title: Initial stages of few-layer graphene growth by microwave plasma-enhanced chemical vapour deposition.
abstract: A promising method for the production of few-layer graphene (FLG) is microwave plasma-enhanced chemical vapour deposition (MW PECVD). However, the growth mechanism of PECVD-synthesized FLG is not completely understood. The aim of this work was to investigate the initial stages of the growth process of FLG deposited by MW PECVD on several substrates (quartz, silicon, platinum). The deposited thin films were characterized by angle-resolved x-ray photoelectron spectroscopy (ARXPS), electron backscattered diffraction (EBSD), scanning electron microscopy (SEM) and x-ray diffraction (XRD). It was found that the initial stages of the deposition were different for the three chosen substrate materials. However, the fully grown FLG layers were similar for all substrates.
authors.affiliation: VITO Materials, Flemish Institute for Technological Research, Mol, Belgium.
authors.forename: Roumen
authors.initials: R
authors.lastname: Vitchev
authors.forename: Alexander
authors.initials: A
authors.lastname: Malesevic
authors.forename: Roumen H
authors.initials: RH
authors.lastname: Petrov
authors.forename: Raymond
authors.initials: R
authors.lastname: Kemps
authors.forename: Myrjam
authors.initials: M
authors.lastname: Mertens
authors.forename: Annick
authors.initials: A
authors.lastname: Vanhulsel
authors.forename: Chris
authors.initials: C
authors.lastname: Van Haesendonck