title: Nanoscale, electrified liquid jets for high-resolution printing of charge.
abstract: Nearly all research in micro- and nanofabrication focuses on the formation of solid structures of materials that perform some mechanical, electrical, optical, or related function. Fabricating patterns of charges, by contrast, is a much less well explored area that is of separate and growing interesting because the associated electric fields can be exploited to control the behavior of nanoscale electronic and mechanical devices, guide the assembly of nanomaterials, or modulate the properties of biological systems. This paper describes a versatile technique that uses fine, electrified liquid jets formed by electrohydrodynamics at micro- and nanoscale nozzles to print complex patterns of both positive and negative charges, with resolution that can extend into the submicrometer and nanometer regime. The reported results establish the basic aspects of this process and demonstrate the capabilities through printed patterns with diverse geometries and charge configurations in a variety of liquid inks, including suspensions of nanoparticles and nanowires. The use of printed charge to control the properties of silicon nanomembrane transistors provides an application example.
authors.affiliation: Department of Materials Science & Engineering, Beckman Institute, and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.
authors.forename: Jang-Ung
authors.initials: JU
authors.lastname: Park
authors.forename: Sangkyu
authors.initials: S
authors.lastname: Lee
authors.forename: Sakulsuk
authors.initials: S
authors.lastname: Unarunotai
authors.forename: Yugang
authors.initials: Y
authors.lastname: Sun
authors.forename: Simon
authors.initials: S
authors.lastname: Dunham
authors.forename: Taeseup
authors.initials: T
authors.lastname: Song
authors.forename: Placid M
authors.initials: PM
authors.lastname: Ferreira
authors.forename: Andrew G
authors.initials: AG
authors.lastname: Alleyene
authors.forename: Ungyu
authors.initials: U
authors.lastname: Paik
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
mesh_terms: D000838:Anions; D015374:Biosensing Techniques; D002412:Cations; D004581:Electronics; D004867:Equipment Design; D006801:Humans; D008422:Materials Testing; D018625:Microscopy, Atomic Force / Q000379:methods; D008855:Microscopy, Electron, Scanning / Q000379:methods; D053758:Nanoparticles / Q000737:chemistry; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry
chemical_list: D000838:Anions; D002412:Cations; D012825:Silicon