Curvilinear electronics formed using silicon membrane circuits and elastomeric transfer elements.
Materials and methods to achieve electronics intimately integrated on the surfaces of substrates with complex, curvilinear shapes are described. The approach exploits silicon membranes in circuit mesh structures that can be deformed in controlled ways using thin, elastomeric films. Experimental and theoretical studies of the micromechanics of such curvilinear electronics demonstrate the underlying concepts. Electrical measurements illustrate the high yields that can be obtained. The results represent significant experimental and theoretical advances over recently reported concepts for creating hemispherical photodetectors in electronic eye cameras and for using printable silicon nanoribbons/membranes in flexible electronics. The results might provide practical routes to the integration of high performance electronics with biological tissues and other systems of interest for new applications.
Ko
Heung Cho
HC
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Shin
Gunchul
G
Wang
Shuodao
S
Stoykovich
Mark P
MP
Lee
Jeong Won
JW
Kim
Dong-Hun
DH
Ha
Jeong Sook
JS
Huang
Yonggang
Y
Hwang
Keh-Chih
KC
Rogers
John A
JA
D004581:Electronics; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology; D055096:Optical Devices; D045663:Quantum Dots; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D012825:Silicon