title: Measurement of steep aspheric surfaces.
abstract: A method of measuring the shape of high numerical aperture (NA <0.95), convex or concave, aspheric surfaces is described. The aspheric slope may be as large as 1200 waves/rad. The method is applied in two steps. First, a standard measurement is performed to obtain a reference surface. Second, the reproducibility of the fabrication of aspheric surfaces is tested by means of a holographic comparison method. The measuring error is smaller than 0.1 microm.
authors.forename: J G
authors.initials: JG
authors.lastname: Dil
authors.forename: P F
authors.initials: PF
authors.lastname: Greve
authors.forename: W
authors.initials: W
authors.lastname: Mesman