High-repetition-rate high-power femtosecond ArF laser source.
170-fs, 0.8-microJ optical pulses at 193 nm generated by frequency quadrupling of high-power Ti:sapphire laser pulses are amplified in an ArF gain module. Double-pass amplification at a 400-Hz repetition rate resulted in 290-mW average power with pulse durations of ~ 300 fs.
Ringling
J
J
Kittelmann
O
O
Noack
F
F
Stamm
U
U
Kleinschmidt
J
J
Voss
F
F