title: Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths.
abstract: High quality (Q approximately 6 x 10(5)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters.
authors.affiliation: School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA.
authors.forename: Ehsan
authors.initials: E
authors.lastname: Shah Hosseini
authors.forename: Siva
authors.initials: S
authors.lastname: Yegnanarayanan
authors.forename: Amir Hossein
authors.initials: AH
authors.lastname: Atabaki
authors.forename: Mohammad
authors.initials: M
authors.lastname: Soltani
authors.forename: Ali
authors.initials: A
authors.lastname: Adibi