title: Electron-resist fabrication of bends and couplers for integrated optical circuits.
abstract: The fabrication of complex integrated optical circuits using thin films will require dielectric patterns of high resolution and edge smoothness. This paper describes an electron-beam technique that has been used to form a curved thin-film light guide and a directional coupler, and is applicable to filters and other more complex components.
authors.forename: J E
authors.initials: JE
authors.lastname: Goell