title: Deposition dynamics of hydrogenated silicon clusters on a crystalline silicon substrate under typical plasma conditions.
abstract: We have studied the deposition dynamics of hydrogenated silicon clusters on a silicon substrate for various cluster sizes and impact energies. The results show that the interaction processes of silicon nanocrystals with a crystalline silicon substrate strongly depend on the impact energy ranging from elastic scattering over soft-landing to cluster destruction with penetration of some cluster atoms into the substrate. Under certain conditions, epitaxial-like recrystallization of clusters has been observed after the initial cluster structure was completely lost upon surface impact. The reaction mechanisms as a function of impact energy are in good agreement with recent experimental results.
authors.affiliation: LPICM, Ecole Polytechnique, CNRS, 91128 Palaiseau, France. ning@leonardo.polytechnique.fr
authors.forename: Ning
authors.initials: N
authors.lastname: Ning
authors.forename: Holger
authors.initials: H
authors.lastname: Vach