Enhanced Detection Resonance Frequency Shift of a Piezoelectric Microcantilever Sensor by a DC Bias Electric Field in Humidity Detection.
We have examined the relative longitudinal flexural resonance frequency shift of a PMN-PT/tin PEMS with a DC bias electric field, E, in humidity detection. We showed that the relative resonance frequency shift could be enhanced by applying an E to the PMN-PT layer during detection. A maximum enhancement of more than three times in resonance frequency shift was observed at E = -6 kV/cm as compared to the resonance frequency shift without a bias field. The maximal relative resonance frequency shift at E = -6 kV/cm was about 1000 times larger than could be accounted for by mass loading alone.
Zhu
Qing
Q
Department of Materials Science and Engineering, Drexel University, Philadelphia, PA 19104.
Shih
Wan Y
WY
Shih
Wei-Heng
WH