NanoSi low loss horizontal slot waveguides coupled to high Q ring resonators.
Si-based horizontal slot waveguides coupled to ring resonators have been fabricated and characterised. The central layer of the slot has been filled by Silicon nanocrystals (Si-nc) obtained by deposition of silicon rich silicon oxide and then thermal annealing. A comparison of various deposition and annealing parameters to form the Si-nc is performed. Propagation losses as low as 3 dB/cm and ring resonator quality factor of 30,000 have been achieved at 1550 nm.
Guider
Romain
R
Department of Physics, Università di Trento, Via Sommarive 14, I-38123 Povo (Trento), Italy. guider@science.unitn.it
Daldosso
Nicola
N
Pitanti
Alessandro
A
Jordana
Emmanuel
E
Fedeli
Jean-Marc
JM
Pavesi
Lorenzo
L