10-kV diffractive imaging using newly developed electron diffraction microscope.
A new electron diffraction microscope based on a conventional scanning electron microscope (SEM), for obtaining atomic-level resolution images without causing serious damage to the specimen, has been developed. This microscope in the relatively low-voltage region makes it possible to observe specimens at suitable resolution and record diffraction patterns. Using the microscope we accomplished 10-kV diffractive imaging with the iterative phase retrieval and reconstructed the structure of a multi-wall carbon nanotube with its finest feature corresponding to 0.34-nm carbon wall spacing. These results demonstrate the possibility of seamless connection between observing specimens by SEM and obtaining their images at high resolution by diffractive imaging.
Kamimura
Osamu
O
Central Research Laboratory, Hitachi, Ltd., 1-280, Higashi-Koigakubo Kokubunji-shi, Tokyo 185-8601, Japan. osamu.kamimura.ae@hitachi.com
Dobashi
Takashi
T
Kawahara
Kota
K
Abe
Takashi
T
Gohara
Kazutoshi
K
D046529:Microscopy, Electron, Transmission / Q000295:instrumentation* / Q000379:methods; D037742:Nanotubes, Carbon / Q000648:ultrastructure*
D037742:Nanotubes, Carbon