title: Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser.
abstract: We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.
authors.forename: Fei
authors.initials: F
authors.lastname: He
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Zhizhan
authors.initials: Z
authors.lastname: Xu
authors.forename: Yang
authors.initials: Y
authors.lastname: Liao
authors.forename: Jian
authors.initials: J
authors.lastname: Xu
authors.forename: Haiyi
authors.initials: H
authors.lastname: Sun
authors.forename: Chen
authors.initials: C
authors.lastname: Wang
authors.forename: Zenghui
authors.initials: Z
authors.lastname: Zhou
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa
authors.forename: Yonghao
authors.initials: Y
authors.lastname: Xu
authors.forename: Xianfeng
authors.initials: X
authors.lastname: Chen
mesh_terms: D004867:Equipment Design; D005898:Glass; D007834:Lasers; D008422:Materials Testing; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation / Q000379:methods*; D044085:Microfluidics; D008855:Microscopy, Electron, Scanning / Q000379:methods; D055095:Optics and Photonics; D012822:Silicon Dioxide / Q000737:chemistry*; D014465:Ultrasonics
chemical_list: D012822:Silicon Dioxide