Transportable distance measurement system based on superheterodyne interferometry using two phase-locked frequency-doubled Nd:YAG lasers.
We describe a transportable distance measurement system based on synthetic wavelength interferometry. Two frequency-doubled Nd:yttrium aluminum garnet lasers at 532 nm are used to generate a synthetic wavelength of approximately 2.5 cm. A nonpolarizing interferometric system has been set up to eliminate polarization cross-talk issue. A superheterodyne detection was performed to measure the synthetic phase and to determine absolute distances. The capability to achieve fringe interpolation of 2pi/5600 has been demonstrated and an agreement in distance measurement at the 4 microm level has been achieved, compared to an optical interferometric 3 m long displacement bench.
Azouigui
S
S
Laboratoire Commun de Métrologie LNE-CNAM, 61 rue du Landy, Saint-Denis 93210, France.
Badr
T
T
Wallerand
J-P
JP
Himbert
M
M
Salgado
J
J
Juncar
P
P