title: Broad-beam high-current dc ion source based on a two-stage glow discharge plasma.
abstract: We have designed, made, and demonstrated a broad-beam, dc, ion source based on a two-stage, hollow-cathode, and glow discharges plasma. The first-stage discharge (auxiliary discharge) produces electrons that are injected into the cathode cavity of a second-stage discharge (main discharge). The electron injection causes a decrease in the required operating pressure of the main discharge down to 0.05 mTorr and a decrease in required operating voltage down to about 50 V. The decrease in operating voltage of the main discharge leads to a decrease in the fraction of impurity ions in the ion beam extracted from the main gas discharge plasma to less than 0.2%. Another feature of the source is a single-grid accelerating system in which the ion accelerating voltage is applied between the plasma itself and the grid electrode. The source has produced steady-state Ar, O, and N ion beams of about 14 cm diameter and current of more than 2 A at an accelerating voltage of up to 2 kV.
authors.affiliation: High Current Electronics Institute, Siberian Division of the Russian Academy Sciences, Tomsk 634055, Russia.
authors.forename: A V
authors.initials: AV
authors.lastname: Vizir
authors.forename: E M
authors.initials: EM
authors.lastname: Oks
authors.forename: G Yu
authors.initials: GY
authors.lastname: Yushkov