title: Correlation microscope.
abstract: We have constructed a correlation microscope based on the Mirau interferometer configuration using a thin silicon nitride film beam splitter, and we have developed a method to extract the amplitude and phase information of the reflected signal from a sample located at the microscope object plane. An imaging theory for the interference microscope has been derived, which predicts accurately both the transverse response at a sharp edge and the range response to a perfect plane reflector.
authors.forename: S S
authors.initials: SS
authors.lastname: Chim
authors.forename: G S
authors.initials: GS
authors.lastname: Kino