title: Application of spatial filtering subtraction to thin film and integrated circuit mask inspection.
abstract: Studies have been performed to investigate the application of spatial filtering subtraction to mask inspection. By using a grating at the spatial frequency plane, images can be subtracted to give a display of errors on a black background. Results indicate that this technique could have application for integrated circuit and thin film mask inspection provided there are two or more repeated patterns on the mask.
authors.forename: L S
authors.initials: LS
authors.lastname: Watkins