Diffractographic dimensional measurement. Part 2: profile measurement.
Part 1 of this paper discussed a "diffractographic" method by which changes in separation between two objects could be measured using changes in the diffraction pattern of the slit-type aperture formed between them. A unique line measurement capability was demonstrated. In this part we discuss profile measurement whereby the diffraction pattern formed is used to indicate changes in separation between adjacent sets of opposite points, rather than changes between the points themselves. Positions of points on one object are usually known, in order to test the profile of the second. The method offers many interesting advantages in those applications where it may be used, particularly due to the speed, accuracy, and easily automated nature of the process.
Pryor
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Hageniers
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North
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