Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping.
We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling.
Rodenburg
C
C
Department of Engineering Materials, University of Sheffield, Mappin Street, Sheffield S13JD, UK. c.rodenburg@sheffield.ac.uk
Jepson
M A E
MA
Bosch
E G T
EG
Dapor
M
M