Analysis of multilayered thin-film piezoelectric transducer arrays.
We study coupled extensional and flexural vibrations of a 1-D array of partially electroded, multilayered piezoelectric transducers. The classical theory for laminated plates is used. A theoretical solution is obtained. Based on the solution, basic vibration characteristics of resonant frequencies, mode shapes, and admittance are calculated. Their dependence on geometric parameters is examined. The present analysis represents a significant progress of existing analyses on a single cell of a transducer array.
Li
Hui
H
Institute of Astronautics and Aeronautics, University of Electronic Science and Technology, Chengdu, China.
Du
Hualong
H
Xu
Limei
L
Hu
Yuantai
Y
Fan
Hui
H
Yang
Jiashi
J
D000162:Acoustics / Q000295:instrumentation*; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers
D008567:Membranes, Artificial