Fabrication of nanostripe surface structure by multilayer film deposition combined with micropatterning.
Top-down fabrication processes for nanostructures are superior to bottom-up processes from the aspect of long-range order, but have limitations in their processing time and/or material selection. Here we developed a nanopatterning method for 'nanostripes' that incorporates deposition of a multilayer film on a microscale slope array and mechanical polishing. This method is used to fabricate a nanostripe structure consisting of two kinds of materials to form a stripe array on a silicon substrate. Although this nanopatterning method is categorized as a top-down fabrication process, the fabrication efficiency is quite high, because the number of nanostripes is 'multiplied' by the number of multilayered films. Another feature of the nanostripe is renewability; even if the nanostripe surface is damaged, the underlying nanostructure can be exposed and form a similar nanostripe by polishing. The nanostripe structure can be easily applied to a wide range of fields due to its ease of production.
Ando
Y
Y
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan. yas.ando@aist.go.jp
Miyake
K
K
Mizuno
A
A
Korenaga
A
A
Nakano
M
M
Mano
H
H