title: Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold.
abstract: In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50microm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees . The polymeric waveguide array with 45 degrees micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.
authors.affiliation: Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, 78758, USA.
authors.forename: Xinyuan
authors.initials: X
authors.lastname: Dou
authors.forename: Xiaolong
authors.initials: X
authors.lastname: Wang
authors.forename: Haiyu
authors.initials: H
authors.lastname: Huang
authors.forename: Xiaohui
authors.initials: X
authors.lastname: Lin
authors.forename: Duo
authors.initials: D
authors.lastname: Ding
authors.forename: David Z
authors.initials: DZ
authors.lastname: Pan
authors.forename: Ray T
authors.initials: RT
authors.lastname: Chen
mesh_terms: D017076:Computer-Aided Design; D004852:Epoxy Compounds / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008904:Miniaturization; D009532:Nickel / Q000737:chemistry*; D055096:Optical Devices; D011108:Polymers / Q000737:chemistry*; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D013499:Surface Properties; D014159:Transducers
chemical_list: D004852:Epoxy Compounds; D011108:Polymers; C520895:SU-8 compound; D009532:Nickel