Interferometer for measuring displacement and distance.
A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a lambda/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 microm for displacement and 100 microm for distance are obtained over a range of a few meters.
Kubota
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Nara
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Yoshino
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