title: An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy.
abstract: We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3x10(7) electrons/pixel was successfully reconstructed.
authors.affiliation: Frontier Research Base for Global Young Researchers, Frontier Research Center, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. takahashi@wakate.frc.eng.osaka-u.ac.jp
authors.forename: Yukio
authors.initials: Y
authors.lastname: Takahashi
authors.forename: Hideto
authors.initials: H
authors.lastname: Kubo
authors.forename: Yoshinori
authors.initials: Y
authors.lastname: Nishino
authors.forename: Hayato
authors.initials: H
authors.lastname: Furukawa
authors.forename: Ryosuke
authors.initials: R
authors.lastname: Tsutsumi
authors.forename: Kazuto
authors.initials: K
authors.lastname: Yamauchi
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Ishikawa
authors.forename: Eiichiro
authors.initials: E
authors.lastname: Matsubara