Thin film Ag superlens towards lab-on-a-chip integration.
A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.
Jeppesen
C
C
1Department of Micro and Nanotechnology, Technical University of Denmark, DTU Nanotech, DTU-building 345 east, DK-2800 Kongens Lyngby, Denmark.
Nielsen
R B
RB
Boltasseva
A
A
Xiao
S
S
Mortensen
N A
NA
Kristensen
A
A
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008567:Membranes, Artificial; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D012834:Silver / Q000737:chemistry*; D018511:Systems Integration
D008567:Membranes, Artificial; D012834:Silver