Improvements in the X-ray analytical capabilities of a scanning transmission electron microscope by spherical-aberration correction.
A Nion spherical-aberration (Cs) corrector was recently installed on Lehigh University's 300-keV cold field-emission gun (FEG) Vacuum Generators HB 603 dedicated scanning transmission electron microscope (STEM), optimized for X-ray analysis of thin specimens. In this article, the impact of the Cs-corrector on X-ray analysis is theoretically evaluated, in terms of expected improvements in spatial resolution and analytical sensitivity, and the calculations are compared with initial experimental results. Finally, the possibilities of atomic-column X-ray analysis in a Cs-corrected STEM are discussed.
Watanabe
M
M
Department of Materials Science and Engineering/Center for Advanced Materials and Nanotechnology, Lehigh University, Bethlehem, PA 18015, USA. masashi.watanabe@lehigh.edu
Ackland
D W
DW
Burrows
A
A
Kiely
C J
CJ
Williams
D B
DB
Krivanek
O L
OL
Dellby
N
N
Murfitt
M F
MF
Szilagyi
Z
Z