High-efficiency multilayer dielectric diffraction gratings.
The design and performance of a new type of high-efficiency diffraction grating for use in either transmission or reflection are described. The gratings are produced in a multilayer dielectric coating deposited upon optically flat substrates. By proper design of the multilayer stack and grating structure, a diffraction efficiency in excess of 96% for polarized light in the m = -1 order in reflection has been achieved.
Perry
M D
MD
Boyd
R D
RD
Britten
J A
JA
Decker
D
D
Shore
B W
BW
Shannon
C
C
Shults
E
E