title: Electrodes on a budget: Micropatterned electrode fabrication by wet chemical deposition.
abstract: Precise patterning of metals is required for diverse microfluidic and microelectromechanical system (MEMS) applications ranging from the separation of proteins to the manipulation of single cells and drops of water-in-oil emulsions. Here we present a very simple, inexpensive method for fabricating micropatterned electrodes. We deposit a thin metal layer of controlled thickness using wet chemistry, thus eliminating the need for expensive equipment typically required for metal deposition. We demonstrate that the resulting deposited metal can be used to fabricate functional electrodes: The wet-deposited metal film can sustain patterning by photolithography down to micron-sized features required for MEMS and microfluidic applications, and its properties are suitable for operative electrodes used in a wide range of microfluidic applications for biological studies.
authors.affiliation: Department of Physics and School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02139, USA.
authors.forename: Wataru
authors.initials: W
authors.lastname: Ebina
authors.forename: Amy C
authors.initials: AC
authors.lastname: Rowat
authors.forename: David A
authors.initials: DA
authors.lastname: Weitz