Light Emitting Diodes as an alternative ambient illumination source in photolithography environment.
We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.
Corell
Dennis
D
Department of Photonics Engineering, Technical University of Denmark 2800 Kgs. Lyngby, Denmark.
Ou
Haiyan
H
Dam-Hansen
Carsten
C
Petersen
Paul-Michael
PM
Friis
Dan
D
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008029:Lighting / Q000295:instrumentation*; D010781:Photography / Q000295:instrumentation*; D015203:Reproducibility of Results; D012666:Semiconductors; D012680:Sensitivity and Specificity