Reflection-transmission phase shift: interferometer and viewing optics.
The interferometer and viewing optics that are the main optical components of an automated surface mapping system used to characterize the surface topography and the wall thickness uniformity of opaque and transparent spherical shells are described. To characterize surface finish or wall thickness of spherical shells with an accuracy of 10 nm and a resolution of 1 microm, the differential phase shift between two beams of orthogonal polarizations is measured before and after the probe beam has interacted with the test object.
Monjes
J A
JA
University of California, Lawrence Livermore National Laboratory, P.O. Box 5508, Livermore, California 94550, USA.
Weinstein
B W
BW
Willenborg
D L
DL