Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD).
Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.
Liang
Xinhua
X
Department of Chemical and Biological Engineering, University of Colorado, Boulder, CO 80309, USA.
Yu
Miao
M
Li
Jianhua
J
Jiang
Ying-Bing
YB
Weimer
Alan W
AW