title: Formulas for the Derivatives of the Complex Index of Refraction with Respect to Delta, psi, phi, and d.
abstract: Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Delta and psi, the angle of incidence phi, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.
authors.forename: D H
authors.initials: DH
authors.lastname: Loescher