UV trimming of polarization-independent microring resonator by internal stress and temperature control.
The temperature dependence of the resonant wavelength of vertically coupled microring resonator can be controlled via internal stress caused by the thermo-optic and photo-elastic effects. In the case of strong internal stress, a polarization-independent microring resonator can be realized by controlling the device surface temperature using a heater module; the temperature dependence of TE and TM polarizations are different due to the internal stress and thus manipulating temperatures, the resonant wavelengths for TE and TM can be equalized at a specific temperature. In this study, the UV trimming of polarization-independent wavelength was demonstrated using UV-sensitive SiON as a core material. The temperature dependence of TE polarization was almost athermalized and that of TM was made negative by controlling internal stress. As a result, the simultaneous realization of the UV trimming and the polarization-independent microring was made possible more easily than before; the UV trimming can be done at room temperature due to the athermalized resonant wavelength for TE polarization.
Kobayashi
Naoki
N
Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, Yokohama, Japan.
Sato
Tomoyuki
T
Kokubun
Yasuo
Y
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008420:Manufactured Materials / Q000528:radiation effects; D055096:Optical Devices; D012031:Refractometry / Q000295:instrumentation*; D013314:Stress, Mechanical; D013696:Temperature; D014159:Transducers; D014466:Ultraviolet Rays