title: A surface acoustic wave-based immunosensing device using a nanocrystalline ZnO film on Si.
abstract: The novelty of this study resides in the fabrication of a bio-sensing device, based on the surface acoustic wave (SAW) on a nanocrystalline ZnO film. The ZnO film was deposited using an rf magnetron sputtering at room temperature on silicon. The deposited films showed the c-axis-oriented crystallite with grain size of approximately 40 nm. The immunosensing device was fabricated using photolithographic protocols on the film. As a model biomolecular recognition and immunosensing, biospecific interaction between a 6-(2,4-dinitrophenyl)aminohexanoic acid (DNP) antigen and its antibody was employed, demonstrating the shifts of resonant frequencies on SAW immunosensing device. The device exhibited a linearity as a function of the antibody concentration in the range of 20-20,000 ng/ml.
authors.affiliation: IT Convergence Components Lab., Electronics and Telecommunications Research Institute, Daejeon 305350, Korea.
authors.forename: Dae-Sik
authors.initials: DS
authors.lastname: Lee
authors.forename: Jun Hwang
authors.initials: JH
authors.lastname: Lee
authors.forename: Jikui
authors.initials: J
authors.lastname: Luo
authors.forename: Yongqing
authors.initials: Y
authors.lastname: Fu
authors.forename: William I
authors.initials: WI
authors.lastname: Milne
authors.forename: Sunglyul
authors.initials: S
authors.lastname: Maeng
authors.forename: Mun Yeon
authors.initials: MY
authors.lastname: Jung
authors.forename: Sun Hee
authors.initials: SH
authors.lastname: Park
authors.forename: Hyun C
authors.initials: HC
authors.lastname: Yoon
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D015374:Biosensing Techniques / Q000295:instrumentation*; D003460:Crystallization / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007118:Immunoassay / Q000295:instrumentation*; D008567:Membranes, Artificial; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties; D015034:Zinc Oxide / Q000737:chemistry*
chemical_list: D008567:Membranes, Artificial; D015034:Zinc Oxide; D012825:Silicon