title: Lanthanide N,N-dimethylaminodiboranates: highly volatile precursors for the deposition of lanthanide-containing thin films.
abstract: New lanthanide CVD precursors of stoichiometry Ln(H(3)BNMe(2)BH(3))(3) have been prepared, where Ln = La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, Tm, and Lu. The ligand is N,N-dimethylaminodiboranate, a new kind of multidentate borohydride. The structures of the Ln(H(3)BNMe(2)BH(3))(3) complexes are highly dependent on the size of the lanthanide ions: the coordination number decreases from Pr (CN = 14) to Sm (CN = 13) to Er (CN = 12) corresponding with the decrease in ionic radii. The Ln(H(3)BNMe(2)BH(3))(3) complexes are highly volatile and sublime at temperatures as low as 65 degrees C in vacuum. These complexes are useful CVD precursors; for example, Y(H(3)BNMe(2)BH(3))(3) has been used to deposit Y(2)O(3) on silicon at 300 degrees C by CVD using water as a coreactant.
authors.affiliation: The School of Chemical Sciences, University of Illinois at Urbana-Champaign, 600 South Mathews Avenue, Urbana, Illinois 61801, USA.
authors.forename: Scott R
authors.initials: SR
authors.lastname: Daly
authors.forename: Do Young
authors.initials: DY
authors.lastname: Kim
authors.forename: Yu
authors.initials: Y
authors.lastname: Yang
authors.forename: John R
authors.initials: JR
authors.lastname: Abelson
authors.forename: Gregory S
authors.initials: GS
authors.lastname: Girolami