title: Novel glass microprobe arrays for neural recording.
abstract: The probe array is a useful tool for neurophysiology to detect and record neural signals. Thus, the better understanding of neural systems can be achieved. Microfabricated probes have been widely used since fine-spacing probes with well-defined electrodes in smaller footprint can be created. This study presents a novel process to realize glass 2D-microprobe array. Dielectric material like glass can provide better signal isolation capability and biocompatibility. The through silicon vias (TSVs) can also be integrated with the glass 2D-microprobe using the micromachining process. The vertical integration of chips containing glass 2D-microprobe array is realized using these silicon TSVs. The 3D-microprobe array can be easily implemented after vertical assembly of 2D-microprobe chips using bonding. In application, the 2D glass microprobe is fabricated and characterized with a low impedance of 439 kOmega at 1 kHz. The action potential of crayfish's nerve cord has successfully been recorded using the glass microprobe with peak-to-peak amplitude of 228 muV, and SNR of 46.42. The spontaneous spike of rat's cortex has also been recorded by the glass microprobe with peak-to-peak amplitude of 90 muV, and SNR of 19.72.
authors.affiliation: Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan.
authors.forename: Chiung-Wen
authors.initials: CW
authors.lastname: Lin
authors.forename: Yu-Tao
authors.initials: YT
authors.lastname: Lee
authors.forename: Chih-Wei
authors.initials: CW
authors.lastname: Chang
authors.forename: Wei-Lun
authors.initials: WL
authors.lastname: Hsu
authors.forename: Yen-Chung
authors.initials: YC
authors.lastname: Chang
authors.forename: Weileun
authors.initials: W
authors.lastname: Fang
mesh_terms: D000200:Action Potentials / Q000502:physiology*; D000818:Animals; D003400:Astacoidea; D015374:Biosensing Techniques / Q000295:instrumentation*; D002478:Cells, Cultured; D004563:Electrochemistry / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005898:Glass; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D046228:Microarray Analysis / Q000295:instrumentation*; D008839:Microelectrodes; D009474:Neurons / Q000502:physiology*; D051381:Rats; D014159:Transducers