Fabrication of planar organic nanotransistors using low temperature thermal nanoimprint lithography for chemical sensor applications.
A new fabrication process for the patterning of organic semiconductors at the nanoscale has been developed using low temperature thermal nanoimprint lithography and the details of this process are discussed. Novel planar nanotransistors have been fabricated and characterized from poly(3-hexylthiophene) (P3HT) and we demonstrate the feasibility of using such devices as highly sensitive chemical sensors.
Kettle
J
J
Microelectronics and Nanostructures Group, School of Electrical and Electronics Engineering, University of Manchester, Sackville Street, Manchester M60 1QD, UK.
Whitelegg
S
S
Song
A M
AM
Wedge
D C
DC
Kotacka
L
L
Kolarik
V
V
Madec
M B
MB
Yeates
S G
SG
Turner
M L
ML