title: Design of error-compensating algorithms for sinusoidal phase shifting interferometry.
abstract: An improved approach to interferometry using sinusoidal phase shifting balances several harmonic components in the interference signal against each other. The resulting computationally efficient phase-estimation algorithms have low sensitivity to errors such as spurious intensity noise, vibration, and errors in the phase shift pattern. Specific example algorithms employing 8 and 12 camera frames illustrate design principles that are extendable to algorithms of any length for applications that would benefit from a simplified, sinusoidal phase shift.
authors.affiliation: Zygo Corporation, Laurel Brook Road, Middlefield, Connecticut 06457, USA. peterd@zygo.com
authors.forename: Peter
authors.initials: P
authors.lastname: de Groot