Change in piezoelectric boundary acoustic wave characteristics with overlay and metal grating materials.
This paper describes how the characteristics of shear-horizontal type piezoelectric boundary acoustic waves (PBAWs) change with combination of different overlay and metal grating materials. It is shown that PBAWs are supported in various structures provided that highly piezoelectric material(s) are employed as structural member(s). For verification, numerical simulation of different material combinations is done. The results are in good agreement with the qualitative prediction. That is, large electromechanical coupling factor K(2) is obtainable when materials having small mass densities shear modulus c(44) and shear velocity VBS; and materials having extremely large shear modulus c(44) are chosen, respectively, for overlay and metallic grating. When YX-LiNbO(3) is assumed as a substrate, for example, the best choice seems to be SiO(2) and Au for overlay and metallic grating, respectively. Although metals with extremely large rho and c(44) such as W and Ta offer large K(2), they may not be acceptable for practical PBAW applications because of their large electric resistivity.
Wang
Yiliu
Y
Graduate School of Engineering, Chiba University, Chiba, Japan. wangyiliu@gmail.com
Hashimoto
Ken-ya
KY
Omori
Tatsuya
T
Yamaguchi
Masatsune
M
D000162:Acoustics; D003198:Computer Simulation; D055617:Micro-Electrical-Mechanical Systems; D008962:Models, Theoretical; D009556:Niobium / Q000737:chemistry*; D010087:Oxides / Q000737:chemistry*; D012031:Refractometry / Q000379:methods*; D012542:Scattering, Radiation
D010087:Oxides; D009556:Niobium; C091692:lithium niobate