title: Titanium dioxide surface modification via ion-beam bombardment for vertical alignment of nematic liquid crystal.
abstract: We introduce the characteristics of the titanium dioxide (TiO(2)) inorganic film deposited by rf magnetron sputtering for liquid crystal display applications. The TiO(2) films demonstrated vertical alignment (VA) of the liquid crystals (LCs) obtained by using ion-beam (IB) bombardment. As observed by using x-ray photoelectron spectroscopy, the chemical structure of the TiO(2) was changed by IB bombardment, altering the Ti-O bonding of the Ti 2p spectra to lower intensity levels. Breaking Ti-O bonding by IB bombardment created pretilt angles between the TiO(2) film and LC molecules. The better voltage-transmittance characteristics of the VA LCDs based on TiO(2) film were measured and compared with the same characteristics of polyimide film.
authors.affiliation: Information Display Device Laboratory, Department of Electrical and Electronic Engineering, Yonsei University,262 Seongsanno, Seodaemun-gu, Seoul 120-749, South Korea.
authors.forename: Hyun-Jae
authors.initials: HJ
authors.lastname: Na
authors.forename: Jin-Woo
authors.initials: JW
authors.lastname: Lee
authors.forename: Won-Kyu
authors.initials: WK
authors.lastname: Lee
authors.forename: Ji-Hun
authors.initials: JH
authors.lastname: Lim
authors.forename: Hong-Gyu
authors.initials: HG
authors.lastname: Park
authors.forename: Byoung-Yong
authors.initials: BY
authors.lastname: Kim
authors.forename: Jeong-Yeon
authors.initials: JY
authors.lastname: Hwang
authors.forename: Jeong-Min
authors.initials: JM
authors.lastname: Han
authors.forename: Dae-Shik
authors.initials: DS
authors.lastname: Seo