Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy.
Yan
Yongda
Y
School of Mechatronics Engineering, Harbin Institute of Technology, P. O. Box 413, Harbin 150001, P.R. China.
Hu
Zhenjiang
Z
Zhao
Xueshen
X
Sun
Tao
T
Dong
Shen
S
Li
Xiaodong
X
D005145:Face; D006801:Humans; D018625:Microscopy, Atomic Force / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D013499:Surface Properties