Interferometric quasi-absolute tests for aspherics using a radial shear position.
Increasing accuracy requirements in aspheric metrology make the development of absolute testing procedures for aspheric surfaces important. One strategy is transferring the standard practice three-position test for spheres to aspherics. The three-position test, however, involves a cat's eye position and therefore has certain drawbacks. We propose an absolute testing method for rotationally symmetric aspherics where the cat's eye position is replaced with a radially sheared position. Together with rotational movements of the specimen, the surface deviations can be obtained in an absolute manner. To demonstrate the validity of the procedure, we present a measurement result for a sphere and compare it with a result obtained by the standard three-position test.
Mantel
Klaus
K
Max Planck Institute for the Science of Light, Günther-Scharowsky-Strasse 1/Bau 24, 91058 Erlangen, Germany. klaus.mantel@mpl.mpg.de
Geist
Eduard
E
Harder
Irina
I
Lindlein
Norbert
N
Leuchs
Gerd
G