A nano grating tunable MEMS optical filter for high-speed on-chip multispectral fluorescent detection.
We report a microelectromechanical (MEMS) tunable optical filter and its integration in a fluorescence microscope for high speed on-chip spectral measurements. This integration allows for measurements of any fluorescence sample placed onto the microscope stage. We demonstrate the system capabilities by taking spectral measurements of multicolor fluorescent beads and fluorescently labeled cells passing through a microfluidic cytometer. The system has applications in biological studies where the measurement of multiple fluorescent peaks is restricted by the detection method's speed and sensitivity.
Truxal
Steven C
SC
Department of Mechanical Engineering, University of Michigan, MI, USA.
Huang
Nien-Tsu
NT
Kurabayashi
Katsuo
K
D045744:Cell Line, Tumor; D005374:Filtration / Q000295:instrumentation*; D006801:Humans; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D008856:Microscopy, Fluorescence; D036103:Nanotechnology / Q000295:instrumentation*; D055096:Optical Devices; D011108:Polymers / Q000737:chemistry; D012825:Silicon / Q000737:chemistry; D013050:Spectrometry, Fluorescence
D011108:Polymers; D012825:Silicon