Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry.
Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.
Vedam
K
K
Kim
S Y
SY
D'Aries
L
L
Guenther
A H
AH