Microvalve thickness and topography measurements in microfluidic devices by white-light confocal microscopy.
A microvalve is a key part in a multilayer microfluidic device to control the fluid flow, and its thickness directly determines its performance. In this paper, a three-dimensional measurement technology using a white-light confocal microscope is developed for measuring both the topography and thickness of microvalves. The impact of system parameters and sample parameters on measurement accuracy is discussed in detail, particularly for measurement with a dry objective. With this technique, the microvalve thicknesses before and after bonding were characterized with submicrometer measurement sensitivity and about 1 microm measurement accuracy.
Li
Shiguang
S
Singapore-Masschusetts Institute of Technology Alliance, N3.2-01-36, 65 Nanyang Drive, Singapore 637460. sgli@ntu.edu.sg
Thorsen
Todd
T
Xu
Zhiguang
Z
Fang
Zhong Ping
ZP
Zhao
Jianhong
J
Yoon
Soon Fatt
SF
D004867:Equipment Design; D019544:Equipment Failure Analysis / Q000295:instrumentation / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000379:methods*; D008027:Light; D044085:Microfluidics / Q000295:instrumentation*; D018613:Microscopy, Confocal / Q000379:methods*