Development and performance test of a soft x-ray polarimeter and ellipsometer for complete polarization analysis.
A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft x-ray region has been designed, constructed, and installed in the soft x-ray beamline (BL-11) at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by an ion beam sputtering method. It is for the first time shown that the degree of linear polarization of monochromatized light from the BL-11 is approximately 87% at 92 eV since the beamline has been constructed.
Imazono
Takashi
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Quantum Beam Science Directorate, Japan Atomic Energy Agency, 8-1-7, Umemidai, Kizugawa, Kyoto 619-0215, Japan. imazono.takashi@jaea.go.jp
Sano
Kazuo
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Suzuki
Yoji
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Kawachi
Tetsuya
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Koike
Masato
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