Polymeric acrylate-based hybrid films containing lead and iron patterned by UV photo-polymerization.
The development and processing of hybrid inorganic-organic thin film materials plays a critical role in advancing interdisciplinary sciences and device manufacturing. Here we present a novel approach to synthesize and deposit acrylate-containing organic/inorganic hybrid films. The material is based on a chemical solution and includes specifically desired metal dopants that are fully integrated into the backbone of the polymer structure. The film can be deposited by simple spin coating, and we confer photosensitive properties to the material making it directly patterned by traditional UV photolithography techniques. Film thickness, chemical characterization, and wet/dry etching capability of the film are also investigated. We believe this innovative material has the potential to be used in a broad range of applications for electronic, photonic, biology, and other interdisciplinary fields.
Han
Huilan
H
Department of Mechanical and Aerospace Engineering, College of Engineering, University of California Davis,One Shields Avenue, Davis, California 95616, USA.
Bissell
John
J
Yaghmaie
Frank
F
Davis
Cristina E
CE
D000180:Acrylic Resins / Q000737:chemistry*; D007501:Iron / Q000737:chemistry*; D007854:Lead / Q000737:chemistry*; D036103:Nanotechnology; D055668:Photochemical Processes; D012996:Solutions; D014466:Ultraviolet Rays
D000180:Acrylic Resins; D012996:Solutions; D007854:Lead; C006903:carbopol 940; D007501:Iron