title: Compact grating interferometer for producing photoresist gratings with incoherent light.
abstract: An achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer produced crossed-line photoresist gratings with first-order diffraction efficiency exceeding 20%.
authors.forename: D
authors.initials: D
authors.lastname: Post
authors.forename: K
authors.initials: K
authors.lastname: Patorski
authors.forename: P
authors.initials: P
authors.lastname: Ning