title: The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by substrate arrangements.
abstract: Hybrid hydrogen plasma was formed by biasing 13.56 MHz radio-frequency (rf) power on a substrate immersed in 2.45 GHz microwave electron cyclotron resonance (ECR) plasma. The influences of the substrate configuration on plasma characteristics were investigated. With increasing rf self-bias voltage, electron temperature, T(e), increases obviously in the case of the single-electrode substrate, whereas a slight change in T(e) was observed with the double-electrode substrate condition. Electron density rises almost with a same magnitude under both two substrate conditions. It exhibited that electron energy and density in ECR-rf hybrid mode could be adjusted independently by controlling rf discharge with favorable substrate configurations.
authors.affiliation: CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026, People's Republic of China. hyzhou@ustc.edu.cn
authors.forename: H Y
authors.initials: HY
authors.lastname: Zhou
authors.forename: L
authors.initials: L
authors.lastname: Wang
authors.forename: X D
authors.initials: XD
authors.lastname: Zhu
authors.forename: B
authors.initials: B
authors.lastname: Ke
authors.forename: F
authors.initials: F
authors.lastname: Ding
authors.forename: X H
authors.initials: XH
authors.lastname: Wen
authors.forename: Y N
authors.initials: YN
authors.lastname: Wang