Maskless laser direct patterning of PEDOT/PSS layer for soluble process organic thin film transistor.
In this work, we have fabricated TIPS-pentacene TFTs with conductive polymer (3,4-ethylenedioxythiophene):poly(4-stylenesulfonate) (PEDOT:PSS) source/drain electrodes which is patterned by maskless laser direct patterning (LDP). The 5-microm resolution of source and drain patterns with PEDOT:PSS were clearly defined. Furthermore, the OTFTs with 10-microm channel length were successfully achieved by exposing the focused Neodymium:Yttrium Aluminum Garnet (Nd:YAG) laser beam onto the spin-coated PEDOT:PSS films and developing with deionized water. The electrical performance of the TIPS-pentacene TFTs with PEDOT:PSS source/drain electrodes were improved with decrease of the sheet resistance of PEDOT:PSS films when the PEDOT:PSS films were annealed at the temperature above 200 degrees C.
Shin
Hong-Sik
HS
Electronics and Telecommunications Research Institute (ETRI), 305-700 Daejeon, Korea.
Baek
Kyu-Ha
KH
Park
Sung-Soo
SS
Song
Ki-Chul
KC
Lee
Ga-Won
GW
Lee
Hi-Deok
HD
Wang
Jin-Suk
JS
Lee
Kijun
K
Do
Lee-Mi
LM