title: Optimization and application of influence function in abrasive jet polishing.
abstract: We analyze the material removal mechanism of abrasive jet polishing (AJP) technology, based on the fluid impact dynamics theory. Combined with the computational fluid dynamics simulation and process experiments, influence functions at different impingement angles are obtained, which are not of a regular Gaussian shape and are unfit for the corrective figuring of optics. The influence function is then optimized to obtain an ideal Gaussian shape by rotating the oblique nozzle, and its stability is validated through a line scanning experiment. The fluctuation of the influence function can be controlled within +/-5%. Based on this, we build a computed numerically controlled experimental system for AJP, and one flat BK7 optical glass with a diameter of 20mm is polished. After two iterations of polishing, the peak-to-valley value decreases from 1.43lambda (lambda=632.8nm in this paper) to 0.294lambda, and the rms value decreases from 0.195lambda to 0.029lambda. The roughness of this polished surface is within 2nm. The experimental result indicates that the optimized influence function is suitable for precision optics figuring and polishing.
authors.affiliation: National University of Defense Technology, DeYa, Changsha, Hunan Province 410073 China. lzzsp@yahoo.cn
authors.forename: Zhaoze
authors.initials: Z
authors.lastname: Li
authors.forename: Shengyi
authors.initials: S
authors.lastname: Li
authors.forename: Yifan
authors.initials: Y
authors.lastname: Dai
authors.forename: Xiaoqiang
authors.initials: X
authors.lastname: Peng