title: Rapid scanning microscope for light probing and infrared mapping.
abstract: A rapid scanning microscope has been designed and used to light-probe the response of semiconductor devices and to observe their infrared emission and transmission. The heart of this system is a single mirror that vibrates on two perpendicular axes to deflect a light beam into a raster pattern. The single mirror scanner is relatively easy to construct, can be used with standard microscope components, and yet allows for useful wide angle deflections and a large field of view.
authors.forename: R J
authors.initials: RJ
authors.lastname: Phelan
authors.forename: N L
authors.initials: NL
authors.lastname: Demeo