title: Ultrahigh-vacuum third-order spherical aberration (Cs) corrector for a scanning transmission electron microscope.
abstract: Initial results from an ultrahigh-vacuum (UHV) third-order spherical aberration (Cs) corrector for a dedicated scanning transmission electron microscopy, installed at the National Institute for Materials Science, Tsukuba, Japan, are presented here. The Cs corrector is of the dual hexapole type. It is UHV compatible and was installed on a UHV column. The Ronchigram obtained showed an extension of the sweet spot area, indicating a successful correction of the third-order spherical aberration Cs. The power spectrum of an image demonstrated that the resolution achieved was 0.1 nm. A first trial of the direct measurement of the fifth-order spherical aberration C5 was also attempted on the basis of a Ronchigram fringe measurement.
authors.affiliation: High-Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan. Mitsuishi.Kazutaka@nims.go.jp
authors.forename: Kazutaka
authors.initials: K
authors.lastname: Mitsuishi
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Yukihito
authors.initials: Y
authors.lastname: Kondo
authors.forename: Fumio
authors.initials: F
authors.lastname: Hosokawa
authors.forename: Kimiharu
authors.initials: K
authors.lastname: Okamoto
authors.forename: Takumi
authors.initials: T
authors.lastname: Sannomiya
authors.forename: Madoka
authors.initials: M
authors.lastname: Hori
authors.forename: Takeshi
authors.initials: T
authors.lastname: Iwama
authors.forename: Muneyuki
authors.initials: M
authors.lastname: Kawazoe
authors.forename: Kazuo
authors.initials: K
authors.lastname: Furuya