title: The fabrication of silicon nanostructures by focused-ion-beam implantation and TMAH wet etching.
abstract: Local gallium implantation of silicon by a focused ion beam (FIB) has been used to create a mask for anisotropic tetramethylammonium hydroxide (TMAH) wet etching. The dependence of the etch stop properties of gallium-doped silicon on the implanted dose has been investigated and a dose of 4 x 10(13) ions cm(- 2) has been determined to be the threshold value for achieving observable etching resistance. Only a thin, approx. 50 nm, surface layer is found to be durable enough to serve as a mask with a high selectivity of at least 2000:1 between implanted and non-implanted areas. The combined FIB-TMAH process has been used to generate various types of 3D nanostructures including nanochannels separated by thin vertical sidewalls with aspect ratios up to 1:30, ultra-narrow (approx. 25 nm) freestanding bridges and cantilevers, and gratings with a resolution of 20 lines microm(- 1).
authors.affiliation: Department of Micro and Nanosciences, Helsinki University of Technology, FI-02015 TKK, Finland. paivi.sievila@tkk.fi
authors.forename: Päivi
authors.initials: P
authors.lastname: Sievilä
authors.forename: Nikolai
authors.initials: N
authors.lastname: Chekurov
authors.forename: Ilkka
authors.initials: I
authors.lastname: Tittonen