title: Nano-ring-shape growth of fluorocarbon macromolecules during SiO2 etching.
authors.affiliation: Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, NY 12180, USA. leesh@lps.umd.edu
authors.forename: Sang Hwui
authors.initials: SH
authors.lastname: Lee
authors.forename: Jian-Qiang
authors.initials: JQ
authors.lastname: Lu