Coherent diffraction surface imaging in reflection geometry.
We present a reflection based coherent diffraction imaging method which can be used to reconstruct a non periodic surface image from a diffraction amplitude measured in reflection geometry. Using a He-Ne laser, we demonstrated that a surface image can be reconstructed solely from the reflected intensity from a surface without relying on any prior knowledge of the sample object or the object support. The reconstructed phase image of the exit wave is particularly interesting since it can be used to obtain quantitative information of the surface depth profile or the phase change during the reflection process. We believe that this work will broaden the application areas of coherent diffraction imaging techniques using light sources with limited penetration depth.
Marathe
Shashidhara
S
Department of Materials Science and Engineering & Nano-bio Materials and Electronics, Gwangju Institute of Science and Technology, Gwangju, 500-712 Korea.
Kim
S S
SS
Kim
S N
SN
Kim
Chan
C
Kang
H C
HC
Nickles
P V
PV
Noh
D Y
DY
D000465:Algorithms; D003198:Computer Simulation; D004867:Equipment Design; D006046:Gold / Q000737:chemistry; D007091:Image Processing, Computer-Assisted; D021621:Imaging, Three-Dimensional; D007834:Lasers; D055095:Optics and Photonics; D012825:Silicon / Q000737:chemistry; D013499:Surface Properties; D014466:Ultraviolet Rays; D014965:X-Rays
D006046:Gold; D012825:Silicon