title: Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry.
abstract: Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.
authors.forename: K
authors.initials: K
authors.lastname: Vedam
authors.forename: S Y
authors.initials: SY
authors.lastname: Kim
authors.forename: L
authors.initials: L
authors.lastname: D'Aries
authors.forename: A H
authors.initials: AH
authors.lastname: Guenther