On-chip interferometric detection of nanomechanical motion.
An integrable on-chip displacement transduction of nanomechenical motion is developed that senses the modulation of the optical near-field of an illuminated vibrating string with a nearby Schottky photodiode. This scheme poses no restrictions on resonator material and avoids additional damping. The achieved sensitivity of 1 pm/Hz(1/2) enables the detection of Brownian motion of our mechanical resonators at room temperature. Implementing a feedback scheme of the detected signal into the electrical actuation, we demonstrate self-oscillation.
Unterreithmeier
Quirin P
QP
Fakultat fur Physik and Center for NanoScience (CeNS), Ludwig-Maximilians-Universitat, Geschwister-Scholl-Platz 1, Munchen 80539, Germany.
Faust
Thomas
T
Manus
Stephan
S
Kotthaus
Jörg P
JP
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation*; D008029:Lighting / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D009038:Motion; D010783:Photometry / Q000295:instrumentation*; D012666:Semiconductors; D014159:Transducers