title: ToF-SIMS Depth Profiling of Organic Films: A Comparison between Single Beam and Dual-beam Analysis.
abstract: In dual-beam depth profiling, a high energy analysis beam and a lower energy etching beam are operated in series. Although the fluence of the analysis beam is usually kept well below the static SIMS limit, complete removal of the damage induced by the high energy analysis beam while maintaining a good depth resolution is difficult. In this study a plasma polymerized tetraglyme film is used as the model organic system and the dimensionless parameter R, (analysis beam fluence)/(total ion fluence), is introduced to quantify the degree of sample damage induced as a function of the analysis beam fluence. It was observed for a constant C(60) (+) etching beam fluence, increasing the analysis fluence (and consequently increasing the R parameter) increased in the amount of damage accumulated in the sample. For Bi(n) (+) (n = 1 and 3) and C(60) (+) depth profiling, minimal damage accumulation was observed up to R = 0.03, with a best depth resolution of 8 nm. In general, an increase in the Bi(n) (+) analysis fluence above this value resulted in a decrease in the molecular signals of the steady state region of the depth profile and a degradation of the depth resolution at the polymer/substrate interface.
authors.affiliation: National ESCA and Surface Analysis Center for Biomedical Problems, University of Washington, Department of Chemical Engineering, Box 351750, Seattle, WA 98195.
authors.forename: J
authors.initials: J
authors.lastname: Brison
authors.forename: S
authors.initials: S
authors.lastname: Muramoto
authors.forename: David G
authors.initials: DG
authors.lastname: Castner
references.citation: Rapid Commun Mass Spectrom. 2007;21(16):2680-4
references.pmid: 17639575
references.citation: Langmuir. 2005 Feb 1;21(3):870-81
references.pmid: 15667162
references.citation: Mass Spectrom Rev. 2010 Mar-Apr;29(2):247-93
references.pmid: 19449334
references.citation: Anal Chem. 2008 May 1;80(9):3412-5
references.pmid: 18355087
references.citation: J Phys Chem B. 2005 Jun 23;109(24):11973-9
references.pmid: 16852476
references.citation: Rapid Commun Mass Spectrom. 1998;12(19):1303-12
references.pmid: 9773521
references.citation: Anal Bioanal Chem. 2009 Apr;393(8):1835-42
references.pmid: 19153718
references.citation: J Am Soc Mass Spectrom. 2005 Oct;16(10):1608-18
references.pmid: 16112869
references.citation: J Phys Chem C Nanomater Interfaces. 2008 Oct 23;112(42):16550-16555
references.pmid: 19855815
references.citation: J Phys Chem B. 2006 Apr 27;110(16):8329-36
references.pmid: 16623517
references.citation: Anal Chem. 2005 Feb 1;77(3):911-22
references.pmid: 15679361
references.citation: J Mass Spectrom. 2005 Aug;40(8):985-99
references.pmid: 16106340
references.citation: Anal Chem. 2008 Jul 15;80(14):5293-301
references.pmid: 18549239
references.citation: Anal Chem. 2003 Apr 1;75(7):1754-64
references.pmid: 12705613
references.citation: J Biomater Sci Polym Ed. 2002;13(4):367-90
references.pmid: 12160299
references.citation: Surf Interface Anal. 2011 Jan;43(1-2):58-61
references.pmid: 22016576
references.citation: J Biomed Mater Res. 1992 Apr;26(4):415-39
references.pmid: 1601898
references.citation: J Am Soc Mass Spectrom. 2007 Aug;18(8):1559-67
references.pmid: 17604641
references.citation: Anal Chem. 1990 Oct 1;62(19):2122-30
references.pmid: 2256549
references.citation: Appl Surf Sci. 2008 Dec 15;255(4):1190-1192
references.pmid: 19430585
references.citation: Anal Chem. 2003 Sep 1;75(17):4402-7
references.pmid: 14632043
references.citation: J Phys Chem B. 2008 Mar 6;112(9):2596-605
references.pmid: 18254619
references.citation: J Phys Chem C Nanomater Interfaces. 2009 Apr 9;113(14):5641
references.pmid: 20174461