Instrument for measuring the roughness of supersmooth surfaces.
An instrument, based upon a measurement of the relative magnitudes of scattered light from a standard and the test mirror, was built and tested. Although the theory of the data reduction depends upon Gaussian statistics, we have obtained good results even with non-Gaussian surfaces. This paper describes the instrument, its theory, and experimental results.
Hildebrand
B P
BP
Gordon
R L
RL
Allen
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EV