title: Improvements in the X-ray analytical capabilities of a scanning transmission electron microscope by spherical-aberration correction.
abstract: A Nion spherical-aberration (Cs) corrector was recently installed on Lehigh University's 300-keV cold field-emission gun (FEG) Vacuum Generators HB 603 dedicated scanning transmission electron microscope (STEM), optimized for X-ray analysis of thin specimens. In this article, the impact of the Cs-corrector on X-ray analysis is theoretically evaluated, in terms of expected improvements in spatial resolution and analytical sensitivity, and the calculations are compared with initial experimental results. Finally, the possibilities of atomic-column X-ray analysis in a Cs-corrected STEM are discussed.
authors.affiliation: Department of Materials Science and Engineering/Center for Advanced Materials and Nanotechnology, Lehigh University, Bethlehem, PA 18015, USA. masashi.watanabe@lehigh.edu
authors.forename: M
authors.initials: M
authors.lastname: Watanabe
authors.forename: D W
authors.initials: DW
authors.lastname: Ackland
authors.forename: A
authors.initials: A
authors.lastname: Burrows
authors.forename: C J
authors.initials: CJ
authors.lastname: Kiely
authors.forename: D B
authors.initials: DB
authors.lastname: Williams
authors.forename: O L
authors.initials: OL
authors.lastname: Krivanek
authors.forename: N
authors.initials: N
authors.lastname: Dellby
authors.forename: M F
authors.initials: MF
authors.lastname: Murfitt
authors.forename: Z
authors.initials: Z
authors.lastname: Szilagyi