Performance tests for automatic ellipsometers.
Methods to determine quantitatively the dynamic response of automatic ellipsometers to variations in the optical properties of a specimen have been developed and are illustrated by data from a newly built ellipsometer. The quantities determined include slew rate, frequency response, accuracy, and resolution. The methods are based on the use of rotating mirrors for the generation of well-defined, fast optical changes in the reflecting surface.
R H
RH
Muller
H J
HJ
Mathieu