ToF-SIMS Depth Profiling of Organic Films: A Comparison between Single Beam and Dual-beam Analysis.
In dual-beam depth profiling, a high energy analysis beam and a lower energy etching beam are operated in series. Although the fluence of the analysis beam is usually kept well below the static SIMS limit, complete removal of the damage induced by the high energy analysis beam while maintaining a good depth resolution is difficult. In this study a plasma polymerized tetraglyme film is used as the model organic system and the dimensionless parameter R, (analysis beam fluence)/(total ion fluence), is introduced to quantify the degree of sample damage induced as a function of the analysis beam fluence. It was observed for a constant C(60) (+) etching beam fluence, increasing the analysis fluence (and consequently increasing the R parameter) increased in the amount of damage accumulated in the sample. For Bi(n) (+) (n = 1 and 3) and C(60) (+) depth profiling, minimal damage accumulation was observed up to R = 0.03, with a best depth resolution of 8 nm. In general, an increase in the Bi(n) (+) analysis fluence above this value resulted in a decrease in the molecular signals of the steady state region of the depth profile and a degradation of the depth resolution at the polymer/substrate interface.
Brison
J
J
National ESCA and Surface Analysis Center for Biomedical Problems, University of Washington, Department of Chemical Engineering, Box 351750, Seattle, WA 98195.
Muramoto
S
S
Castner
David G
DG
Rapid Commun Mass Spectrom. 2007;21(16):2680-4
17639575
Langmuir. 2005 Feb 1;21(3):870-81
15667162
Mass Spectrom Rev. 2010 Mar-Apr;29(2):247-93
19449334
Anal Chem. 2008 May 1;80(9):3412-5
18355087
J Phys Chem B. 2005 Jun 23;109(24):11973-9
16852476
Rapid Commun Mass Spectrom. 1998;12(19):1303-12
9773521
Anal Bioanal Chem. 2009 Apr;393(8):1835-42
19153718
J Am Soc Mass Spectrom. 2005 Oct;16(10):1608-18
16112869
J Phys Chem C Nanomater Interfaces. 2008 Oct 23;112(42):16550-16555
19855815
J Phys Chem B. 2006 Apr 27;110(16):8329-36
16623517
Anal Chem. 2005 Feb 1;77(3):911-22
15679361
J Mass Spectrom. 2005 Aug;40(8):985-99
16106340
Anal Chem. 2008 Jul 15;80(14):5293-301
18549239
Anal Chem. 2003 Apr 1;75(7):1754-64
12705613
J Biomater Sci Polym Ed. 2002;13(4):367-90
12160299
Surf Interface Anal. 2011 Jan;43(1-2):58-61
22016576
J Biomed Mater Res. 1992 Apr;26(4):415-39
1601898
J Am Soc Mass Spectrom. 2007 Aug;18(8):1559-67
17604641
Anal Chem. 1990 Oct 1;62(19):2122-30
2256549
Appl Surf Sci. 2008 Dec 15;255(4):1190-1192
19430585
Anal Chem. 2003 Sep 1;75(17):4402-7
14632043
J Phys Chem B. 2008 Mar 6;112(9):2596-605
18254619
J Phys Chem C Nanomater Interfaces. 2009 Apr 9;113(14):5641
20174461