Atomic-nitrogen production in a radio-frequency plasma source.
The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.
Vaudo
R P
RP
Yu
Z
Z
Cook
J W
JW
Schetzina
J F
JF