title: BaTiO3 doped Na0.5K0.5NbO3 thin films deposited by using eclipse shutter enhanced pulsed laser deposition method.
abstract: We have investigated structural, electrical, and electro-mechanical properties of lead-free piezoelectric BaTiO3 doped Na0.5K0.5NbO3 (BTO-NKN) thin films deposited by pulsed laser deposition (PLD) methods. BTO-NKN thin films have been deposited on La0.5Sr0.5CoO3 (LSCO) bottom electrodes with LaAlO3 (LAO) substrates. X-ray diffraction data have shown that all the BTO-NKN and bottom electrodes are highly oriented with their c-axes normal to the substrates. In order to improve the morphology of BTO-NKN thin films, we have located an eclipse shutter between a target and a substrate. Root-mean-square roughness was changed from 91 nm to 21 nm with eclipse shutter enhanced PLD (E-PLD) method. Furthermore, the enhanced surface morphology leads to the improvement in electrical or electro-mechanical properties mainly due to increased density. Typical capacitance and d33 values of a BTO-NKN film deposited by E-PLD method are 1000 pF and 30 pmN, respectively.
authors.affiliation: Department of Physics, Konkuk University, Seoul 143-701, Korea.
authors.forename: J S
authors.initials: JS
authors.lastname: Choi
authors.forename: I R
authors.initials: IR
authors.lastname: Hwang
authors.forename: S H
authors.initials: SH
authors.lastname: Hong
authors.forename: G T
authors.initials: GT
authors.lastname: Oh
authors.forename: J A
authors.initials: JA
authors.lastname: Choi
authors.forename: S H
authors.initials: SH
authors.lastname: Jeon
authors.forename: S O
authors.initials: SO
authors.lastname: Kang
authors.forename: Vadim Sh
authors.initials: VSh
authors.lastname: Yalishev
authors.forename: B H
authors.initials: BH
authors.lastname: Park
authors.forename: Chang-Hak
authors.initials: CH
authors.lastname: Choi
authors.forename: Cheol-Woo
authors.initials: CW
authors.lastname: Ahn
authors.forename: Sahn
authors.initials: S
authors.lastname: Nahm
authors.forename: Sang Jun
authors.initials: SJ
authors.lastname: Ahn