title: Microfabrication techniques for biologists: a primer on building micromachines.
abstract: In this chapter we review the fundamental techniques and processes underlying the fabrication of devices on the micron scale (referred to as "microfabrication"). Principles laid down in the 1950s now form the basis of the semiconductor manufacturing industry; these principles are easily adaptable to the production of devices for biotechnological processing and analysis.
authors.affiliation: Sandia National Laboratories, Albuquerque, NM, USA.
authors.forename: Douglas
authors.initials: D
authors.lastname: Chinn
mesh_terms: D001695:Biology / Q000379:methods*; D004563:Electrochemistry / Q000295:instrumentation / Q000379:methods; D004595:Electroplating / Q000295:instrumentation / Q000379:methods; D004784:Environmental Monitoring / Q000379:methods; D004785:Environmental Pollutants / Q000032:analysis / Q000302:isolation & purification; D004867:Equipment Design / Q000379:methods; D006801:Humans; D055616:Microtechnology / Q000295:instrumentation* / Q000379:methods*; D036103:Nanotechnology / Q000379:methods; D010777:Photochemistry / Q000379:methods; D014876:Water Pollution / Q000517:prevention & control
chemical_list: D004785:Environmental Pollutants