Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45 degrees angled fiber.
We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that utilizes the total internal reflection at a 45 degrees angled fiber end face to steer the optical axis by 90 degrees . By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer-metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9-14.2 psi, with a sensitivity of 0.009 microm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.
Bae
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Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
Zhang
X M
XM
Liu
H
H
Yu
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