The fabrication of a programmable via using phase-change material in CMOS-compatible technology.
We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications.
Chen
Kuan-Neng
KN
Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan. knchen@mail.nctu.edu.tw
Krusin-Elbaum
Lia
L