Characterizing the two- and three-dimensional resolution of an improved aberration-corrected STEM.
The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 A can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
Lupini
A R
AR
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA. 9az@ornl.gov
Borisevich
A Y
AY
Idrobo
J C
JC
Christen
H M
HM
Biegalski
M
M
Pennycook
S J
SJ