title: Polycrystalline Mercuric Iodide Films on CMOS Readout Arrays.
abstract: We have created high-resolution x-ray imaging devices using polycrystalline mercuric iodide (HgI(2)) films grown directly onto CMOS readout chips using a thermal vapor transport process. Images from prototype 400x400 pixel HgI(2)-coated CMOS readout chips are presented, where the pixel grid is 30 mum x 30 mum. The devices exhibited sensitivity of 6.2 muC/Rcm(2) with corresponding dark current of approximately 2.7 nA/cm(2), and a 80 mum FWHM planar image response to a 50 mum slit aperture. X-ray CT images demonstrate a point spread function sufficient to obtain a 50 mum spatial resolution in reconstructed CT images at a substantially reduced dose compared to phosphor-coated readouts. The use of CMOS technology allows for small pixels (30 mum), fast readout speeds (8 fps for a 3200x3200 pixel array), and future design flexibility due to the use of well-developed fabrication processes.
authors.affiliation: DxRay, Inc., Northridge, CA 91324 USA (telephone: 818-280-0177, e-mail: neal.hartsough@dxray.com ).
authors.forename: Neal E
authors.initials: NE
authors.lastname: Hartsough
authors.forename: Jan S
authors.initials: JS
authors.lastname: Iwanczyk
authors.forename: Einar
authors.initials: E
authors.lastname: Nygard
authors.forename: Nail
authors.initials: N
authors.lastname: Malakhov
authors.forename: William C
authors.initials: WC
authors.lastname: Barber
authors.forename: Thulasidharan
authors.initials: T
authors.lastname: Gandhi