title: Maskless laser direct patterning of PEDOT/PSS layer for soluble process organic thin film transistor.
abstract: In this work, we have fabricated TIPS-pentacene TFTs with conductive polymer (3,4-ethylenedioxythiophene):poly(4-stylenesulfonate) (PEDOT:PSS) source/drain electrodes which is patterned by maskless laser direct patterning (LDP). The 5-microm resolution of source and drain patterns with PEDOT:PSS were clearly defined. Furthermore, the OTFTs with 10-microm channel length were successfully achieved by exposing the focused Neodymium:Yttrium Aluminum Garnet (Nd:YAG) laser beam onto the spin-coated PEDOT:PSS films and developing with deionized water. The electrical performance of the TIPS-pentacene TFTs with PEDOT:PSS source/drain electrodes were improved with decrease of the sheet resistance of PEDOT:PSS films when the PEDOT:PSS films were annealed at the temperature above 200 degrees C.
authors.affiliation: Electronics and Telecommunications Research Institute (ETRI), 305-700 Daejeon, Korea.
authors.forename: Hong-Sik
authors.initials: HS
authors.lastname: Shin
authors.forename: Kyu-Ha
authors.initials: KH
authors.lastname: Baek
authors.forename: Sung-Soo
authors.initials: SS
authors.lastname: Park
authors.forename: Ki-Chul
authors.initials: KC
authors.lastname: Song
authors.forename: Ga-Won
authors.initials: GW
authors.lastname: Lee
authors.forename: Hi-Deok
authors.initials: HD
authors.lastname: Lee
authors.forename: Jin-Suk
authors.initials: JS
authors.lastname: Wang
authors.forename: Kijun
authors.initials: K
authors.lastname: Lee
authors.forename: Lee-Mi
authors.initials: LM
authors.lastname: Do