Michelson interferometer for detection of fast displacements of less than a quarter-wave over small areas.
A modified Michelson interferometer is described that allows calibration and measurement simultaneously. The method is used to detect displacements down to 1 nm with a time resolution of 40 nsec. These values are close to theoretical resolution limits for the experimental arrangement. The probing beam is focused onto the investigated sample, allowing measurements with a lateral resolution of 1.5 microm. The method has been applied to investigate the deformation behavior of pulsed diode lasers.
Keller
R
R
Salathé
R
R
Tschudi
T
T
Voumard
C
C