title: Ellipsometric retrieval of the phenomenological parameters of a waveguide grating.
abstract: Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.
authors.affiliation: Laboratoire Hubert Curien, CNRS-UMR 5516, 18 rue Benoit Lauras, 42000 Saint-Etienne, France.
authors.forename: David
authors.initials: D
authors.lastname: Pietroy
authors.forename: Olivier
authors.initials: O
authors.lastname: Parriaux
authors.forename: Jean-Louis
authors.initials: JL
authors.lastname: Stehle
mesh_terms: D000465:Algorithms; D019544:Equipment Failure Analysis / Q000379:methods*; D008027:Light; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods*; D012542:Scattering, Radiation