New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges.
A new interpolation to estimate a spatial profile of plasma densities of unmeasured regions for two-dimensional probe diagnostics is proposed. Our algorithm is based on the plasma diffusion characteristics. From a comparison with a well known interpolation, Modified Shepard, it has been found that our method gives more accurate plasma density profile, especially at the edge region of the measurement substrate, and improves computational efficiency.
Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea.
Se-Jin
SJ
Oh
Sung-Ho
SH
Jang
Young-Cheol
YC
Kim
Chin-Wook
CW
Chung