MTMO grayscale photomask.
We present a new class of simple, cheap and stable grayscale photomasks based on the metal-transparent-metallic-oxides (MTMO) systems by laser direct writing in metal films. For obtaining high resolution and grainless grayscale patterns we developed a refinement method of the films, in which the nanometer size effect may play a significant role for the improvement. We propose a layered oxidation model and a grain model for the mechanism of In- and Sn-based MTMO systems. The masks have a wide application wavelength range at least from 350 to 700 nm. Three-dimensional microstructures have been successfully fabricated by using the MTMO grayscale masks.
Guo
Chuan Fei
CF
National Center for Nanoscience and Technology, No 11, Beiyitiao, Beijing 100190, China.
Zhang
Jianming
J
Miao
Junjie
J
Fan
Yongtao
Y
Liu
Qian
Q