Laser direct writing using submicron-diameter fibers.
In this paper, a novel direct writing technique using submicron-diameter fibers is presented. The submicron-diameter fiber probe serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. Experiments demonstrate that submicron-diameter fiber direct writing has some advantages: simple process, 350-nm-resolution (lower than 442-nm-wavelength), large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.
Tian
Feng
F
State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China.
Yang
Guoguang
G
Bai
Jian
J
Xu
Jianfeng
J
Hou
Changlun
C
Liang
Yiyong
Y
Wang
Kaiwei
K
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007834:Lasers; D008904:Miniaturization; D049329:Nanostructures / Q000528:radiation effects* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D055100:Optical Fibers; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity