title: Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control.
abstract: A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 nm.
authors.affiliation: Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata 950-2181, Japan. takamasa@eng.niigata-u.ac.jp
authors.forename: Takamasa
authors.initials: T
authors.lastname: Suzuki
authors.forename: Tsutomu
authors.initials: T
authors.lastname: Takahashi
authors.forename: Osami
authors.initials: O
authors.lastname: Sasaki