title: Self-heated hollow cathode discharge system for charged particle sources and plasma generators.
abstract: This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.
authors.affiliation: Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 534055, Russia. gvi@opee.hcei.tsc.ru
authors.forename: V I
authors.initials: VI
authors.lastname: Gushenets
authors.forename: A S
authors.initials: AS
authors.lastname: Bugaev
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.forename: P M
authors.initials: PM
authors.lastname: Schanin
authors.forename: A A
authors.initials: AA
authors.lastname: Goncharov