title: Copper pattern on self-assembled monolayer through microcontact printing.
abstract: Cu pattern on 3-mercaptopropyltrimethoxysilane self-assembled monolayers (MPTS-SAMs) modified glass substrate was achieved by a combination of hydrophobic treatment through microcontact printing, activation and electroless plating. The MPTS-SAMs modified glass substrate was selectively deactivated by microcontact printing 1-hexadecanethiol ethanol solution. X-ray photoelectron spectroscopy (XPS) and water contact angle measurements confirmed that a selectively deactivated pattern was obtained, which was attributed to the formation of disulfide linkages between MPTS and 1-hexadecanethiol. The substrate was selectively activated by dipping into Ag colloids solution and then applied for electroless Cu plating. XPS spectra suggested an ideal catalytic pattern on the substrate due to the deposition of Ag particles on the MPTS and the formation of S-Ag bonds. SEM showed that the microstructure of Cu pattern on MPTS-SAMs was in good agreement with the corresponding silicon master with a resolution of 10 microm. The average electrical resistivity was about 1.8 x 10(-6) omegacm, measured by four-point probe technique. The results suggested that microcontact printing deactivating reagents on SAMs is a potential technique for Cu patterns preparation.
authors.affiliation: School of Info-Physics and Geomatics Engineering, Central South University, Changsha 410083, China.
authors.forename: Zheng-Chun
authors.initials: ZC
authors.lastname: Liu
authors.forename: Fei-Peng
authors.initials: FP
authors.lastname: Yang
authors.forename: Xiao-Wen
authors.initials: XW
authors.lastname: Xu
authors.forename: Can
authors.initials: C
authors.lastname: Guo
authors.forename: Jian-Xin
authors.initials: JX
authors.lastname: Liu