title: Effect of piezoelectric transducer nonlinearity on phase shift interferometry.
abstract: If the nonlinearity of the motion of a piezoelectric transducer (PZT) can be described as a quadratic function, the integrated intensity of one frame in phase shift interferometry can be calculated using the Fresnel integral. For a PZT with smaller nonlinearity, the rms phase error is almost linearly proportional to the quadratic coefficient The effects of PZT nonlinearity on the three- and the four-bucket algorithms are compared.
authors.forename: C
authors.initials: C
authors.lastname: Ai
authors.forename: J C
authors.initials: JC
authors.lastname: Wyant