title: Filtering of defects in integrated circuits with orientation independence.
abstract: Defect enhancement in semiconductor wafers is shown to be possible by spatial frequency filtering without the necessity for filter alignment. The technique depends on the wafer being sufficiently periodic. Coherent optical and digital computer simulation results are presented.
authors.forename: P M
authors.initials: PM
authors.lastname: Will
authors.forename: K S
authors.initials: KS
authors.lastname: Pennington