title: Sharp high-aspect-ratio AFM tips fabricated by a combination of deep reactive ion etching and focused ion beam techniques.
abstract: The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 degrees or nanoscaled structures, standard silicon atomic force microscopy (AFM) tips do not provide satisfactory results. We have combined deep reactive ion etching (DRIE) and focused ion beam (FIB) lithography techniques in order to produce probes with sharp rocket-shaped silicon AFM tips for high resolution imaging. The cantilevers were shaped and the bulk micromachining was performed using the same DRIE equipment. To improve the tip aspect ratio we used FIB nanolithography technique. The tips were tested on narrow silicon trenches and over biological samples showing a better resolution when compared with standard AFM tips, which enables nanocharacterization and nanometrology of high-aspect-ratio structures and nanoscaled biological elements to be completed, and provides an alternative to commercial high aspect ratio AFM tips.
authors.affiliation: Nanobioengineering group, Institute for Bioengineering of Catalonia, Barcelona Science Park, c/Baldiri Reixac 10-12, 08028 Barcelona, Spain
authors.forename: David
authors.initials: D
authors.lastname: Caballero
authors.forename: Guillermo
authors.initials: G
authors.lastname: Villanueva
authors.forename: Jose Antonio
authors.initials: JA
authors.lastname: Plaza
authors.forename: Christopher A
authors.initials: CA
authors.lastname: Mills
authors.forename: Josep
authors.initials: J
authors.lastname: Samitier
authors.forename: Abdelhamid
authors.initials: A
authors.lastname: Errachid
mesh_terms: D045744:Cell Line, Tumor; D006801:Humans; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000379:methods*; D010006:Osteoblasts / Q000648:ultrastructure; D019904:Polymethyl Methacrylate / Q000737:chemistry; D012825:Silicon / Q000737:chemistry
chemical_list: D019904:Polymethyl Methacrylate; D012825:Silicon