title: Electron probe microanalysis of thin films and multilayers using the computer program XFILM.
abstract: XFILM is a computer program for determining the thickness and composition of thin films on substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.
authors.affiliation: Serveis Cientificotècnics, Universitat de Barcelona, Lluís Solé i Sabarís 1-3, 08028 Barcelona, Spain. xavier@sct.ub.es
authors.forename: Xavier
authors.initials: X
authors.lastname: Llovet
authors.forename: Claude
authors.initials: C
authors.lastname: Merlet