title: Rectangular-apertured micro-Fresnel lens arrays fabricated by electron-beam lithography.
abstract: Rectangular-apertured micro-Fresnel lens arrays are proposed. These lens arrays have been fabricated by an electron-beam writing system specially developed for the fabrication of microoptical devices. It is experimentally demonstrated that the lens arrays showed uniform focusing characteristics, and that each lens exhibited a diffraction-limited focusing characteristic with efficiency of 74%.
authors.forename: T
authors.initials: T
authors.lastname: Shiono
authors.forename: K
authors.initials: K
authors.lastname: Setsune
authors.forename: O
authors.initials: O
authors.lastname: Yamazaki
authors.forename: K
authors.initials: K
authors.lastname: Wasa