title: Atomic-nitrogen production in a radio-frequency plasma source.
abstract: The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.
authors.forename: R P
authors.initials: RP
authors.lastname: Vaudo
authors.forename: Z
authors.initials: Z
authors.lastname: Yu
authors.forename: J W
authors.initials: JW
authors.lastname: Cook
authors.forename: J F
authors.initials: JF
authors.lastname: Schetzina