Patterning of rutile TiO2 surface by ion beam lithography through full-solid masks.
In this work we present and discuss the nanopatterning of rutile TiO(2) single crystal surfaces following their irradiation with energetic heavy ions through a stencil mask of Ni filled self-ordered porous anodic alumina. After etching in HF a corrugated surface morphology is obtained composed of parallel alternate furrows and ridges (or nanobars) 50 nm in diameter and with 100 nm pitch. In addition, isolated, but collapsed, TiO(2) nanorods are seen lying on the patterned surface. The stability of the nanopatterned surface under high temperatures treatments and crystalline properties are analyzed.
Sanz
R
R
Instituto de Ciencia de Materiales de Madrid (CSIC), Madrid, Spain. rsanz@nanoate.com
Jaafar
M
M
Hernández-Vélez
M
M
Asenjo
A
A
Vázquez
M
M
Jensen
J
J