Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold.
In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50microm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees . The polymeric waveguide array with 45 degrees micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.
Dou
Xinyuan
X
Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, 78758, USA.
Wang
Xiaolong
X
Huang
Haiyu
H
Lin
Xiaohui
X
Ding
Duo
D
Pan
David Z
DZ
Chen
Ray T
RT
D017076:Computer-Aided Design; D004852:Epoxy Compounds / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008904:Miniaturization; D009532:Nickel / Q000737:chemistry*; D055096:Optical Devices; D011108:Polymers / Q000737:chemistry*; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013499:Surface Properties; D014159:Transducers
D004852:Epoxy Compounds; D011108:Polymers; C520895:SU-8 compound; D009532:Nickel