title: Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process.
abstract: The dependence of film surface roughness and porosity on lattice size in a porous thin film deposition process is studied via kinetic Monte Carlo simulations on a triangular lattice. For sufficiently large lattice size the steady-state value of the expected film porosity has a weak dependence on the lattice size and the steady-state value of the expected surface roughness square varies linearly with lattice size. An analysis of the film morphology based on a stochastic partial differential equation description of the film surface morphology supports and explains the findings of the numerical simulations.
authors.affiliation: Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, USA.
authors.forename: Gangshi
authors.initials: G
authors.lastname: Hu
authors.forename: Jianqiao
authors.initials: J
authors.lastname: Huang
authors.forename: Gerassimos
authors.initials: G
authors.lastname: Orkoulas
authors.forename: Panagiotis D
authors.initials: PD
authors.lastname: Christofides
mesh_terms: D000327:Adsorption; D007700:Kinetics; D008956:Models, Chemical; D009010:Monte Carlo Method; D009038:Motion; D016062:Porosity; D013269:Stochastic Processes; D013499:Surface Properties; D013696:Temperature