title: Flexible fabrication of three-dimensional optical-domain photonic crystals using a combination of single-laser-exposure diffractive-optics lithography and template inversion.
abstract: We demonstrate inversion of three-dimensional photonic crystal templates fabricated in a large area with diffractive-optics lithography. A custom-designed two-dimensional diffractive optical element was used to generate highly uniform, bicontinuous, three-dimensional photonic crystal templates in a single-laser exposure. Chemical vapor deposition successfully infiltrated the thick periodic polymer structure to deposit amorphous silica and thereby define an all-silica inverted photonic crystal after polymer removal, as confirmed by focused ion-beam milling and energy-dispersive x-ray spectroscopy. The diffractive-optics lithography permitted a large number of uniform layers to form that manifested in the recording of a strong -28 dB stopband in the telecom band.
authors.affiliation: Department of Electrical and Computer Engineering and Institute for Optical Sciences, University of Toronto,Toronto, Ontario, Canada, M5S 3G4. debashis.chanda@utoronto.ca
authors.forename: Debashis
authors.initials: D
authors.lastname: Chanda
authors.forename: Nicole
authors.initials: N
authors.lastname: Zachari
authors.forename: Moez
authors.initials: M
authors.lastname: Haque
authors.forename: Mi Li
authors.initials: ML
authors.lastname: Ng
authors.forename: Peter R
authors.initials: PR
authors.lastname: Herman