Pillar-array based optical sensor.
An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with different aspect ratios.
Xu
Tao
T
Department of Electrical and Computer Engineering, University of Toronto.
Zhu
Ning
N
Xu
Michelle Y-C
MY
Wosinski
Lech
L
Aitchison
J Stewart
JS
Ruda
H E
HE
D004867:Equipment Design; D019544:Equipment Failure Analysis; D012031:Refractometry / Q000295:instrumentation*; D014159:Transducers