title: High resolution interferometer with multiple-pass optical configuration.
abstract: An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.
authors.affiliation: Division of Mechanical Engineering, KAIST, 335 Gwahangno, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
authors.forename: Jeongho
authors.initials: J
authors.lastname: Ahn
authors.forename: Jong-Ahn
authors.initials: JA
authors.lastname: Kim
authors.forename: Chu-Shik
authors.initials: CS
authors.lastname: Kang
authors.forename: Jae-Wan
authors.initials: JW
authors.lastname: Kim
authors.forename: Soohyun
authors.initials: S
authors.lastname: Kim
mesh_terms: D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D007834:Lasers; D008027:Light; D055096:Optical Devices; D055095:Optics and Photonics; D012031:Refractometry / Q000295:instrumentation / Q000379:methods; D015203:Reproducibility of Results; D012984:Software