title: On-chip three dimensional microcoils for MRI at the microscale.
abstract: We present for the first time a fully MEMS-integrated technology to manufacture 3D geometrically perfect solenoidal microcoils for microscale MRI applications. We report 25 microm isotropic resolution MR images of a copper sulfate aqueous phantom. These images are acquired using microcoils with 5 windings of insulated 25 microm diameter Au wire and with quality factors as high as 46 at the operating frequency (400 MHz).
authors.affiliation: University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Microactuators, Georges-Köhler-Allee 102, 79110 Freiburg, Germany. vlad.badilita@imtek.de
authors.forename: Vlad
authors.initials: V
authors.lastname: Badilita
authors.forename: Kai
authors.initials: K
authors.lastname: Kratt
authors.forename: Nicoleta
authors.initials: N
authors.lastname: Baxan
authors.forename: Mohammad
authors.initials: M
authors.lastname: Mohmmadzadeh
authors.forename: Tobias
authors.initials: T
authors.lastname: Burger
authors.forename: Hans
authors.initials: H
authors.lastname: Weber
authors.forename: Dominik V
authors.initials: DV
authors.lastname: Elverfeldt
authors.forename: Jürgen
authors.initials: J
authors.lastname: Hennig
authors.forename: Jan G
authors.initials: JG
authors.lastname: Korvink
authors.forename: Ulrike
authors.initials: U
authors.lastname: Wallrabe
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D021621:Imaging, Three-Dimensional / Q000295:instrumentation*; D008279:Magnetic Resonance Imaging / Q000295:instrumentation*; D008280:Magnetics / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D008904:Miniaturization; D014159:Transducers