Precise displacement measurement for a local surface.
An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm. Moreover, the proposed method uses only low-cost optical elements.
Yeh
Sheng Lih
SL
Department of Mechanical Engineering, Lunghwa University of Science and Technology, 300, Section 1, Wanshou Road, Kueishan, Taoyuan County 33306, Taiwan. slyeh@mail.lhu.edu.tw
Lin
Shyh Tsong
ST
Chang
Yu Hsin
YH