title: A sensitive half-shadow ellipsometer.
abstract: The ellipsometer described herein uses a He-Ne laser as monochromatic light source, and, in the analysis system, a sensitive elliptic detector namely the Bravais-Zakrzewski-Perucca biplate. The use of this biplate allows better accuracy in measurements. Furthermore, a method of measuring and evaluating the results is described which includes, but is not limited to, conventional methods.
authors.forename: F
authors.initials: F
authors.lastname: Demichelis
authors.forename: M
authors.initials: M
authors.lastname: Maja
authors.forename: P
authors.initials: P
authors.lastname: Valabrega