Subwavelength silicon microcavities.
We present a study of the first silicon microdisk resonators which are smaller than the free-space resonant wavelength in all spatial dimensions. Spectral details of whispering gallery modes with azimuthal mode number m = 4-7 are measured in microdisks with diameters between 1.35 and 1.89microm and are studied at wavelengths from 1.52 to 1.62microm. For the structures considered here, m = 5 is the highest azimuthal mode order in a subwavelength cavity and has measured Q = 1250. These results agree well with theoretical calculations using a finite difference frequency domain method and fit an exponential scaling law relating Q to disk radius via m.
Shainline
Jeffrey
J
Department of Physics, 184 Hope St., Brown University, Providence, RI 02912, USA. jeffrey.shainline@gmail.com
Elston
Stuart
S
Liu
Zhijun
Z
Fernandes
Gustavo
G
Zia
Rashid
R
Xu
Jimmy
J
D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization; D055096:Optical Devices; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D014159:Transducers
D012825:Silicon