title: Digital holographic reflectometry.
abstract: Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO(2)/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.
authors.affiliation: Lyncée Tec SA, PSE-A, CH-1015 Lausanne, Switzerland.
authors.forename: Tristan
authors.initials: T
authors.lastname: Colomb
authors.forename: Stefan
authors.initials: S
authors.lastname: Krivec
authors.forename: Herbert
authors.initials: H
authors.lastname: Hutter
authors.forename: Ahmet Ata
authors.initials: AA
authors.lastname: Akatay
authors.forename: Nicolas
authors.initials: N
authors.lastname: Pavillon
authors.forename: Frédéric
authors.initials: F
authors.lastname: Montfort
authors.forename: Etienne
authors.initials: E
authors.lastname: Cuche
authors.forename: Jonas
authors.initials: J
authors.lastname: Kühn
authors.forename: Christian
authors.initials: C
authors.lastname: Depeursinge
authors.forename: Yves
authors.initials: Y
authors.lastname: Emery
mesh_terms: D000465:Algorithms; D006696:Holography / Q000379:methods*; D007090:Image Interpretation, Computer-Assisted / Q000379:methods*; D007368:Interferometry / Q000379:methods*; D010783:Photometry / Q000379:methods*; D012815:Signal Processing, Computer-Assisted