title: MEMS-based fast scanning probe microscopes.
authors.affiliation: Leiden University, Niels Bohrweg 2, Leiden, The Netherlands. tabak@physics.leidenuniv.nl
authors.forename: F C
authors.initials: FC
authors.lastname: Tabak
authors.forename: E C M
authors.initials: EC
authors.lastname: Disseldorp
authors.forename: G H
authors.initials: GH
authors.lastname: Wortel
authors.forename: A J
authors.initials: AJ
authors.lastname: Katan
authors.forename: M B S
authors.initials: MB
authors.lastname: Hesselberth
authors.forename: T H
authors.initials: TH
authors.lastname: Oosterkamp
authors.forename: J W M
authors.initials: JW
authors.lastname: Frenken
authors.forename: W M
authors.initials: WM
authors.lastname: van Spengen