Chemically anisotropic single-crystalline silicon nanotetrahedra.
We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.
Berenschot
J W
JW
MESA + Institute for Nanotechnology, University of Twente, PO Box 217, NL-7500 AE Enschede, The Netherlands.
Tas
N R
NR
Jansen
H V
HV
Elwenspoek
M
M