Wafer-scale fabrication of separated carbon nanotube thin-film transistors for display applications.
Preseparated, semiconductive enriched carbon nanotubes hold great potential for thin-film transistors and display applications due to their high mobility, high percentage of semiconductive nanotubes, and room-temperature processing compatibility. Here in this paper, we report our progress on wafer-scale processing of separated nanotube thin-film transistors (SN-TFTs) for display applications, including key technology components such as wafer-scale assembly of high-density, uniform separated nanotube networks, high-yield fabrication of devices with superior performance, and demonstration of organic light-emitting diode (OLED) switching controlled by a SN-TFT. On the basis of separated nanotubes with 95% semiconductive nanotubes, we have achieved solution-based assembly of separated nanotube thin films on complete 3 in. Si/SiO(2) wafers, and further carried out wafer-scale fabrication to produce transistors with high yield (>98%), small sheet resistance ( approximately 25 kOmega/sq), high current density ( approximately 10 microA/microm), and superior mobility ( approximately 52 cm(2) V(-1) s(-1)). Moreover, on/off ratios of >10(4) are achieved in devices with channel length L > 20 microm. In addition, OLED control circuit has been demonstrated with the SN-TFT, and the modulation in the output light intensity exceeds 10(4). Our approach can be easily scaled to large areas and could serve as critical foundation for future nanotube-based display electronics.
Wang
Chuan
C
Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA.
Zhang
Jialu
J
Ryu
Koungmin
K
Badmaev
Alexander
A
De Arco
Lewis Gomez
LG
Zhou
Chongwu
C
D003460:Crystallization / Q000379:methods*; D003626:Data Display; D004867:Equipment Design; D019544:Equipment Failure Analysis; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D036103:Nanotechnology / Q000295:instrumentation*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure; D010316:Particle Size; D013499:Surface Properties; D014173:Transistors, Electronic
D046911:Macromolecular Substances; D037742:Nanotubes, Carbon