title: Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip.
abstract: We fabricated nanopatterns on Cu thin films via an electrochemical route using an atomic force microscope (AFM). Experimental results were compared with an equivalent electrochemical circuit model representing an electrochemical nanomachining (ECN) technique. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.
authors.affiliation: Department of Biomedical Engineering, Yonsei University, Heungup, Wonju, 220-710, Korea.
authors.forename: Gyudo
authors.initials: G
authors.lastname: Lee
authors.forename: Huihun
authors.initials: H
authors.lastname: Jung
authors.forename: Jongsang
authors.initials: J
authors.lastname: Son
authors.forename: Kihwan
authors.initials: K
authors.lastname: Nam
authors.forename: Taeyun
authors.initials: T
authors.lastname: Kwon
authors.forename: Geunbae
authors.initials: G
authors.lastname: Lim
authors.forename: Young Ho
authors.initials: YH
authors.lastname: Kim
authors.forename: Jongbum
authors.initials: J
authors.lastname: Seo
authors.forename: Sang Woo
authors.initials: SW
authors.lastname: Lee
authors.forename: Dae Sung
authors.initials: DS
authors.lastname: Yoon