Inverse ion-exchange method for glass waveguide fabrication.
A new method, inverse ion exchange, is proposed and demonstrated for the fabrication of single-mode channel waveguides. In this method the channel waveguide is formed by backdiffusion of the refractive-index-increasing ions from an ion-exchanged planar waveguide. Finite-difference methods are used to model the fabrication technique and to calculate the field of the fundamental mode of the waveguide. It is also proved experimentally that single-mode waveguides can be fabricated with the the reinverse ion-exchange method using a 10-microm mask stripe width.
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