Optofluidic notch filter integration by lift-off of thin films.
Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for approximately 1 cm long chips consisting of liquid-core and solid-core waveguides.
Phillips
Brian S
BS
ECEn Department, Brigham Young University, 459 Clyde Building, Provo, UT 84602, USA.
Measor
Philip
P
Zhao
Yue
Y
Schmidt
Holger
H
Hawkins
Aaron R
AR
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