High-power argon excimer laser at 126 nm pumped by an electron beam.
A high-power argon excimer laser has been developed with an output power exceeding 2 MW in the VUV region at 126 nm. As an alternative to a conventional Al/MgF(2)-coated mirror, which was susceptible to damage, an uncoated quartz plate was successfully used as a reflector for reproducible high-power operation of the argon excimer laser without any mirror damage. Observation of the temporal behavior of the laser pulse in relation to that of the gain coefficient is discussed.
Uehara
Y
Y
Sasaki
W
W
Saito
S
S
Fujiwara
E
E
Kato
Y
Y
Yamanaka
M
M
Tsuchida
K
K
Fujita
J
J