title: Nondestructive single-shot soft x-ray lithography and contact microscopy using a laser-produced plasma source.
abstract: A toroidal relay optic has been used to overcome the problem of damage caused by debris that has limited previous attempts at soft x-ray lithography and contact microscopy using laser-produced plasma sources. Not only is the specimen preserved, but it is now possible to have a vacuum retaining soft x-ray transparent Si(3)N(4) window as a permanent part of the apparatus, greatly simplifying specimen handling. The exposure times are ~2 ns.
authors.forename: R J
authors.initials: RJ
authors.lastname: Rosser
authors.forename: R
authors.initials: R
authors.lastname: Feder
authors.forename: A
authors.initials: A
authors.lastname: Ng
authors.forename: F
authors.initials: F
authors.lastname: Adams
authors.forename: P
authors.initials: P
authors.lastname: Celliers
authors.forename: R J
authors.initials: RJ
authors.lastname: Speer