Derivation of surface macroroughness parameters of a random rough surface from an optical interferometric measurement.
A new technique for the measurement of surface roughness based on the intensity fluctuations of laser light backscattered from a moving surface has been introduced. Using a statistical model describing surface macroroughness, the possibility of inversion of optically measured data to geometrical surface profile parameters is investigated.
Gyimesi
M
M
Richter
P
P
Lorincz
E
E