Fabrication of high-frequency pMUT arrays on silicon substrates.
A novel technique based on silicon micromachining for fabrication of linear arrays of high-frequency piezoelectric micromachined ultrasound transducers (pMUT) is presented. Piezoelectric elements are formed by deposition of lead zirconia titanate into etched features of a silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated element is characterized by pulse echo response.
Department of Micro and Nanotechnology, Technical University of Denmark, Kgs. Lyngby, Denmark.
Thomas
T
Pedersen
Tomasz
T
Zawada
Karsten
K
Hansen
Rasmus
R
Lou-Moeller
Erik
E
Thomsen
D000465:Algorithms; D006878:Hydroxides / Q000737:chemistry; D007854:Lead / Q000737:chemistry; D017680:Potassium Compounds / Q000737:chemistry; D012825:Silicon / Q000737:chemistry*; D014025:Titanium / Q000737:chemistry; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*; D015040:Zirconium / Q000737:chemistry
D006878:Hydroxides; D017680:Potassium Compounds; C065536:lead titanate zirconate; D007854:Lead; D015040:Zirconium; D014025:Titanium; C029943:potassium hydroxide; D012825:Silicon