The application of intensity transients in ellipsometry.
The measurement of intensity offers a means of obtaining faster ellipsometric readings than are possible by manual nulling techniques. An analysis of the theoretical intensity relations gives rise to a technique of separately determining the changes in Delta and psi by the use of successive transients. An experimental verification of the technique for the oxidation of iron was obtained.
Brusic
V
V
Genshaw
M A
MA
Cahan
B D
BD