Surface nanoprocessing with nondiffracting femtosecond Bessel beams.
We demonstrate the application of nondiffracting Bessel beams for reproducible nanometric-scale feature patterning in glass. A femtosecond pulse zero-order Bessel beam with a central spot radius of 360 nm was used to write 500 nm radius nanocraters over a longitudinal positioning range exceeding 20 microm, with a variation in radius of less than 10%. The use of Bessel beams significantly reduces constraints on critical sample positioning in the nanoscale writing regime, enabling the use of femtosecond pulses for fast inscription of nanometer-scale features over large sample areas.
Courvoisier
F
F
Département d'Optique P. M. Duffieux, Institut FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté,25030 Besançon, France. francois.courvoisier@femto-st.fr
Lacourt
P-A
PA
Jacquot
M
M
Bhuyan
M K
MK
Furfaro
L
L
Dudley
J M
JM