High-resolution holographic image projection at visible and ultraviolet wavelengths.
Holograms of resolution test masks have been recorded in photoresist using visible and ultraviolet lasers. Reconstructed images have been projected onto and recorded in photoresist by lithography. Speckle-free submicron resolution has been achieved using simple and inexpensive optical systems and using lasers with limited coherence. Using these techniques with excimer lasers single-shot recording with exposure time of ~20 ns and multishot reconstruction with exposure time </= 1 s are possible for image fields up to 10 cm in diameter.
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Ross
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Davis
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Klemitz