title: Laser direct writing using submicron-diameter fibers.
abstract: In this paper, a novel direct writing technique using submicron-diameter fibers is presented. The submicron-diameter fiber probe serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. Experiments demonstrate that submicron-diameter fiber direct writing has some advantages: simple process, 350-nm-resolution (lower than 442-nm-wavelength), large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.
authors.affiliation: State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China.
authors.forename: Feng
authors.initials: F
authors.lastname: Tian
authors.forename: Guoguang
authors.initials: G
authors.lastname: Yang
authors.forename: Jian
authors.initials: J
authors.lastname: Bai
authors.forename: Jianfeng
authors.initials: J
authors.lastname: Xu
authors.forename: Changlun
authors.initials: C
authors.lastname: Hou
authors.forename: Yiyong
authors.initials: Y
authors.lastname: Liang
authors.forename: Kaiwei
authors.initials: K
authors.lastname: Wang
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007834:Lasers; D008904:Miniaturization; D049329:Nanostructures / Q000528:radiation effects* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D055100:Optical Fibers; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity