title: Optofluidic encapsulation and manipulation of silicon microchips using image processing based optofluidic maskless lithography and railed microfluidics.
abstract: We demonstrate optofluidic encapsulation of silicon microchips using image processing based optofluidic maskless lithography and manipulation using railed microfluidics. Optofluidic maskless lithography is a dynamic photopolymerization technique of free-floating microstructures within a fluidic channel using spatial light modulator. Using optofluidic maskless lithography via computer-vision aided image processing, polymer encapsulants are fabricated for chip protection and guiding-fins for efficient chip conveying within a fluidic channel. Encapsulated silicon chips with guiding-fins are assembled using railed microfluidics, which is an efficient guiding and heterogeneous self-assembly system of microcomponents. With our technology, externally fabricated silicon microchips are encapsulated, fluidically guided and self-assembled potentially enabling low cost fluidic manipulation and assembly of integrated circuits.
authors: School of Electrical Engineering and Computer Science, Seoul National University, Seoul, 151-744, South Korea.
authors: Su Eun
authors: SE
authors: Chung
authors: Seung Ah
authors: SA
authors: Lee
authors: Jiyun
authors: J
authors: Kim
authors: Sunghoon
authors: S
authors: Kwon
mesh_terms: D007090:Image Interpretation, Computer-Assisted; D046210:Microfluidic Analytical Techniques / Q000191:economics / Q000295:instrumentation* / Q000379:methods*; D055095:Optics and Photonics; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon