Compact scanning soft-x-ray microscope using a laser-produced plasma source and normal-incidence multilayer mirrors.
We have constructed a scanning soft-x-ray microscope that uses a laser-produced plasma as the soft-x-ray source and normal-incidence multilayer-coated mirrors in a Schwarzschild configuration as the focusing optics. The microscope operates at a wavelength of 14 nm, has a spatial resolution of 0.5 microm, and has a soft-x-ray photon flux through the focus of 10(4)-10(5) sec(-1) when operated with only 170 mW of average laser power. The microscope is compact; the complete system, including the laser, fits on a single optical table.
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Byer
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