Uncertainty of a hybrid surface temperature sensor for silicon wafers and comparison with an embedded thermocouple.
We have developed a user-friendly hybrid surface temperature sensor. The uncertainties of temperature readings associated with this sensor and a thermocouple embedded in a silicon wafer are compared. The expanded uncertainties (k=2) of the hybrid temperature sensor and the embedded thermocouple are 2.11 and 2.37 K, respectively, in the temperature range between 600 and 1000 K. In the present paper, the uncertainty evaluation and the sources of uncertainty are described.
Iuchi
Tohru
T
Department of Mechanical Engineering, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan. iuchi@toyonet.toyo.ac.jp
Gogami
Atsushi
A