title: TEM sample preparation using a new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling.
abstract: A new TEM sample preparation technique using electron-beam-induced deposition combined with low-energy ion milling was used to fabricate for two different shapes of sample, conical and plate. High-quality HREM images can be obtained from samples prepared by this technique. A desired sample position can be obtained with high accuracy, and the total sample preparation time can be much less than conventional techniques. Because the gas deposition system used can easily be integrated in a conventional SEM, the method can be performed in any laboratory equipped with a SEM and an ion milling machine.
authors.affiliation: National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan. Mitsuishi.Kazutaka@nims.go.jp
authors.forename: Kazutaka
authors.initials: K
authors.lastname: Mitsuishi
authors.forename: Masayuki
authors.initials: M
authors.lastname: Shimojo
authors.forename: Miyoko
authors.initials: M
authors.lastname: Tanaka
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Minghui
authors.initials: M
authors.lastname: Song
authors.forename: Kazuo
authors.initials: K
authors.lastname: Furuya