A low power, on demand electrothermal valve for wireless drug delivery applications.
We present a low power, on demand Parylene MEMS electrothermal valve. A novel Omega-shaped thermal resistive element requires low power (approximately mW) and enables rapid valve opening (approximately ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve opening performance in water was obtained. In addition, a thermistor, as an inrush current limiter, was added into the valve circuit to provide variable current ramping. Wireless activation of the valve using RF inductive power transfer was demonstrated.
Li
Po-Ying
PY
Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA.
Givrad
Tina K
TK
Sheybani
Roya
R
Holschneider
Daniel P
DP
Maarek
Jean-Michel I
JM
Meng
Ellis
E
D016503:Drug Delivery Systems / Q000295:instrumentation*; D011211:Electric Power Supplies; D004867:Equipment Design; D056656:Lab-On-A-Chip Devices; D008567:Membranes, Artificial; D044085:Microfluidics / Q000295:instrumentation*; D008962:Models, Theoretical; D011108:Polymers / Q000737:chemistry; D013696:Temperature; D014992:Xylenes / Q000737:chemistry
D008567:Membranes, Artificial; D011108:Polymers; D014992:Xylenes; C011055:parylene