Chemical solution deposition of epitaxial carbide films.
Carbide films exhibit many unique properties. The development of a versatile and simple technique for the deposition of carbide films will enable a wide range of technological applications. Here we report a cost-effective chemical solution deposition or polymer-assisted deposition method for growing epitaxial carbide (including TiC, VC, and TaC) films. These epitaxial carbide films exhibit structural and physical properties similar to the films grown by vapor deposition methods.
Zou
Guifu
G
Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA. gfzou@lanl.gov
Wang
Haiyan
H
Mara
Nathan
N
Luo
Hongmei
H
Li
Nan
N
Di
Zengfeng
Z
Bauer
Eve
E
Wang
Yongqiang
Y
McCleskey
Thomas
T
Burrell
Anthony
A
Zhang
Xinghang
X
Nastasi
Michael
M
Jia
Quanxi
Q