Active control of grating interferometers for extended-range low-noise operation.
An active control method is proposed and demonstrated to improve grating-based laser interferometry to achieve low-noise (subpicometer resolution) and multiwavelength unambiguous range of operation simultaneously. The method modifies a recurrent calibration-based path stabilization algorithm to extract high-resolution and low-resolution data in parallel. This extended range recurrent calibration method is experimentally verified by implementing it on the micromachined scanning grating interferometer (microSGI).
School of Mechanical Engineering, Georgia Institute of Technology, 801 Ferst Drive, Atlanta, Georgia 30318, USA. omkar.karhade@intel.com
Omkar
O
Karhade
Levent
L
Degertekin
Thomas
T
Kurfess