title: Titanium in-diffused LiNbO(3) optical waveguide fabrication.
abstract: Techniques used to fabricate titanium in-diffused optical waveguide devices in LiNbO(3) are described. The processes described include photolithography, precision mask orientation and registration, metal diffusion, waveguide end polishing, and crystal cleaving.
authors.forename: L W
authors.initials: LW
authors.lastname: Stulz