High resolution interferometer with multiple-pass optical configuration.
An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.
Ahn
Jeongho
J
Division of Mechanical Engineering, KAIST, 335 Gwahangno, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
Kim
Jong-Ahn
JA
Kang
Chu-Shik
CS
Kim
Jae-Wan
JW
Kim
Soohyun
S
D004867:Equipment Design; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D007834:Lasers; D008027:Light; D055096:Optical Devices; D055095:Optics and Photonics; D012031:Refractometry / Q000295:instrumentation / Q000379:methods; D015203:Reproducibility of Results; D012984:Software