Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography.
Rectangular-apertured micro-Fresnel lens arrays are proposed. These lens arrays have been fabricated by an electron-beam writing system specially developed for the fabrication of microoptical devices. It is experimentally demonstrated that the lens arrays showed uniform focusing characteristics, and that each lens exhibited a diffraction-limited focusing characteristic with efficiency of 74%.
Shiono
T
T
Setsune
K
K
Yamazaki
O
O
Wasa
K
K