Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes.
Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.
Kahng
Yung Ho
YH
Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea.
Choi
Jinho
J
Jeong
Kwanghoon
K
Park
Byong Chon
BC
Kim
Dal-Hyun
DH
Lyou
Joon
J
Lee
Jae-Joon
JJ
Lee
Haiwon
H
Lee
Takhee
T
Ahn
Sang Jung
SJ