title: Microfluidic probe: a new tool for integrating microfluidic environments and electronic wafer-probing.
abstract: We demonstrate a new tool for integrating microfluidic channels with commonly used electronic probing techniques. The "microfluidic probe" allows rapid and repeatable fluidic and electronic addressing of small die sites on a variety of substrate types without the need for permanent modification or dicing of the device wafers. We also use the probe to demonstrate locally patterned chemical modification of a substrate. The probes are easily fabricated using standard soft-lithography and basic machining making this a widely accessible technique for electronics and fluidics researchers.
authors.affiliation: Department of Electrical Engineering, Yale University, New Haven, CT, USA.
authors.forename: David A
authors.initials: DA
authors.lastname: Routenberg
authors.forename: Mark A
authors.initials: MA
authors.lastname: Reed
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation / Q000379:methods*; D004563:Electrochemistry; D004867:Equipment Design; D056656:Lab-On-A-Chip Devices; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation / Q000379:methods*; D014173:Transistors, Electronic