Galvanometer deflection: a precision high-speed system.
An X-Y galvanometer deflection system capable of high precision in a random access mode of operation is described. Beam positional information in digitized form is obtained by employing a Ronchi grating with a sophisticated optical detection scheme. This information is used in a control interface to locate the beam to the required precision. The system is characterized by high accuracy at maximum speed and is designed for operation in a variable environment, with particular attention placed on thermal insensitivity.
Jablonowski
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DP
Raamot
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