title: A Si/Glass Bulk-Micromachined Cryogenic Heat Exchanger for High Heat Loads: Fabrication, Test, and Application Results.
abstract: This paper reports on a micromachined Si/glass stack recuperative heat exchanger with in situ temperature sensors. Numerous high-conductivity silicon plates with integrated platinum resistance temperature detectors (Pt RTDs) are stacked, alternating with low-conductivity Pyrex spacers. The device has a 1 x 1-cm(2) footprint and a length of up to 3.5 cm. It is intended for use in Joule-Thomson (J-T) coolers and can sustain pressure exceeding 1 MPa. Tests at cold-end inlet temperatures of 237 K-252 K show that the heat exchanger effectiveness is 0.9 with 0.039-g/s helium mass flow rate. The integrated Pt RTDs present a linear response of 0.26%-0.30%/K over an operational range of 205 K-296 K but remain usable at lower temperatures. In self-cooling tests with ethane as the working fluid, a J-T system with the heat exchanger drops 76.1 K below the inlet temperature, achieving 218.7 K for a pressure of 835.8 kPa. The system reaches 200 K in transient state; further cooling is limited by impurities that freeze within the flow stream. In J-T self-cooling tests with an external heat load, the system reaches 239 K while providing 1 W of cooling. In all cases, there is an additional parasitic heat load estimated at 300-500 mW.
authors.affiliation: Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109 USA.
authors.forename: Weibin
authors.initials: W
authors.lastname: Zhu
authors.forename: Michael J
authors.initials: MJ
authors.lastname: White
authors.forename: Gregory F
authors.initials: GF
authors.lastname: Nellis
authors.forename: Sanford A
authors.initials: SA
authors.lastname: Klein
authors.forename: Yogesh B
authors.initials: YB
authors.lastname: Gianchandani