title: Application of multivariate statistical analysis to STEM X-ray spectral images: interfacial analysis in microelectronics.
abstract: Multivariate statistical analysis methods have been applied to scanning transmission electron microscopy (STEM) energy-dispersive X-ray spectral images. The particular application of the multivariate curve resolution (MCR) technique provides a high spectral contrast view of the raw spectral image. The power of this approach is demonstrated with a microelectronics failure analysis. Specifically, an unexpected component describing a chemical contaminant was found, as well as a component consistent with a foil thickness change associated with the focused ion beam specimen preparation process. The MCR solution is compared with a conventional analysis of the same spectral image data set.
authors.affiliation: Materials Characterization Department, Sandia National Laboratories, PO Box 5800, MS 0886, Albuquerque, NM 87185-0886, USA. pgkotul@sandia.gov
authors.forename: Paul G
authors.initials: PG
authors.lastname: Kotula
authors.forename: Michael R
authors.initials: MR
authors.lastname: Keenan