title: Development of an on-line isotope dilution laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) method for determination of boron in silicon wafers.
abstract: A method has been developed based on an on-line isotope dilution technique couple with laser ablation/inductively coupled plasma mass spectrometry (LA-ICP-MS), for the determination of boron in p-type silicon wafers. The laser-ablated sample aerosol was mixed on-line with an enriched boron aerosol supplied continuously using a conventional nebulization system. Upon mixing the two aerosol streams, the isotope ratio of boron changed rapidly and was then recorded by the ICP-MS system for subsequent quantification based on the isotope dilution principle. As an on-line solid analysis method, this system accurately quantifies boron concentrations in silicon wafers without the need for an internal or external solid reference standard material. Using this on-line isotope dilution technique, the limit of detection for boron in silicon wafers is 2.8x10(15)atomscm(-3). The analytical results obtained using this on-line methodology agree well with those obtained using wet chemical digestion methods for the analysis of p-type silicon wafers containing boron concentrations ranging from 1.0x10(16) to 9.6x10(18)atomscm(-3).
authors.affiliation: Department of Chemistry, National Tsing-Hua University, Hsinchu, Taiwan.
authors.forename: Chao-Kai
authors.initials: CK
authors.lastname: Yang
authors.forename: Po-Hsiang
authors.initials: PH
authors.lastname: Chi
authors.forename: Yong-Chine
authors.initials: YC
authors.lastname: Lin
authors.forename: Yuh-Chang
authors.initials: YC
authors.lastname: Sun
authors.forename: Mo-Hsiung
authors.initials: MH
authors.lastname: Yang
mesh_terms: D053000:Analytic Sample Preparation Methods; D001895:Boron / Q000032:analysis*; D002138:Calibration; D053685:Laser Therapy; D013058:Mass Spectrometry / Q000379:methods* / Q000592:standards; D009862:Online Systems; D012015:Reference Standards; D012825:Silicon / Q000737:chemistry*
chemical_list: D001895:Boron; D012825:Silicon