Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.
Sandia National Laboratories, Albuquerque, NM 87185, USA. dbburck@sandia.gov
D Bruce
DB
Burckel
Joel R
JR
Wendt
Gregory A
GA
Ten Eyck
A Robert
AR
Ellis
Igal
I
Brener
Michael B
MB
Sinclair
D036103:Nanotechnology / Q000379:methods*; D019904:Polymethyl Methacrylate / Q000737:chemistry; D017550:Spectroscopy, Fourier Transform Infrared
D019904:Polymethyl Methacrylate