Self-heated hollow cathode discharge system for charged particle sources and plasma generators.
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.
Gushenets
V I
VI
Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 534055, Russia. gvi@opee.hcei.tsc.ru
Bugaev
A S
AS
Oks
E M
EM
Schanin
P M
PM
Goncharov
A A
AA