title: Stretchable interconnections for flexible electronic systems.
abstract: Sensors, actuators and integrated circuits (IC) can be encapsulated together on an elastic substrate, which makes a flexible electronic system. In this system, electrical interconnections that can sustain large and reversible stretching are in great need. This paper is devoted to the fabrication of highly stretchable metal interconnections. Transfer printing technology is utilized, which mainly involves the transfer of 100-nm-thick gold ribbons from silicon wafers to pre-stretched elastic substrates. After the elastic substrates relax from the pre-strain, the gold ribbons buckle and form wavy geometries. These wavy geometries change in shapes to accommodate the applied strain and can be reversely stretched without cracks or fractures occurring, which will greatly raise the stretchability of the gold ribbons. As an application example, some of these wavy ribbons can accommodate high levels of stretching (up to 100%) and bending (with curvature radius down to 1.20 mm). Moreover, the efficiency and reliability of the transfer, especially for slender ribbons, have been increased due to the improvement of the technology. All the characteristics above will permit making stretchable gold conductors as interconnections for flexible electronic systems such as implantable medical systems and smart clothes.
authors: Institute of Microelectronics, Tsinghua University, Beijing 100084, China. linjh.thu@gmail.com
authors: Lin
authors: L
authors: Jianhui
authors: Yan
authors: Y
authors: Bing
authors: Wu
authors: W
authors: Xiaoming
authors: Ren
authors: R
authors: Tianling
authors: Liu
authors: L
authors: Litian
mesh_terms: D001698:Biomedical Engineering / Q000379:methods; D004553:Electric Conductivity; D004581:Electronics / Q000295:instrumentation*; D004582:Electronics, Medical / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D006046:Gold; D006801:Humans; D008422:Materials Testing; D008670:Metals / Q000737:chemistry; D008855:Microscopy, Electron, Scanning / Q000379:methods; D011312:Pressure; D012825:Silicon; D013499:Surface Properties
chemical_list: D008670:Metals; D006046:Gold; D012825:Silicon