Optimization of the grating efficiency in grazing incidence.
A detailed numerical study of the sinusoidal and triangular groove shape grating efficiency behavior has been carried out in grazing incidence using rigorous electromagnetic theory. The optimized parameters for maximum efficiency have been found for both types of grating. The influence of the metal reflectance and the oxide layer are discussed, and some results of higher order efficiency are also presented.
L B
LB
Mashev
E K
EK
Popov
E G
EG
Loewen