title: Dual channel heterodyne microscope.
abstract: Heterodyne measurement of the amplitude and phase of a cross-polarized two-frequency laser beam reflected from a patterned surface enables simultaneous imaging in both the amplitude and phase-contrast modes. Such imaging duality provides additional information for inspection. Besides, spatial resolution in the phase-contrast mode of operation is not limited by the width of the focused beam and, therefore, may be better than that of traditional imaging techniques. This phenomenon, commonly referred to as super-resolution, was experimentally observed.
authors.affiliation: Samsung Electronics, Mechatronics Center, 416, Maetan-3Dong, Yeongtong-Gu, Suwon-City, Gyeonggi-Do 442-600, South Korea. proto.vladimir@samsung.com
authors.forename: V
authors.initials: V
authors.lastname: Protopopov