title: Technique for the study of surface roughness of thin films.
abstract: A new electron microscopy technique to study topography on thin films is reported. The technique is based on the use of weak diffracted beams. Applications to the characterization of single and polycrystalline films is discussed.
authors.forename: K
authors.initials: K
authors.lastname: Truszkowska
authors.forename: M
authors.initials: M
authors.lastname: Jose-Yacaman