UV-embossed inorganic-organic hybrid nanopillars for bioapplications.
We demonstrate rapid and maskless wafer-scale fabrication of inorganic-organic hybrid nanopillars for microfluidic and mass spectrometric applications. The nanopillar features are transferred from a black silicon master to the hybrid material by UV-embossing with a composite stamp made of polydimethylsiloxane (PDMS)/hard-PDMS (h-PDMS), which allows accurate transfer of structures in the 100 nm size range. The nanopillar embossing process is extremely simple and well suited for cheap wafer-scale prototyping, as the process does not require expensive masks or stamps and even works with a standard office lamp as the exposure source. The pillars can also be fabricated on a wide variety of substrates because the hybrid material is solvent-free. The use of the hybrid nanopillars as a hydrophobic/philic platforms and as sample plates in surface assisted laser desorption ionization mass spectrometry is demonstrated.
Aura
S
S
Department of Micro and Nanosciences, Helsinki University of Technology, Fl-02015, Finland.
Jokinen
V
V
Sainiemi
L
L
Baumann
M
M
Franssila
S
S
D003460:Crystallization / Q000379:methods*; D007287:Inorganic Chemicals / Q000737:chemistry* / Q000528:radiation effects; D046911:Macromolecular Substances / Q000737:chemistry / Q000528:radiation effects; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D009930:Organic Chemicals / Q000737:chemistry* / Q000528:radiation effects; D010316:Particle Size; D013499:Surface Properties / Q000528:radiation effects; D014466:Ultraviolet Rays
D007287:Inorganic Chemicals; D046911:Macromolecular Substances; D009930:Organic Chemicals