Effect of chromatic aberration on atomic-resolved spherical aberration corrected STEM images.
The effect of the chromatic aberration (C(c)) coefficient in a spherical aberration (C(s))- corrected electromagnetic lens on high-resolution high-angle annular dark field (HAADF) scanning transmission electron microscope (STEM) images is explored in detail. A new method for precise determination of the C(c) coefficient is demonstrated, requiring measurement of an atomic-resolution one-frame through-focal HAADF STEM image. This method is robust with respect to instrumental drift, sample thickness, all lens parameters except C(c), and experimental noise. It is also demonstrated that semi-quantitative structural analysis on the nanometer scale can be achieved by comparing experimental C(s)- corrected HAADF STEM images with their corresponding simulated images when the effects of the C(c) coefficient and spatial incoherence are included.
Kuramochi
Koji
K
Tokyo University of Science, Tokyo 162-8601, Japan.
Yamazaki
Takashi
T
Kotaka
Yasutoshi
Y
Ohtsuka
Masahiro
M
Hashimoto
Iwao
I
Watanabe
Kazuto
K