title: Elastic constants and dimensions of imprinted polymeric nanolines determined from Brillouin light scattering.
abstract: Elastic constants and cross-sectional dimensions of imprinted nanolines of poly(methyl methacrylate) (PMMA) on silicon substrates are determined nondestructively from finite-element inversion analysis of dispersion curves of hypersonic acoustic modes of these nanolines measured with Brillouin light scattering. The results for the cross-sectional dimensions, under the simplifying assumption of vertical sides and a semicircular top, are found to be consistent with dimensions determined from critical-dimension small-angle x-ray scattering measurements. The elastic constants C(11) and C(44) are found to be, respectively, 11.6% and 3.1% lower than their corresponding values for bulk PMMA. This result is consistent with the dimensional dependence of the quasi-static Young's modulus determined from buckling measurements on PMMA films with lower molecular weights. This study provides the first evidence of size-dependent effects on hypersonic elastic properties of polymers.
authors.affiliation: Materials Reliability Division, National Institute of Standards and Technology, Boulder, CO 80305, USA.
authors.forename: W L
authors.initials: WL
authors.lastname: Johnson
authors.forename: S A
authors.initials: SA
authors.lastname: Kim
authors.forename: R
authors.initials: R
authors.lastname: Geiss
authors.forename: C M
authors.initials: CM
authors.lastname: Flannery
authors.forename: C L
authors.initials: CL
authors.lastname: Soles
authors.forename: C
authors.initials: C
authors.lastname: Wang
authors.forename: C M
authors.initials: CM
authors.lastname: Stafford
authors.forename: W-L
authors.initials: WL
authors.lastname: Wu
authors.forename: J M
authors.initials: JM
authors.lastname: Torres
authors.forename: B D
authors.initials: BD
authors.lastname: Vogt
authors.forename: P R
authors.initials: PR
authors.lastname: Heyliger