title: High-sensitivity nanometer-scale infrared spectroscopy using a contact mode microcantilever with an internal resonator paddle.
abstract: Infrared (IR) spectroscopy is one of the most widely used techniques for identifying and characterizing materials, but is diffraction limited to a spatial resolution of no smaller than several micrometers. This paper reports IR spectroscopy with 100 nm spatial resolution, using a tunable laser whose absorption in an organic layer is measured via atomic force microscopy. Wavelength-dependent absorption in the sample results in local thermomechanical deformation, which is sensed using the sharp tip of a resonant atomic force microscope cantilever. We introduce a cantilever and system design capable of 100 nm spatial resolution and a 6 x sensitivity improvement over previous approaches.
authors.affiliation: Anasys Instruments Incorporated, Santa Barbara, CA, USA.
authors.forename: K
authors.initials: K
authors.lastname: Kjoller
authors.forename: J R
authors.initials: JR
authors.lastname: Felts
authors.forename: D
authors.initials: D
authors.lastname: Cook
authors.forename: C B
authors.initials: CB
authors.lastname: Prater
authors.forename: W P
authors.initials: WP
authors.lastname: King