Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis.
Schröder
Sven
S
Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. sven.schroeder@iof.fraunhofer.de
Herffurth
Tobias
T
Trost
Marcus
M
Duparré
Angela
A