title: Optical probing of electric fields with an electro-acoustic effect toward integrated circuit diagnosis.
abstract: Electro-optic probing of electric fields has been considered as a promising approach for integrated circuit diagnosis. However, the method is subject to relatively weak voltage sensitivity. In this Letter, we solve the problems with electro-acoustic effect. In contrast to the general electro-optic effect, the light phase modulation induced by the acoustic effect is 2 orders of magnitude stronger at its resonant frequency, as we observed in a GaAs thin film probe. Furthermore, this what we believe to be a novel method shows a highly reproducible linearity between the detected signals and the input voltages, which facilitates the voltage calibration.
authors.affiliation: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, JilinUniversity, 2699 Qianjin Street, Changchun 130012, China.
authors.forename: Ru-Long
authors.initials: RL
authors.lastname: Jin
authors.forename: Han
authors.initials: H
authors.lastname: Yang
authors.forename: Di
authors.initials: D
authors.lastname: Zhao
authors.forename: Qi-Dai
authors.initials: QD
authors.lastname: Chen
authors.forename: Zhao-Xu
authors.initials: ZX
authors.lastname: Yan
authors.forename: Mao-Bin
authors.initials: MB
authors.lastname: Yi
authors.forename: Hong-Bo
authors.initials: HB
authors.lastname: Sun