Cross-linkable molecular glasses: low dielectric constant materials patternable in hydrofluoroethers.
We report a new approach to solution-processable low-dielectric-constant (low-k) materials including photolithographic patterning of these materials in chemically benign and environmentally friendly solvents. A series of semiperfluorinated molecular glasses with styrenic substituents were successfully synthesized. These small molecular materials were thermally stable up to 400 degrees C and also exhibited an amorphous nature, which is essential to forming uniform films. Differential scanning calorimetry studies revealed that a cross-linking reaction occurred in the presence of acid, resulting in the formation of robust polymeric films. Atomic force microscopy images of the cross-linked films showed uniform and pinhole-free surface properties. Dielectric constants determined by a capacitance measurement were 2.6-2.8 (100 kHz) at ambient conditions, which are comparable to other polymeric low-k materials. The incorporation of semiperfluorinated substituents was effective in decreasing the dielectric constant; in particular, the fluorinated alkyl ether structure proved best. In addition, the fluorinated substituents contributed to good solubility in hydrofluoroether (HFE) solvents, which enabled the successful photolithographic patterning of those materials in HFEs down to a submicrometer scale.
Murotani
Eisuke
E
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA.
Lee
Jin-Kyun
JK
Chatzichristidi
Margarita
M
Zakhidov
Alexander A
AA
Taylor
Priscilla G
PG
Schwartz
Evan L
EL
Malliaras
George G
GG
Ober
Christopher K
CK