title: Orthogonal functionalization of silicon substrates using self-assembled monolayers.
abstract: A fabrication process for multifunctional surfaces is designed leading to five different functional moieties (amine, thiol, carboxylic acid, fluoro, and methyl) being present on a single structured surface. The multifunctional surface is created by combining UV-ozone patterning, electro-oxidative lithography, the local deposition of self-assembled monolayers (SAMs), and surface modification schemes. Besides the characterization with conventional surface-sensitive techniques, the nature of the locally functionalized regions is demonstrated by self-assembly of three different probe nanomaterials (Si nanoparticles, Au nanoparticles, and hydroxyl functionalized micelles). A versatile fabrication approach for complex surfaces with addressable functionalities can be created, and it was possible to integrate five different functionalized areas on one substrate.
authors.affiliation: Laboratory of Macromolecular Chemistry and Nanoscience, Center for NanoMaterials, Eindhoven University of Technology, Den Dolech 2, 5600 MB Eindhoven, The Netherlands.
authors.forename: Nicole
authors.initials: N
authors.lastname: Herzer
authors.forename: Claudia
authors.initials: C
authors.lastname: Haensch
authors.forename: Stephanie
authors.initials: S
authors.lastname: Hoeppener
authors.forename: Ulrich S
authors.initials: US
authors.lastname: Schubert
mesh_terms: D004563:Electrochemistry; D010084:Oxidation-Reduction; D010126:Ozone; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties; D014466:Ultraviolet Rays
chemical_list: D010126:Ozone; D012825:Silicon