title: Deterministic assembly of channeling cracks as a tool for nanofabrication.
abstract: To address the necessity for a predictive computational tool for layout design in crack lithography, a tool for nanowire fabrication, a computational study is carried out using finite element analysis, where crack-free edge and crack-crack interactions are studied for various material combinations. While the first scenario addresses the ability to induce a controlled curvature in a nanowire, the latter provides an estimation of the minimum distance which can be kept between two straight nanowires. The computational study is accompanied by an experimental demonstration on Si/SiO2 multilayers. Finite element results are found to be well aligned with experimental observations and theoretical predictions. Stronger interaction is evident with a curved crack front modeling as well as with increasing first and decreasing second Dundurs' parameters. Therefore cracks can be packed closer with decreasing film stiffness.
authors.affiliation: Department of Mechanical Engineering, Koc University, Rumeli Feneri Yolu, 34450 Sariyer, Istanbul, Turkey. ealaca@ku.edu.tr
authors.forename: B
authors.initials: B
authors.lastname: Erdem Alaca
authors.forename: Can
authors.initials: C
authors.lastname: Ozcan
authors.forename: Gunay
authors.initials: G
authors.lastname: Anlas