Submicrometer defect enhancement in periodic structures by using photorefractive holography.
We present a defect-enhancement system capable of detecting submicrometer defects on opaque periodic structures using real-time holography in photorefractive crystals. We detect 0.5-microm defects with ~90% success rate and 0.3-microm defects with >85% success rate while inspecting an area greater than 1 mm(2) in real time. To our knowledge, these defects have an area 100 times smaller than those previously detected with any real-time holographic technique.
Uhrich
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Hesselink
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