Silicon antiresonant reflecting optical waveguides.
A new silicon waveguide called ARROW-C is proposed and analyzed at the 1.3-microm wavelength. The silicon structure uses two buried layers of SiO(2) or beta-SiC with a thickness of 14-23 nm to permit optical tunneling for leakymode propagation. A propagation loss of ~0.5 dB/cm is predicted for the TE(0) or the TM(0) mode in a 5-microm-thick Sicore layer. Novel silicon ARROW-A and ARROW-B guides are also discussed. The former uses a pair of buried GeSi layers; the latter employs buried SiO(2) and GeSi films.
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