A laser interferometer for measuring straightness and its position based on heterodyne interferometry.
Not only the magnitude but also the position of straightness errors are of concern to users. However, current laser interferometers used for measuring straightness seldom give the relative position of the straightness error. To solve this problem, a laser interferometer for measuring straightness and its position based on heterodyne interferometry is proposed. The optical configuration of the interferometer is designed and the measurement principle is analyzed theoretically. Two experiments were carried out. The first experiment verifies the validity and repeatability of the interferometer by measuring a linear stage. Also, the second one for measuring a flexure-hinge stage demonstrates that the interferometer is capable of nanometer measurement accuracy. These results show that this interferometer has advantages of simultaneously measuring straightness error and the relative position with high precision, and a compact structure.
Chen
Benyong
B
Nanometer Measurement Lab, Zhejiang Sci-tech University, Hangzhou 310018, China. chenby@zstu.edu.cn
Zhang
Enzheng
E
Yan
Liping
L
Li
Chaorong
C
Tang
Wuhua
W
Feng
Qibo
Q