High-resolution spin-polarized scanning electron microscopy (spin SEM).
We have developed spin-polarized scanning electron microscopy (spin SEM) with a 5-nm resolution. The secondary electron optics is very important, as it needs to transfer a sufficient number of secondary electrons to the spin polarimeter, due to the low efficiency of the polarimeter. The optics was designed using a three-dimensional (3D) simulation program of the secondary electron trajectories, and it achieves highly efficient collection and transport of the secondary electrons even though the distance between the sample and the objective lens exit of the electron gun remains short. Moreover, the designed optics enables us to obtain clear SEM images in the spin SEM measurement and to precisely adjust the probe beam shape. These functions lead to images with high spatial resolution and sufficient signal-to-noise (S/N) ratios. This optics has been installed in an ultra-high vacuum (UHV) spin SEM chamber with a Schottky-type electron gun for the probe electron beam. We observed recorded bits on a perpendicular magnetic recording medium and visualized small irregularities in the bit shapes around the track edges and bit boundaries. The high resolution of 5 nm was demonstrated by observing the smallest domain composed by a single grain in the recording medium.
Joint Research Center for Atom Technology (JRCAT), Angstrom Technology Partnership (ATP), 1-1-1 Higashi, Tsukuba 305-0046, Japan. teruo.kohashi.fc@hitachi.com
Teruo
T
Kohashi
Makoto
M
Konoto
Kazuyuki
K
Koike