Comparison of film thickness tolerances in waveguide grating couplers.
The effect of guiding-layer thickness variations on grating coupler performance is investigated for three important material systems. The sensitivity of the coupling length and coupling efficiency of these structures to guiding-layer thickness changes differs markedly between the glass, gallium arsenide, and silicon-on-insulator waveguides studied.
Emmons
R M
RM
Hall
D G
DG