title: Focused-ion-beam-assisted magnet fabrication and manipulation for magnetic field detection applications.
abstract: A focused-ion-beam-assisted technique intended for ultrasmall, hard-magnet fabrication has been developed. By means of ion-beam-induced milling and deposition, reduced-size NdFeB magnets were extracted from a macroscopic quarry and bonded to the surface of a thin-film bulk acoustic resonator (FBAR). Electrical characterization of the FBAR before and after bonding of the magnet was carried out, thus observing both a downshifting of the resonance frequency and a reduction of the quality factor of the resonator. The magnetic behavior of the nanomagnet has been confirmed by means of magnetometry measurements based on atomic force microscopy.
authors.forename: Humberto
authors.initials: H
authors.lastname: Campanella
authors.forename: R P
authors.initials: RP
authors.lastname: del Real
authors.forename: Marina
authors.initials: M
authors.lastname: Díaz-Michelena
authors.forename: Marta
authors.initials: M
authors.lastname: Duch
authors.forename: Héctor
authors.initials: H
authors.lastname: Guerrero
authors.forename: Jaume
authors.initials: J
authors.lastname: Esteve
authors.forename: José A
authors.initials: JA
authors.lastname: Plaza