Method for gauge block measurement with the heterodyne central fringe identification technique.
In a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage.
Wu
Wang-Tsung
WT
Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta-Hsueh Road, Hsin-Chu 30010, Taiwan, China.
Chen
Yen-Liang
YL
Hsieh
Hung-Chih
HC
Chang
Wei-Yao
WY
Su
Der-Chin
DC