title: Modulation Transfer Function of AZ111 Photoresist.
abstract: For the utilization of photoresist materials it is desirable to describe quantitatively the photoresist image and thereby introduce control over photoresist processing. The photoresist AZ111 has been shown to be a linear image recording medium and a modulation transfer function (MTF) defined and measured. Measured and calculated image profiles in this resist are quite comparable.
authors.forename: R G
authors.initials: RG
authors.lastname: Brandes
authors.forename: R K
authors.initials: RK
authors.lastname: Curran