Patterned p-doping of InAs nanowires by gas-phase surface diffusion of Zn.
Gas phase p-doping of InAs nanowires with Zn atoms is demonstrated as an effective route for enabling postgrowth dopant profiling of nanostructures. The versatility of the approach is demonstrated by the fabrication of high-performance gated diodes and p-MOSFETs. High Zn concentrations with electrically active content of approximately 1 x 10(19) cm(-3) are achieved which is essential for compensating the electron-rich surface layers of InAs to enable heavily p-doped structures. This work could have important practical implications for the fabrication of planar and nonplanar devices based on InAs and other III-V nanostructures which are not compatible with conventional ion implantation processes that often cause severe lattice damage with local stoichiometry imbalance.
Ford
Alexandra C
AC
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, California 94720, USA.
Chuang
Steven
S
Ho
Johnny C
JC
Chueh
Yu-Lun
YL
Fan
Zhiyong
Z
Javey
Ali
A