title: The study of helicon plasma source.
abstract: Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10(13) cm(-3) have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10(-3) Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.
authors.affiliation: Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, People's Republic of China.
authors.forename: Ting-Ting
authors.initials: TT
authors.lastname: Miao
authors.forename: Hong-Wei
authors.initials: HW
authors.lastname: Zhao
authors.forename: Zhan-Wen
authors.initials: ZW
authors.lastname: Liu
authors.forename: Yong
authors.initials: Y
authors.lastname: Shang
authors.forename: Liang-Ting
authors.initials: LT
authors.lastname: Sun
authors.forename: Xue-Zhen
authors.initials: XZ
authors.lastname: Zhang
authors.forename: Huan-Yu
authors.initials: HY
authors.lastname: Zhao