Local measurement and computational refinement of aberrations for HRTEM.
Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.
Kirkland
Angus I
AI
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom. angus.kirkland@materials.ox.ac.uk
Meyer
Rüdiger R
RR
Chang
Lan-Yun Shery
LY