Experimental study of a planar atmospheric-pressure plasma operating in the microplasma regime.
Electrical characterization of a nonthermal radio-frequency atmospheric-pressure microplasma in a parallel plate configuration has shown that reducing electrode gap into the submillimeter range increases current and power density at a reduced voltage as compared to similar plasmas at larger electrode gaps which have no gap dependence. Calculation of sheath thickness and electric fields in the sheath and in the bulk demonstrate a dependence on the electrode gap as it is reduced into the submillimeter regime, indicating a distinct regime of operation.
Wagner
A J
AJ
Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester, New York 14623, USA.
Mariotti
D
D
Yurchenko
K J
KJ
Das
T K
TK