title: NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators.
abstract: Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.
authors.affiliation: Department of Physics, Università di Trento, Via Sommarive 14, I-38123 Povo (Trento), Italy. guider@science.unitn.it
authors.forename: Romain
authors.initials: R
authors.lastname: Guider
authors.forename: Nicola
authors.initials: N
authors.lastname: Daldosso
authors.forename: Alessandro
authors.initials: A
authors.lastname: Pitanti
authors.forename: Emmanuel
authors.initials: E
authors.lastname: Jordana
authors.forename: Jean-Marc
authors.initials: JM
authors.lastname: Fedeli
authors.forename: Lorenzo
authors.initials: L
authors.lastname: Pavesi