Femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors.
Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO(2) colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO(2) microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.
Guo
Li
L
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering,Jilin University, 2699 Qianjin Street, Changchun 130012, China.
Xia
Hong
H
Fan
Hui-Tao
HT
Zhang
Yong-Lai
YL
Chen
Qi-Dai
QD
Zhang
Tong
T
Sun
Hong-Bo
HB