title: Reactive ion etching of gold-nanoparticle-modified pyrolyzed photoresist films.
authors.affiliation: Department of Biosensors & Nanomaterials, Sandia National Laboratories, PO Box 5800, MS-0892, Albuquerque, NM 87185, USA.
authors.forename: Ronen
authors.initials: R
authors.lastname: Polsky
authors.forename: Cody M
authors.initials: CM
authors.lastname: Washburn
authors.forename: Gabriel
authors.initials: G
authors.lastname: Montano
authors.forename: Haiqing
authors.initials: H
authors.lastname: Liu
authors.forename: Thayne L
authors.initials: TL
authors.lastname: Edwards
authors.forename: DeAnna M
authors.initials: DM
authors.lastname: Lopez
authors.forename: Jason C
authors.initials: JC
authors.lastname: Harper
authors.forename: Susan M
authors.initials: SM
authors.lastname: Brozik
authors.forename: David R
authors.initials: DR
authors.lastname: Wheeler
mesh_terms: D003460:Crystallization / Q000379:methods; D006046:Gold / Q000737:chemistry*; D006358:Hot Temperature; D007477:Ions; D046911:Macromolecular Substances / Q000737:chemistry; D008567:Membranes, Artificial; D008968:Molecular Conformation; D053758:Nanoparticles / Q000737:chemistry* / Q000648:ultrastructure*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods; D010316:Particle Size; D010777:Photochemistry / Q000379:methods*; D013499:Surface Properties
chemical_list: D007477:Ions; D046911:Macromolecular Substances; D008567:Membranes, Artificial; D006046:Gold