title: MEMS-based high speed scanning probe microscopy.
abstract: The high speed performance of a scanning probe microscope (SPM) is improved if a microelectromechanical systems (MEMS) device is employed for the out-of-plane scanning motion. We have carried out experiments with MEMS high-speed z-scanners (189 kHz fundamental resonance frequency) in both atomic force microscope and scanning tunneling microscope modes. The experiments show that with the current MEMS z-scanner, lateral tip speeds of 5 mm/s can be achieved with full feedback on surfaces with significant roughness. The improvement in scan speed, obtained with MEMS scanners, increases the possibilities for SPM observations of dynamic processes. Even higher speed MEMS scanners with fundamental resonance frequencies in excess of a megahertz are currently under development.
authors.affiliation: Leiden University, Niels Bohrweg 2, 2333 CA Leiden, The Netherlands.
authors.forename: E C M
authors.initials: EC
authors.lastname: Disseldorp
authors.forename: F C
authors.initials: FC
authors.lastname: Tabak
authors.forename: A J
authors.initials: AJ
authors.lastname: Katan
authors.forename: M B S
authors.initials: MB
authors.lastname: Hesselberth
authors.forename: T H
authors.initials: TH
authors.lastname: Oosterkamp
authors.forename: J W M
authors.initials: JW
authors.lastname: Frenken
authors.forename: W M
authors.initials: WM
authors.lastname: van Spengen
mesh_terms: D003198:Computer Simulation; D004867:Equipment Design; D005246:Feedback; D020342:Finite Element Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D018625:Microscopy, Atomic Force / Q000295:instrumentation; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation; D020527:Microscopy, Scanning Probe / Q000295:instrumentation*; D016252:Microscopy, Scanning Tunneling / Q000295:instrumentation; D009038:Motion; D013997:Time Factors