Polarization properties of scattered light from macrorough surfaces.
We have characterized macrorough surfaces by measuring angle-resolved Stokes parameters of scattering. The analysis of the parameters as a function of a virtual scattering angle shows that polarization properties of the scattering in the plane of incidence display a very strong dependence on the surface roughness. The method and results of this analysis have a significant impact on the application of light scattering to the inspection and process-evaluation industry.
Jin
Lianhua
L
Department of Mechanical Systems Engineering, Interdisciplinary Graduate School of Medicine and Engineering,University of Yamanashi, 4-3-11 Takeda, Kofu-city, Yamanashi 400-8511, Japan. L.Jin@ms.yamanashi.ac.jp
Kasahara
Masataka
M
Gelloz
Bernard
B
Takizawa
Kuniharu
K
D008027:Light; D055620:Optical Phenomena; D012542:Scattering, Radiation; D013499:Surface Properties