title: Supercritical fluids for the fabrication of semiconductor devices: emerging or missed opportunities?
authors.affiliation: Polymer Science and Engineering Department, University of Massachusetts-Amherst, Amherst, Massachusetts 01003, USA.
authors.forename: Alvin H
authors.initials: AH
authors.lastname: Romang
authors.forename: James J
authors.initials: JJ
authors.lastname: Watkins