title: Chemical mechanical planarization: slurry chemistry, materials, and mechanisms.
authors.affiliation: IBM T.J. Watson Research Center, Yorktown Heights, New York 10598, USA. krishnan@us.ibm.com
authors.forename: Mahadevaiyer
authors.initials: M
authors.lastname: Krishnan
authors.forename: Jakub W
authors.initials: JW
authors.lastname: Nalaskowski
authors.forename: Lee M
authors.initials: LM
authors.lastname: Cook