title: Towards optimization of time modulated chemical vapour deposition for nanostructured diamond films on Ti6Al4V.
abstract: In this paper, we report the use of the TMCVD technique for the optimisation of deposited diamond films onto Ti6Al4V substrates. A number of samples were made varying the experimental parameters. The specimen surfaces were characterised using micro Raman spectra and SEM analyses. Results show that very different surface finish (from micro to nanostructures) and film characteristics can be obtained from the experimental parameters used. The quality of deposited diamond is very dependant on the experimental settings and process. It was found that lower residual stresses are developed using the TMCVD technique than with conventional CVD but depend on the structural diamond growth during the process. The quality of the deposited film was evaluated as a function of diamond to amorphous carbon ratio but showed no direct relation with the surface finish since it characterises the quality of the deposited diamond but not the quality of the film surface.
authors.affiliation: University of Strasbourg, IMFS (UMR 7507), 2 Rue Boussingault, 67000 Strasbourg, France.
authors.forename: Z
authors.initials: Z
authors.lastname: Nibennaoune
authors.forename: D
authors.initials: D
authors.lastname: George
authors.forename: F
authors.initials: F
authors.lastname: Antoni
authors.forename: J
authors.initials: J
authors.lastname: Santos
authors.forename: G
authors.initials: G
authors.lastname: Cabral
authors.forename: S
authors.initials: S
authors.lastname: Ahzi
authors.forename: D
authors.initials: D
authors.lastname: Ruch
authors.forename: J
authors.initials: J
authors.lastname: Gracio
authors.forename: Y
authors.initials: Y
authors.lastname: Remond
mesh_terms: D000327:Adsorption; D000497:Alloys; D020099:Coated Materials, Biocompatible / Q000737:chemistry*; D003460:Crystallization / Q000379:methods*; D018130:Diamond / Q000737:chemistry*; D005740:Gases / Q000737:chemistry; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008567:Membranes, Artificial; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods; D010316:Particle Size; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*
chemical_list: D000497:Alloys; D020099:Coated Materials, Biocompatible; D005740:Gases; D046911:Macromolecular Substances; D008567:Membranes, Artificial; C031462:titanium alloy (TiAl6V4); D018130:Diamond; D014025:Titanium