Probe-based 3-D nanolithography using self-amplified depolymerization polymers.
Knoll
Armin W
AW
IBM Research - Zurich, Switzerland. ark@zurich.ibm.com
Pires
David
D
Coulembier
Olivier
O
Dubois
Philippe
P
Hedrick
James L
JL
Frommer
Jane
J
Duerig
Urs
U
D018625:Microscopy, Atomic Force; D036103:Nanotechnology / Q000379:methods*; D011108:Polymers / Q000737:chemistry*; D011327:Printing / Q000379:methods*
D011108:Polymers