On-chip three dimensional microcoils for MRI at the microscale.
We present for the first time a fully MEMS-integrated technology to manufacture 3D geometrically perfect solenoidal microcoils for microscale MRI applications. We report 25 microm isotropic resolution MR images of a copper sulfate aqueous phantom. These images are acquired using microcoils with 5 windings of insulated 25 microm diameter Au wire and with quality factors as high as 46 at the operating frequency (400 MHz).
Badilita
Vlad
V
University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Microactuators, Georges-Köhler-Allee 102, 79110 Freiburg, Germany. vlad.badilita@imtek.de
Kratt
Kai
K
Baxan
Nicoleta
N
Mohmmadzadeh
Mohammad
M
Burger
Tobias
T
Weber
Hans
H
Elverfeldt
Dominik V
DV
Hennig
Jürgen
J
Korvink
Jan G
JG
Wallrabe
Ulrike
U
D004867:Equipment Design; D019544:Equipment Failure Analysis; D021621:Imaging, Three-Dimensional / Q000295:instrumentation*; D008279:Magnetic Resonance Imaging / Q000295:instrumentation*; D008280:Magnetics / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D008904:Miniaturization; D014159:Transducers