ISO-Compliant calibration of energy and intensity scales of electron spectrometers.
The International Organization for Standardization (ISO) decided to establish a Technical Committee 201 (TC201) on the standardization of surface chemical analysis in 1991. Since then, TC201 has published 38 ISO standards. They concern the vocabulary, instrument specifications, pretreatments of specimen, the procedures for analysis, apparatus alignments, measurement conditions, quantification and reporting formats. In this paper, ISO standards on the calibration of energy and intensity scales of electron spectrometers are briefly introduced. Common Data Processing System is the software for assisting in using ISO standards, and its functions for the calibration of energy and intensity scales are also introduced.
Omicron NanoTechnology Japan, Ota, Tokyo 144-0052, Japan. k.yoshihara@omicron.jp
Kazuhiro
K
Yoshihara