title: One-step fabrication of nanostructures by femtosecond laser for surface-enhanced Raman scattering.
abstract: This paper reports an efficient fabrication of nanostructures on silicon substrates for surface-enhanced Raman scattering (SERS). Silicon wafer substrates in the aqueous solution of silver nitrate were machined by the femtosecond laser direct writing to achieve simultaneously in one-step the generation of grating-like nanostructures on the surface of the substrate and the formation of silver nanoparticles on the surface of the nanostructures via the laser-induced photoreduction effect. Parametric studies were conducted for the different concentrations of aqueous silver nitrate solutions and scanning speeds. The enhancement factor of the SERS is found to be higher than 10(9). The patterning technique provides an opportunity to incorporate the SERS capability in a functional microchip.
authors.affiliation: Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan.
authors.forename: Cheng-Hsiang
authors.initials: CH
authors.lastname: Lin
authors.forename: Lan
authors.initials: L
authors.lastname: Jiang
authors.forename: Yen-Hsin
authors.initials: YH
authors.lastname: Chai
authors.forename: Hai
authors.initials: H
authors.lastname: Xiao
authors.forename: Shean-Jen
authors.initials: SJ
authors.lastname: Chen
authors.forename: Hai-Lung
authors.initials: HL
authors.lastname: Tsai
mesh_terms: D004867:Equipment Design; D007834:Lasers; D008027:Light; D053768:Metal Nanoparticles / Q000737:chemistry; D046208:Microchip Analytical Procedures; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics; D012825:Silicon / Q000737:chemistry*; D012835:Silver Nitrate / Q000737:chemistry; D013059:Spectrum Analysis, Raman / Q000379:methods*
chemical_list: D012835:Silver Nitrate; D012825:Silicon