title: Formation of interconnects with carbon nanotubes by nano-patterning and acoustics-assisted alignment.
abstract: In this work, the feasibility of self-assembling double-walled carbon nanotubes (DWCNTs) to form nano-sized interconnects over pre-fabricated gold electrodes using a combination of nanopatterning, surface functionalization and acoustics-assisted alignment of the DWCNTs was studied. Self-assembly and concurrent alignment of DWCNTs over the gold electrodes on selectively functionalized surfaces within nano-patterns took place in a fluid medium with the potential scalability for wafer-sized mass production. The adverse impacts of curvature and misalignment of DWCNTs on the chance of their attachment to the target zones were analyzed. Microscopic observations and electrical I-V curve measurements verified that DWCNT interconnects were indeed formed. The results indicated that the fabrication of self-assembled interconnects through the combined usage of nano-patterning, surface functionalization and DWCNT alignment is feasible and is in the right direction towards the fabrication of interconnects for future carbon nanotube-based devices and circuits.
authors.affiliation: Institute of Materials Research and Engineering, Agency for Science, Technology and Research, 3 Research Link, Singapore 117602.
authors.forename: Kai Yang
authors.initials: KY
authors.lastname: Ang
authors.forename: Kui
authors.initials: K
authors.lastname: Yao
authors.forename: Yifan
authors.initials: Y
authors.lastname: Chen
authors.forename: Siew Lang
authors.initials: SL
authors.lastname: Teo