title: Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy.
abstract: To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond.
authors.affiliation: Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA. wlchao@lbl.gov
authors.forename: Weilun
authors.initials: W
authors.lastname: Chao
authors.forename: Jihoon
authors.initials: J
authors.lastname: Kim
authors.forename: Senajith
authors.initials: S
authors.lastname: Rekawa
authors.forename: Peter
authors.initials: P
authors.lastname: Fischer
authors.forename: Erik H
authors.initials: EH
authors.lastname: Anderson
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008853:Microscopy / Q000295:instrumentation*; D011856:Radiographic Image Enhancement / Q000295:instrumentation*; D011859:Radiography / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity