title: Aluminum nitride on titanium for CMOS compatible piezoelectric transducers.
authors.affiliation: Department of Mechanical Engineering, Stanford University, Stanford, CA, USA.
authors.forename: Joseph C
authors.initials: JC
authors.lastname: Doll
authors.forename: Bryan C
authors.initials: BC
authors.lastname: Petzold
authors.forename: Biju
authors.initials: B
authors.lastname: Ninan
authors.forename: Ravi
authors.initials: R
authors.lastname: Mullapudi
authors.forename: Beth L
authors.initials: BL
authors.lastname: Pruitt