title: Improvement of linewidth in laser beam lithographed computer generated hologram.
abstract: We propose a new laser lithographic technique with enhanced resolution. A calcite wave plate is introduced in our system to separate an input lithographic beam into two orthogonally polarized beams. After going through an imaging lens, these two beams meet again on the focal point, and generate a small interferogram that sharpens the shape of the focused beam spot. Using this phenomenon, we can overcome the diffraction limit of the imaging lens and achieve a 486-nm-linewidth.
authors.affiliation: Centerfor Space Optics, Korea Research Institute of Standards and Science, Daejeon, South Korea. hrhee@kriss.re.kr
authors.forename: Hyug-Gyo
authors.initials: HG
authors.lastname: Rhee
authors.forename: Yun-Woo
authors.initials: YW
authors.lastname: Lee
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D006696:Holography / Q000295:instrumentation* / Q000379:methods; D007089:Image Enhancement / Q000295:instrumentation*; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation* / Q000379:methods*; D007834:Lasers; D010781:Photography / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity