title: Step response and spatial resolution of an optical heterodyne profiling instrument.
abstract: An optical heterodyne instrument for measuring profiles of smooth surfaces has been developed. The instrument is intended for measuring very small deviations from the mean surface height but is demonstrated to be capable of measuring step heights of several hundred nanometers. The step response and the spatial resolution of the instrument are calculated and experimentally verified.
authors.forename: D
authors.initials: D
authors.lastname: Pantzer