title: Nonlithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays.
abstract: Semiconductor nanowires have potential applications in photovoltaics, batteries, and thermoelectrics. We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion. Strong light emission in the entire visible and near infrared wavelength range at room temperature, tunable by etching condition, attributed to surface features, and enhanced by silver surface plasmon, is demonstrated.
authors.affiliation: Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems, University of Illinois, Urbana, Illinois 61822, USA.
authors.forename: Winston
authors.initials: W
authors.lastname: Chern
authors.forename: Keng
authors.initials: K
authors.lastname: Hsu
authors.forename: Ik Su
authors.initials: IS
authors.lastname: Chun
authors.forename: Bruno P de
authors.initials: BP
authors.lastname: Azeredo
authors.forename: Numair
authors.initials: N
authors.lastname: Ahmed
authors.forename: Kyou-Hyun
authors.initials: KH
authors.lastname: Kim
authors.forename: Jian-min
authors.initials: JM
authors.lastname: Zuo
authors.forename: Nick
authors.initials: N
authors.lastname: Fang
authors.forename: Placid
authors.initials: P
authors.lastname: Ferreira
authors.forename: Xiuling
authors.initials: X
authors.lastname: Li
mesh_terms: D003460:Crystallization / Q000379:methods*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008029:Lighting / Q000295:instrumentation*; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D010316:Particle Size; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*; D012834:Silver / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D012834:Silver; D012825:Silicon