title: Self-assembled ferrofluid lithography: patterning micro and nanostructures by controlling magnetic nanoparticles.
abstract: We have developed an alternative self-assembly process to pattern different geometries with user-defined tunability across the micro and nanoscale. In this approach, field-induced assembly of colloidal magnetic nanoparticles within a microfluidic channel is used as a tunable mask for near-field lithography. We have fabricated dot arrays with controllable spacing and micro-ring patterns with 250 nm feature sizes. The proposed process is versatile, cost-effective, and scalable, presenting itself as a promising nanomanufacturing tool.
authors.affiliation: Singapore-MIT Alliance for Research and Technology Centre, Singapore. chichang@mit.edu
authors.forename: Chih-Hao
authors.initials: CH
authors.lastname: Chang
authors.forename: Chee-Wee
authors.initials: CW
authors.lastname: Tan
authors.forename: Jianmin
authors.initials: J
authors.lastname: Miao
authors.forename: George
authors.initials: G
authors.lastname: Barbastathis