title: A low power, on demand electrothermal valve for wireless drug delivery applications.
abstract: We present a low power, on demand Parylene MEMS electrothermal valve. A novel Omega-shaped thermal resistive element requires low power (approximately mW) and enables rapid valve opening (approximately ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve opening performance in water was obtained. In addition, a thermistor, as an inrush current limiter, was added into the valve circuit to provide variable current ramping. Wireless activation of the valve using RF inductive power transfer was demonstrated.
authors.affiliation: Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA.
authors.forename: Po-Ying
authors.initials: PY
authors.lastname: Li
authors.forename: Tina K
authors.initials: TK
authors.lastname: Givrad
authors.forename: Roya
authors.initials: R
authors.lastname: Sheybani
authors.forename: Daniel P
authors.initials: DP
authors.lastname: Holschneider
authors.forename: Jean-Michel I
authors.initials: JM
authors.lastname: Maarek
authors.forename: Ellis
authors.initials: E
authors.lastname: Meng
mesh_terms: D016503:Drug Delivery Systems / Q000295:instrumentation*; D011211:Electric Power Supplies; D004867:Equipment Design; D056656:Lab-On-A-Chip Devices; D008567:Membranes, Artificial; D044085:Microfluidics / Q000295:instrumentation*; D008962:Models, Theoretical; D011108:Polymers / Q000737:chemistry; D013696:Temperature; D014992:Xylenes / Q000737:chemistry
chemical_list: D008567:Membranes, Artificial; D011108:Polymers; D014992:Xylenes; C011055:parylene