Fast computation method for derivatives of multilayer stack reflectance.
An analytical procedure for the calculation of the derivatives of the reflectance R of a dielectric multilayer stack is presented. Considered are the derivatives ( partial differentialR/ partial differentialn(k))d, ( partial differentialR/ partial differentialn(k))D, ( partial differentialR/ partial differentiald(k))n, and ( partial differentialR/ partial differentialD(k))n, n(k), d(k), and D(k) being the refractive index, the thickness, and the effective optical thickness of the kth layer, respectively. These calculations lead to a computational algorithm which, as compared with the method using finite difference approximation, reduces-the computer time by a factor of f (the total number of layers).
Laan
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Frankena
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