Angular probe based on using Fabry-Perot etalon and scanning technique.
A novel angular probe using the Fabry-Perot etalon and angular scanning technique is proposed for absolute angular displacement determinations in this paper. The measurement theory is first derived, a setup constructed to implement the angular probe is then introduced and analyzed, and the experimental results from the uses of the setup are finally presented. The setup analyses reveal that the probe is with high measurement resolution and sensitivity. The experimental results not only confirm the validity, stability, accuracy, and repeatability, but also show an application of the angular probe.
Lin
Shyh-Tsong
ST
Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec 3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
Yeh
Sheng-Lih
SL
Lin
Zhi-Feng
ZF