Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser.
We demonstrate direct fabrication of homogeneous microfluidic channels embedded in fused silica by femtosecond laser direct writing, followed by wet chemical etching and glass drawing. In addition, the glass drawing process significantly reduces the inner surface roughness of the fabricated channels, and centimeter-level microfluidic channels with an aspect ratio above 1000 can be realized.
He
Fei
F
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.
Cheng
Ya
Y
Xu
Zhizhan
Z
Liao
Yang
Y
Xu
Jian
J
Sun
Haiyi
H
Wang
Chen
C
Zhou
Zenghui
Z
Sugioka
Koji
K
Midorikawa
Katsumi
K
Xu
Yonghao
Y
Chen
Xianfeng
X
D004867:Equipment Design; D005898:Glass; D007834:Lasers; D008422:Materials Testing; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation / Q000379:methods*; D044085:Microfluidics; D008855:Microscopy, Electron, Scanning / Q000379:methods; D055095:Optics and Photonics; D012822:Silicon Dioxide / Q000737:chemistry*; D014465:Ultrasonics
D012822:Silicon Dioxide