An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy.
We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3x10(7) electrons/pixel was successfully reconstructed.
Takahashi
Yukio
Y
Frontier Research Base for Global Young Researchers, Frontier Research Center, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. takahashi@wakate.frc.eng.osaka-u.ac.jp
Kubo
Hideto
H
Nishino
Yoshinori
Y
Furukawa
Hayato
H
Tsutsumi
Ryosuke
R
Yamauchi
Kazuto
K
Ishikawa
Tetsuya
T
Matsubara
Eiichiro
E