title: Characterizing the two- and three-dimensional resolution of an improved aberration-corrected STEM.
abstract: The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 A can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
authors.affiliation: Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA. 9az@ornl.gov
authors.forename: A R
authors.initials: AR
authors.lastname: Lupini
authors.forename: A Y
authors.initials: AY
authors.lastname: Borisevich
authors.forename: J C
authors.initials: JC
authors.lastname: Idrobo
authors.forename: H M
authors.initials: HM
authors.lastname: Christen
authors.forename: M
authors.initials: M
authors.lastname: Biegalski
authors.forename: S J
authors.initials: SJ
authors.lastname: Pennycook