title: [A micro-silicon multi-slit spectrophotometer based on MEMS technology].
abstract: A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer's slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999, which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.
authors.affiliation: National Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. hp312@126.com
authors.forename: Peng
authors.initials: P
authors.lastname: Hao
authors.forename: Yi-Hui
authors.initials: YH
authors.lastname: Wu
authors.forename: Ping
authors.initials: P
authors.lastname: Zhang
authors.forename: Yong-Shun
authors.initials: YS
authors.lastname: Liu
authors.forename: Ke
authors.initials: K
authors.lastname: Zhang
authors.forename: Hai-Wen
authors.initials: HW
authors.lastname: Li