A sensitive half-shadow ellipsometer.
The ellipsometer described herein uses a He-Ne laser as monochromatic light source, and, in the analysis system, a sensitive elliptic detector namely the Bravais-Zakrzewski-Perucca biplate. The use of this biplate allows better accuracy in measurements. Furthermore, a method of measuring and evaluating the results is described which includes, but is not limited to, conventional methods.
Demichelis
F
F
Maja
M
M
Valabrega
P
P