Ellipsometric retrieval of the phenomenological parameters of a waveguide grating.
Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.
Pietroy
David
D
Laboratoire Hubert Curien, CNRS-UMR 5516, 18 rue Benoit Lauras, 42000 Saint-Etienne, France.
Parriaux
Olivier
O
Stehle
Jean-Louis
JL
D000465:Algorithms; D019544:Equipment Failure Analysis / Q000379:methods*; D008027:Light; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods*; D012542:Scattering, Radiation