title: Pillar-array based optical sensor.
abstract: An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.
authors.affiliation: Department of Electrical and Computer Engineering, University of Toronto.
authors.forename: Tao
authors.initials: T
authors.lastname: Xu
authors.forename: Ning
authors.initials: N
authors.lastname: Zhu
authors.forename: Michelle Y-C
authors.initials: MY
authors.lastname: Xu
authors.forename: Lech
authors.initials: L
authors.lastname: Wosinski
authors.forename: J Stewart
authors.initials: JS
authors.lastname: Aitchison
authors.forename: H E
authors.initials: HE
authors.lastname: Ruda
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D012031:Refractometry / Q000295:instrumentation*; D014159:Transducers