Optical probing of electric fields with an electro-acoustic effect toward integrated circuit diagnosis.
Electro-optic probing of electric fields has been considered as a promising approach for integrated circuit diagnosis. However, the method is subject to relatively weak voltage sensitivity. In this Letter, we solve the problems with electro-acoustic effect. In contrast to the general electro-optic effect, the light phase modulation induced by the acoustic effect is 2 orders of magnitude stronger at its resonant frequency, as we observed in a GaAs thin film probe. Furthermore, this what we believe to be a novel method shows a highly reproducible linearity between the detected signals and the input voltages, which facilitates the voltage calibration.
Jin
Ru-Long
RL
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, JilinUniversity, 2699 Qianjin Street, Changchun 130012, China.
Yang
Han
H
Zhao
Di
D
Chen
Qi-Dai
QD
Yan
Zhao-Xu
ZX
Yi
Mao-Bin
MB
Sun
Hong-Bo
HB