title: Functional microscopy tip fabrication by an electric conductive nanowire.
abstract: The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel silicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.
authors.affiliation: Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon 305343, Korea.
authors.forename: Joondong
authors.initials: J
authors.lastname: Kim
authors.forename: Ju-Hyung
authors.initials: JH
authors.lastname: Yun
authors.forename: Moon Seop
authors.initials: MS
authors.lastname: Hyun
authors.forename: Young-Hyun
authors.initials: YH
authors.lastname: Shin
authors.forename: Yun Chang
authors.initials: YC
authors.lastname: Park
authors.forename: JiHye
authors.initials: J
authors.lastname: Lee
authors.forename: Sohee
authors.initials: S
authors.lastname: Jeong
authors.forename: Chang-Soo
authors.initials: CS
authors.lastname: Han