Ultrathin alumina membranes for surface nanopatterning in fabricating quantum-sized nanodots.
Using ultrathin alumina membranes (UTAMs) as evaporation or etching masks large-scale ordered arrays of surface nanostructures can be synthesized on substrates. However, it is a challenge for this technique to synthesize quantum-sized surface structures. Here an innovative approach to prepare UTAMs with regularly arrayed pores in the quantum size range is reported. This new approach is based on a well-controlled pore-opening process and a modulated anodization process. Using UTAMs with quantum-sized pores for the surface patterning process, ordered arrays of quantum dots are synthesized on silicon substrates. This is the first time in realizing large-scale regularly arrayed surface structures in the quantum size range using the UTAM technique, which is an important breakthrough in the field of surface nanopatterning.
Wu
Minghong
M
Institute of Nanochemistry and Nanobiology School of Environmental and Chemical Engineering Shanghai University, Shanghai 201800, PR China.
Wen
Liaoyong
L
Lei
Yong
Y
Ostendorp
Stefan
S
Chen
Kai
K
Wilde
Gerhard
G
D000537:Aluminum Oxide / Q000737:chemistry*; D008567:Membranes, Artificial; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D045663:Quantum Dots
D008567:Membranes, Artificial; D000537:Aluminum Oxide