title: Very high frequency (beyond 100 MHz) PZT kerfless linear arrays.
abstract: This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss).
authors: NIH Center for Ultrasonic Transducer Technol., Univ. of Southern California, Los Angeles, CA, USA. daweiwu@usc.edu
authors: Da-Wei
authors: DW
authors: Wu
authors: Qifa
authors: Q
authors: Zhou
authors: Xuecang
authors: X
authors: Geng
authors: Chang-Geng
authors: CG
authors: Liu
authors: Frank
authors: F
authors: Djuth
authors: K Kirk
authors: KK
authors: Shung
mesh_terms: D002516:Ceramics / Q000737:chemistry; D002857:Chromium / Q000737:chemistry; D006046:Gold / Q000737:chemistry; D007854:Lead / Q000737:chemistry*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008855:Microscopy, Electron, Scanning; D014025:Titanium / Q000737:chemistry*; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*; D015040:Zirconium / Q000737:chemistry*
chemical_list: D002857:Chromium; C065536:lead titanate zirconate; D007854:Lead; D006046:Gold; D015040:Zirconium; D014025:Titanium