title: Focus path of a laser beam deflected by a prismatic polygon mirror: its calculation and optimization.
abstract: The focus path of a laser beam deflected by a prismatic polygon mirror was calculated. It is shown that the larger the focal distance of the objective or the polygon radius, the closer the focus path approaches a straight scanning line. Especially in the case of small pattern scanning, a remarkably small deviation between actual focus path and straight scanning line can be achieved by suitable sizing and arrangement of the optical elements.
authors.forename: U
authors.initials: U
authors.lastname: Bergmann
authors.forename: K
authors.initials: K
authors.lastname: Klose
authors.forename: L
authors.initials: L
authors.lastname: Spiess