Nouveau procédé d'observation du profil et de l'éetat des surfaces par microscopie électronique; applications à l'optique.
In the first part of this paper, we show how great is the interest, from the optical point of view, of obtaining as precise as possible a determination of the shape of the surfaces. The first examples given deal with thin films; then we consider the optical gratings: here the problem is particularly important, for the true shape of the grooves, which is often different from the ideal, has a direct repercussion on the efficiency. The usual methods employed in electron microscopy do not reveal with a sufficiently good precision the topography of the surfaces. We describe the technique we have devised: it gives an image of the profile of these surfaces and enables us to know their true shape. A number of photographs obtained on thin films of CaF(2) and Se, and also on optical gratings, provide illustrations of the capabilities of this new method of observation by electron microscopy.
Bousquet
P
P
Capella
L
L
Fornier
A
A
Gonella
J
J