title: Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors.
abstract: Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO(2) colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO(2) microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.
authors.affiliation: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering,Jilin University, 2699 Qianjin Street, Changchun 130012, China.
authors.forename: Li
authors.initials: L
authors.lastname: Guo
authors.forename: Hong
authors.initials: H
authors.lastname: Xia
authors.forename: Hui-Tao
authors.initials: HT
authors.lastname: Fan
authors.forename: Yong-Lai
authors.initials: YL
authors.lastname: Zhang
authors.forename: Qi-Dai
authors.initials: QD
authors.lastname: Chen
authors.forename: Tong
authors.initials: T
authors.lastname: Zhang
authors.forename: Hong-Bo
authors.initials: HB
authors.lastname: Sun