Spatial coherence profilometry on tilted surfaces.
The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The systematic measurement error depends not only on the tilt angle but also on the parameters of the experimental setup. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry. We also suggest the conditions to obtain correct measurements by use of spatial coherence profilometry.
Pavlicek
Pavel
P
Joint Laboratory of Optics of Palacky University, Institute of Physics of the Academy of Sciences of the Czech Republic, Tr. 17 listopadu 50a, CZ-772 07 Olomouc, Czech Republic. Pavel.Pavlicek@upol.cz
Halouzka
Marek
M
Duan
Zhihui
Z
Takeda
Mitsuo
M