Formulas for the Derivatives of the Complex Index of Refraction with Respect to Delta, psi, phi, and d.
Formulas are given for the partial derivatives of the complex index of refraction ñ with respect to the ellipsometric angles Delta and psi, the angle of incidence phi, and the thickness of a surface film d. The formulas are very useful in a study of the propagation to ñ of systematic errors in data obtained with an ellipsometer and are easily adapted to either machine or hand calculation.
Loescher
D H
DH