename: K
authors.initials: K
authors.lastname: Boyer
authors.forename: C K
authors.initials: CK
authors.lastname: Rhodes