Production of high-quality V-coatings.
If during the production of V-coatings the minimal power reflectance is nonvanishing, a remedy can be found in correcting the layer thicknesses in the next production run. Then difficulties arise since the same reflectance can be caused by two different sets of thicknesses. This paper describes a new method for the calculation of these thicknesses while a system is developed to discriminate which of the two sets was actually involved in the (erroneous) earlier result. A detailed example is given based on quartz-crystal monitoring of the process.
Laan
C J
CJ
Frankena
H J
HJ