Focus path of a laser beam deflected by a prismatic polygon mirror: its calculation and optimization.
The focus path of a laser beam deflected by a prismatic polygon mirror was calculated. It is shown that the larger the focal distance of the objective or the polygon radius, the closer the focus path approaches a straight scanning line. Especially in the case of small pattern scanning, a remarkably small deviation between actual focus path and straight scanning line can be achieved by suitable sizing and arrangement of the optical elements.
Bergmann
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Klose
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Spiess
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