title: Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis.
authors.affiliation: Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Strasse 7, D-07745 Jena, Germany. sven.schroeder@iof.fraunhofer.de
authors.forename: Sven
authors.initials: S
authors.lastname: Schröder
authors.forename: Tobias
authors.initials: T
authors.lastname: Herffurth
authors.forename: Marcus
authors.initials: M
authors.lastname: Trost
authors.forename: Angela
authors.initials: A
authors.lastname: Duparré