title: Determination of 2-D thickness distributions of low absorbing thin films by new laser interferometry.
abstract: New laser interferometry has been developed for determination of thickness distributions of low absorbing films on transparent substrates. This technique is suitable for films with either a gradual change or a step change in thickness. With this technique we have obtained fringe patterns showing the 2-D thickness distribution of Se films. This technique is simple and nondestructive without involving computations for films with low absorption and substrates transparent to the laser beam.
authors.forename: T
authors.initials: T
authors.lastname: Mishima
authors.forename: K C
authors.initials: KC
authors.lastname: Kao