Holographic fabricated photonic-crystal distributed-feedback quantum cascade laser with near-diffraction-limited beam quality.
We demonstrate the fabrication and characterization of photonic-crystal distributed-feedback quantum cascade laser emitting at 4.7 microm. The tilted rectangular-lattice PCDFB structure was defined using a multi-exposure of two-beam holographic lithography. The devices exhibit the near-diffraction-limited beam emission with the full width at half maximum of the far-field divergence angles about 4.5 degrees and 2.5 degrees for stripe widths of 55 microm and 95 microm, respectively. Single-mode emission with a side mode suppression ratio of approximately 20 dB is achieved in the temperature range (80-210 K). The single-facet output power is above 1 W for a 95 microm x 2.5 mm laser bar at 85 K in pulsed operation.
Lu
Quan-Yong
QY
Key Lab of Semiconductor Materials Science, Institute of Semiconductors,Chinese Academy of Sciences, PO Box 912, Beijing 100083, China.
Zhang
Wei
W
Wang
Li-Jun
LJ
Liu
Jun-Qi
JQ
Li
Lu
L
Liu
Feng-Qi
FQ
Wang
Zhan-Guo
ZG