Functional microscopy tip fabrication by an electric conductive nanowire.
The functional microscopy tip was fabricated by an electric conductive nanowire (NW). Single crystalline nickel silicide (NiSi) NW grown by plasma-enhanced chemical vapor deposition has an excellent electrical conductivity. On behalf of the advantages in tiny size and conductivity of NiSi NW, it was utilized as a nanoscale probe. Dielectrophoretic method was applied to position the NW. The NiSi NW containing solution was dropped in an ac electric field applying system to align the NiSi NW on a Si cantilever. The fabricated NiSi NW-sitting functional microscopy tip obtained the information of topography and electrical signals from a nanoscale structure. It shows the high potential of nanoscale microscopy tip fabrication at reduced processing steps.
Kim
Joondong
J
Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials (KIMM), Daejeon 305343, Korea.
Yun
Ju-Hyung
JH
Hyun
Moon Seop
MS
Shin
Young-Hyun
YH
Park
Yun Chang
YC
Lee
JiHye
J
Jeong
Sohee
S
Han
Chang-Soo
CS