Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography.
We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.
Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, Israel. ulevy@cc.huji.ac.il
Uriel
U
Levy
Boris
B
Desiatov
Ilya
I
Goykhman
Tali
T
Nachmias
Avi
A
Ohayon
Sheffer E
SE
Meltzer