Fast modal method for subwavelength gratings based on B-spline formulation.
We present a B-spline modal method for analyzing a stack of complex structured layers. Thanks to a B-spline approximation of the field, we solve the Maxwell equations. Diffraction calculation is based on the scattering matrices algorithm. We prove a good convergence of this method. Moreover, B-spline approximation results in very sparse matrices, which are used to hasten the computation of eigenmodes. A method for cleaning the inverted sparse matrix is also presented.
Bouchon
Patrick
P
Laboratoire de Photonique et de Nanostructures (LPN-CNRS), Route de Nozay, 91460 Marcoussis, France.
Pardo
Fabrice
F
Haïdar
Riad
R
Pelouard
Jean-Luc
JL