title: Influence of ion assistance on the optical properties of MgF(2).
abstract: The optical properties of MgF(2) films prepared by evaporation and ion-assisted deposition have been determined from transmittance and near-normal incidence reflectance measurements and also from electron-energy loss spectroscopy (EELS). The results show that oxygen-ion assistance leads to higher extinction coefficients for wavelengths <180 nm. Transmission electron microscopy studies show that the crystal grain size of MgF(2) films is not strongly affected by oxygen or argon-ion bombardment. The presence of MgO in the films is inferred from RBS measurements and proposed to be the major factor influencing VUV losses. EELS is also demonstrated to be a valuable technique for determination of optical properties from the near-infrared to x-ray regions of the spectrum.
authors.forename: P J
authors.initials: PJ
authors.lastname: Martin
authors.forename: W G
authors.initials: WG
authors.lastname: Sainty
authors.forename: R P
authors.initials: RP
authors.lastname: Netterfield
authors.forename: D R
authors.initials: DR
authors.lastname: McKenzie
authors.forename: D J
authors.initials: DJ
authors.lastname: Cockayne
authors.forename: S H
authors.initials: SH
authors.lastname: Sie
authors.forename: O R
authors.initials: OR
authors.lastname: Wood
authors.forename: H G
authors.initials: HG
authors.lastname: Craighead