Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films.
Polsky
Ronen
R
Department of Biosensors & Nanomaterials, Sandia National Laboratories, PO Box 5800, MS-0892, Albuquerque, NM 87185, USA.
Washburn
Cody M
CM
Montano
Gabriel
G
Liu
Haiqing
H
Edwards
Thayne L
TL
Lopez
DeAnna M
DM
Harper
Jason C
JC
Brozik
Susan M
SM
Wheeler
David R
DR
D003460:Crystallization / Q000379:methods; D006046:Gold / Q000737:chemistry*; D006358:Hot Temperature; D007477:Ions; D046911:Macromolecular Substances / Q000737:chemistry; D008567:Membranes, Artificial; D008968:Molecular Conformation; D053758:Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods; D010316:Particle Size; D010777:Photochemistry / Q000379:methods*; D013499:Surface Properties
D007477:Ions; D046911:Macromolecular Substances; D008567:Membranes, Artificial; D006046:Gold