Vacuum-assisted aerosol deposition of a low-dielectric-constant periodic mesoporous organosilica film.
Wang
Wendong
W
Chemistry Department, University of Toronto, Toronto, Ontario, Canada.
Grozea
Daniel
D
Kim
Ara
A
Perovic
Douglas D
DD
Ozin
Geoffrey A
GA
D000336:Aerosols / Q000737:chemistry*; D004553:Electric Conductivity; D016062:Porosity; D012822:Silicon Dioxide / Q000737:chemistry*; D014618:Vacuum
D000336:Aerosols; D012822:Silicon Dioxide