title: Vacuum-assisted aerosol deposition of a low-dielectric-constant periodic mesoporous organosilica film.
authors.affiliation: Chemistry Department, University of Toronto, Toronto, Ontario, Canada.
authors.forename: Wendong
authors.initials: W
authors.lastname: Wang
authors.forename: Daniel
authors.initials: D
authors.lastname: Grozea
authors.forename: Ara
authors.initials: A
authors.lastname: Kim
authors.forename: Douglas D
authors.initials: DD
authors.lastname: Perovic
authors.forename: Geoffrey A
authors.initials: GA
authors.lastname: Ozin
mesh_terms: D000336:Aerosols / Q000737:chemistry*; D004553:Electric Conductivity; D016062:Porosity; D012822:Silicon Dioxide / Q000737:chemistry*; D014618:Vacuum
chemical_list: D000336:Aerosols; D012822:Silicon Dioxide