Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography.
We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.
Levy
Uriel
U
Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 91904, Israel. ulevy@cc.huji.ac.il
Desiatov
Boris
B
Goykhman
Ilya
I
Nachmias
Tali
T
Ohayon
Avi
A
Meltzer
Sheffer E
SE