title: Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD).
abstract: Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.
authors.affiliation: Department of Chemical and Biological Engineering, University of Colorado, Boulder, CO 80309, USA.
authors.forename: Xinhua
authors.initials: X
authors.lastname: Liang
authors.forename: Miao
authors.initials: M
authors.lastname: Yu
authors.forename: Jianhua
authors.initials: J
authors.lastname: Li
authors.forename: Ying-Bing
authors.initials: YB
authors.lastname: Jiang
authors.forename: Alan W
authors.initials: AW
authors.lastname: Weimer