Self-assembled ferrofluid lithography: patterning micro and nanostructures by controlling magnetic nanoparticles.
We have developed an alternative self-assembly process to pattern different geometries with user-defined tunability across the micro and nanoscale. In this approach, field-induced assembly of colloidal magnetic nanoparticles within a microfluidic channel is used as a tunable mask for near-field lithography. We have fabricated dot arrays with controllable spacing and micro-ring patterns with 250 nm feature sizes. The proposed process is versatile, cost-effective, and scalable, presenting itself as a promising nanomanufacturing tool.
Chang
Chih-Hao
CH
Singapore-MIT Alliance for Research and Technology Centre, Singapore. chichang@mit.edu
Tan
Chee-Wee
CW
Miao
Jianmin
J
Barbastathis
George
G