title: Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method.
abstract: We demonstrate a microcantilever array with an in-plane photonic transduction method for simultaneous readout of each microcantilever. The array is fabricated on a silicon-on-insulator substrate. Rib waveguides in conjunction with a compact waveguide splitter network comprised of trench-based splitters and trench-based bends route light from a single optical input to each microcantilever on the chip. Light propagates down a rib waveguide integrated into the microcantilever and, at the free end of the microcantilever, crosses a small gap. Light is captured in static asymmetric multimode waveguides that terminate in Y-branches, the outputs of which are imaged onto an InGaAs line scan camera. A differential signal for each microcantilever is simultaneously formed from the two outputs of the corresponding Y-branch. We demonstrate that reasonable signal uniformity is obtained with a scaled differential signal for seven out of nine surviving microcantilevers in an array.
authors.affiliation: Electrical and Computer Engineering, Brigham Young University, Provo, Utah 84602, USA.
authors.forename: Weisheng
authors.initials: W
authors.lastname: Hu
authors.forename: Ryan
authors.initials: R
authors.lastname: Anderson
authors.forename: Yusheng
authors.initials: Y
authors.lastname: Qian
authors.forename: Jigou
authors.initials: J
authors.lastname: Song
authors.forename: Jong Wook
authors.initials: JW
authors.lastname: Noh
authors.forename: Seunghyun
authors.initials: S
authors.lastname: Kim
authors.forename: Gregory P
authors.initials: GP
authors.lastname: Nordin