Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.
Burckel
D Bruce
DB
Sandia National Laboratories, Albuquerque, NM 87185, USA. dbburck@sandia.gov
Wendt
Joel R
JR
Ten Eyck
Gregory A
GA
Ellis
A Robert
AR
Brener
Igal
I
Sinclair
Michael B
MB
D036103:Nanotechnology / Q000379:methods*; D019904:Polymethyl Methacrylate / Q000737:chemistry; D017550:Spectroscopy, Fourier Transform Infrared
D019904:Polymethyl Methacrylate