title: The role of helium ion microscopy in the characterisation of complex three-dimensional nanostructures.
abstract: This work addresses two major issues relating to Helium Ion Microscopy (HeIM). First we show that HeIM is capable of solving the interpretation difficulties that arise when complex three-dimensional structures are imaged using traditional high lateral resolution techniques which are transmission based, such as scanning transmission electron microscopy (STEM). Secondly we use a nano-composite coating consisting of amorphous carbon embedded in chromium rich matrix to estimate the mean escape depth for amorphous carbon for secondary electrons generated by helium ion impact as a measure of HeIM depth resolution.
authors.affiliation: Department of Engineering Materials, The University of Sheffield, Mappin Street, Sheffield S13JD, UK. c.rodenburg@shef.ac.uk
authors.forename: C
authors.initials: C
authors.lastname: Rodenburg
authors.forename: X
authors.initials: X
authors.lastname: Liu
authors.forename: M A E
authors.initials: MA
authors.lastname: Jepson
authors.forename: Z
authors.initials: Z
authors.lastname: Zhou
authors.forename: W M
authors.initials: WM
authors.lastname: Rainforth
authors.forename: J M
authors.initials: JM
authors.lastname: Rodenburg