Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process.
The dependence of film surface roughness and porosity on lattice size in a porous thin film deposition process is studied via kinetic Monte Carlo simulations on a triangular lattice. For sufficiently large lattice size the steady-state value of the expected film porosity has a weak dependence on the lattice size and the steady-state value of the expected surface roughness square varies linearly with lattice size. An analysis of the film morphology based on a stochastic partial differential equation description of the film surface morphology supports and explains the findings of the numerical simulations.
Hu
Gangshi
G
Department of Chemical and Biomolecular Engineering, University of California, Los Angeles, California 90095, USA.
Huang
Jianqiao
J
Orkoulas
Gerassimos
G
Christofides
Panagiotis D
PD
D000327:Adsorption; D007700:Kinetics; D008956:Models, Chemical; D009010:Monte Carlo Method; D009038:Motion; D016062:Porosity; D013269:Stochastic Processes; D013499:Surface Properties; D013696:Temperature